초록 ▼

3C--SiC nanowhisker and a method of synthesizing 3C--SiC nanowhisker wherein its diameter and length can be controlled. The method is safe and low cost, and the whisker can emit visible light of various wavelengths. 3C--SiC nanowhisker is formed by depositing thin film (2) made of a metal element on

3C--SiC nanowhisker and a method of synthesizing 3C--SiC nanowhisker wherein its diameter and length can be controlled. The method is safe and low cost, and the whisker can emit visible light of various wavelengths. 3C--SiC nanowhisker is formed by depositing thin film (2) made of a metal element on Si substrate (1), placing this Si substrate (1) into a plasma CVD apparatus, and holding it for predetermined time at predetermined substrate temperature in the plasma consisting of hydrogen and hydrocarbon. Si of Si substrate (1) and C in plasma dissolve at supersaturation into metal liquid particle (3), 3C--SiC nanowhisker (4) grows on the metal liquid particles (3), whisker surface is terminated with H so as to maintain the diameter constant, and the metal liquid particles (3) at whisker root take in Si from Si substrate (1) and penetrate into Si substrate (1).

대표청구항 ▼

What is claimed is: 1. A synthesizing method of 3C--SiC nanowhiskers, characterized in that it comprises the steps of: predetermining a desired diameter of the 3C--SiC nanowhisker; selecting a thickness of a thin film made of a metal element or metal elements based on the predetermined desired diam

What is claimed is: 1. A synthesizing method of 3C--SiC nanowhiskers, characterized in that it comprises the steps of: predetermining a desired diameter of the 3C--SiC nanowhisker; selecting a thickness of a thin film made of a metal element or metal elements based on the predetermined desired diameter of the 3C--SiC nanowhisker; depositing said thin film on a Si substrate to said selected thickness; and holding said Si substrate in a plasma consisting of hydrogen and hydrocarbon for a time period at a substrate temperature, wherein said thin film having said selected thickness becomes a liquid phase to form metal liquid fine particles having a diameter proportional to said thickness of said thin film on said Si substrate, nuclei for said 3C--SiC nanowhiskers are formed on the surface of said metal liquid fine particles by Si atoms of said Si substrate and C atoms from said hydrocarbon decomposed in said plasma dissolving into said metal liquid fine particles, and then said 3C--SiC nanowhiskers having said predetermined desired diameter grow from said Si atoms and C atoms continuously being supplied to said nuclei, wherein a root of said 3C--SiC nanowhisker is buried in said Si substrate by supplying Si of said 3C--SiC nanowhisker from said Si substrate, and fixed with said Si substrate by said metal liquid fine particle existing at said root forming a silicide with said Si substrate and said 3C--SiC nanowhisker is grown perpendicular to said Si substrate. 2. A synthesizing method of 3C--SiC nanowhiskers as set forth in claim 1, characterized in that said metal element is one or more elements selected from the group which consists of Fe, Co and Ni. 3. A synthesizing method of 3C--SiC nanowhiskers as set forth in claim 1, characterized in that a length of said 3C--SiC whisker is controlled by controlling said time period and said substrate temperature. 4. A synthesizing method of 3C--SiC nanowhiskers as set forth in claim 1 or 2, characterized in that said metal element of said thin film is Fe, and said hydrocarbon is a paraffin hydrocarbon expressed as chemical formula CnH2n+2. 5. A synthesizing method of 3C--SiC nanowhiskers as set forth in claim 4, characterized in that said thin film has thickness between 5 nm and 105 nm. 6. A synthesizing method of 3C--SiC nanowhiskers as set forth in claim 1, characterized in that said substrate temperature is 800 to 1100�� C. 7. A synthesizing method of 3C--SiC nanowhiskers as set forth in claim 1 or 3, characterized in that said plasma is microwave plasma. 8. A method of synthesizing 3C--SiC nanowhiskers as set forth in claim 1 or 2, characterized in that the hydrocarbon is methane. 9. A method of synthesizing 3C--SiC nanowhiskers as set forth in claim 1 or 2, characterized in that the hydrocarbon is ethane. 10. A method of synthesizing 3C--SiC nanowhiskers as set forth in claim 1 or 2, characterized in that the hydrocarbon is butane.