초록 ▼

A disclosed detector element includes a substrate including a void, a heating unit including a heat generating electrode bridged across the void, and a temperature sensor including a temperature sensor electrode provided above the void. The heat generating electrode and the temperature sensor electr

A disclosed detector element includes a substrate including a void, a heating unit including a heat generating electrode bridged across the void, and a temperature sensor including a temperature sensor electrode provided above the void. The heat generating electrode and the temperature sensor electrode are warped, cantilevered, and standing up in space. The temperature sensor measures heat quantity transported from the heating unit. Distribution of an atmosphere surrounding an object surface with respect to the object surface, and the transportation state of the atmosphere are measured by using at least one of temperature, humidity, a direction or velocity of flow, pressure, and composition of gas in the atmosphere. Behavior of the gas adhering and aggregating onto the object surface, and behavior of aggregated liquid undergoing transpiration from the object surface are detected, based on the distribution and the transportation state measured.

대표청구항 ▼

What is claimed is: 1. A detector element comprising: a substrate including one of a through hole and a void; a heating unit including a heat generating electrode bridged across said one of the through hole and the void, the heat generating electrode being warped, cantilevered, and standing up in s

What is claimed is: 1. A detector element comprising: a substrate including one of a through hole and a void; a heating unit including a heat generating electrode bridged across said one of the through hole and the void, the heat generating electrode being warped, cantilevered, and standing up in space; and a temperature sensor including a temperature sensor electrode provided above said one of the through hole and the void, the temperature sensor electrode being warped, cantilevered, and standing up in space; wherein the temperature sensor measures heat quantity transported from the heating unit. 2. The detector element according to claim 1, wherein the heating unit and the temperature sensor are disposed adjacent to each other, and the temperature sensor measures heat quantity transported by a fluid from the heating unit in accordance with one of a flow velocity and a flow rate of the fluid and heat conductivity of an atmosphere. 3. The detector element according to claim 1, wherein a flow velocity is measured based on a distance between the heating unit and the heat generating electrode, and time required for heat to be transported by a fluid from the heating unit in accordance with one of a flow velocity and a flow rate of the fluid and heat conductivity of an atmosphere. 4. The detector element according to claim 1, wherein the heating unit is disposed inside the temperature sensor and along a direction intersecting a flow of a fluid. 5. The detector element according to claim 1, wherein the temperature sensor electrode of the temperature sensor is ring-shaped, and the heat generating electrode of the heating unit is disposed at the center of the ring-shaped temperature sensor electrode of the temperature sensor. 6. The detector element according to claim 1, further comprising: a resistive element including an electrode that is bridged across said one of the through hole and the void, the electrode being warped, cantilevered, and standing up in space; wherein the resistive element generates heat and indicates a first resistance value in response to receiving a heat generation current at a heat generation timing, and indicates a second resistance value in response to receiving a detection current at a detection timing, and a transported heat quantity is calculated based on a value obtained by subtracting the second resistance value from the first resistance value.