초록 ▼

A surface inspection of the system applies a first oblique illumination beam and may also apply a second illumination beam to illuminate a surface either sequentially or simultaneously. Radiation reflected or scattered is collected by preferably three collection channels and detected by three corres

A surface inspection of the system applies a first oblique illumination beam and may also apply a second illumination beam to illuminate a surface either sequentially or simultaneously. Radiation reflected or scattered is collected by preferably three collection channels and detected by three corresponding detector arrays, although a different number of channels and detector arrays may be used. One or both illumination beams are focused to a line on the surface to be inspected and each line is imaged onto one or more detector arrays in the up to three or more detection and collection channels. Relative motion is caused between the lines and the surface inspected in a direction perpendicular to the lines, thereby increasing throughput while retaining high resolution and sensitivity. The same detection channels may be employed by detecting scattered or reflected radiation from both illumination beams. Fourier filters may be employed to filter out diffraction at one or more different spatial frequencies.

대표청구항 ▼

What is claimed is: 1. An optical apparatus for detecting anomalies of a sample, comprising: first optics focusing a beam of radiation into a first focused beam at an oblique first incidence angle to a first line focused on a surface of the sample, said first beam and a direction that is through th

What is claimed is: 1. An optical apparatus for detecting anomalies of a sample, comprising: first optics focusing a beam of radiation into a first focused beam at an oblique first incidence angle to a first line focused on a surface of the sample, said first beam and a direction that is through the first beam and that is normal to the surface defining an incidence plane of the first beam, said first line being substantially in the plane of incidence of the first beam; second optics focusing a beam of radiation into a second focused beam at a second incidence angle to an illuminated area on the surface of the sample, said second incidence angle being different from the first incidence angle; a first array of detectors; collection optics collecting scattered or reflected radiation from the first line and/or the illuminated area on the sample surface and originating from the first and/or second beam and focusing the collected radiation from a portion of the line and/or the illuminated area to a corresponding detector in the first array. 2. The apparatus of claim 1, further comprising an instrument causing relative motion between the first beam and the sample so that the first line and illuminated area are scanned across the surface of the sample in a direction transverse to the first line. 3. The apparatus of claim 2, wherein the relative motion between the first beam and the surface causes the first line to be scanned over the surface at a speed in excess of 50 mm per second. 4. The apparatus of claim 1, said first detector array being in a double dark field location with respect to the first beam. 5. The apparatus of claim 4, further comprising a second detector array, said collection optics collecting radiation from the first line and/or the illuminated area on the sample surface scattered or reflected in a direction substantially normal or adjacent to a normal direction to the surface and originating from the first and/or second beam, and focusing the collected scattered or reflected radiation from a portion of the line and/or the illuminated area to a corresponding detector in the second array. 6. The apparatus of claim 4, further comprising a second detector array, wherein said second array detects specular reflections of the second beam from the surface of the sample. 7. The apparatus of claim 4, further comprising a second detector array, said collection optics collecting radiation from the first line and/or the illuminated area on the sample surface scattered in directions away from specular reflection directions of the first and second beams from the surface, and focusing the collected scattered radiation from a portion of the line and/or the illuminated area to a corresponding detector in the second array. 8. The apparatus of claim 1, further comprising a second detector array, said first and second detector arrays being arranged in double dark field locations with respect to the first beam, said collection optics collecting scattered radiation from the first line and/or the illuminated area on the sample surface and originating from the first and/or second beam and focusing the collected scattered radiation from a portion of the line and/or the illuminated area to a corresponding detector in each of the two arrays. 9. The apparatus of claim 8, further comprising a third detector array, said collection optics collecting radiation from the first line and/or the illuminated area on the sample surface scattered in a direction substantially normal to or adjacent to a normal direction to the surface and originating from the first and/or second beam, and focusing the collected scattered radiation to said third detector array. 10. The apparatus of claim 8, further comprising a third detector array, wherein said third array detects specular reflections of the second beam from the surface of the sample. 11. The apparatus of claim 1, said collection optics collecting radiation from the first line and/or the illuminated area on the sample surface scattered or reflected in a direction substantially normal to or adjacent to a normal direction to the surface and originating from the first and/or second beam, and focusing the collected scattered radiation to said first detector array. 12. The apparatus of claim 11, said second incidence angle being substantially 0 degrees from a normal direction or within 20 degrees from a normal direction, so that said first detector array detects scattered radiation in a near angle dark field or bright field configuration. 13. The apparatus of claim 11, said second incidence angle being substantially 0 degrees from a normal direction or within 5 degrees from a normal direction, so that said first detector array detects scattered radiation in a near angle dark field or bright field configuration. 14. The apparatus of claim 1, wherein said first array detects specular reflections of the second beam from the surface of the sample. 15. The apparatus of claim 1, said collection optics collecting radiation from the first line and/or the illuminated area on the sample surface scattered in directions away from specular reflection directions of the first and second beams from the surface, and focusing the collected scattered radiation to said first detector array. 16. The apparatus of claim 1, said apparatus comprising a second array of detectors. 17. The apparatus of claim 16, said second optics focusing the second beam to a focused second line on the surface of the sample, and said collection optics imaging said first and/or second line onto the second array of detectors, each detector in the second array detecting radiation from a corresponding portion of the first and/or second line. 18. The apparatus of claim 17, wherein resolution of the apparatus in a direction along the first or second line is determined by size of the detectors in the first or second array in a direction along a length of an image of the first or second line at such array. 19. The apparatus of claim 17, said first and/or second detector array comprising a one or two dimensional array of detectors. 20. The apparatus of claim 19, said first and/or second detector array comprising a two dimensional array of detectors, said apparatus further comprising a circuit controlling time delayed integration of output signals of the detectors in the first and/or second array. 21. The apparatus of claim 1, said second optics focusing the second beam to a focused second line on the surface of the sample, and said collection optics imaging said first and/or second line onto the first array of detectors, each detector in the first array detecting radiation from a corresponding portion of the first and/or second line. 22. The apparatus of claim 21, further comprising an instrument causing relative motion between the second beam and the sample so that the second line is scanned across the surface of the sample in a direction transverse to the second line. 23. The apparatus of claim 22, wherein the relative motion between the second beam and the surface causes the second line to be scanned over the surface at a speed in excess of 50 mm per second. 24. The apparatus of claim 21, further comprising a device altering width of an image of the first or second line at said first or second detector array to control resolution of detection in a direction perpendicular to the first or second line. 25. The apparatus of claim 24, said device comprising a beam expander in an optical path of the first or second beam. 26. The apparatus of claim 25, said device selectively places one of a plurality of objectives in said optical path. 27. The apparatus of claim 21, wherein resolution of the apparatus in a direction along the first or second line is determined by size of the detectors in the first or second array in a direction along a length of an image of the first or second line at such array. 28. The apparatus of claim 21, said first and/or second detector array comprising a one or two dimensional array of detectors. 29. The apparatus of claim 28, said first and/or second detector array comprising a two dimensional array of detectors, said apparatus further comprising a circuit controlling time delayed integration of output signals of the detectors in the first and/or second array. 30. The apparatus of claim 1, said second beam illuminating a substantially rectangular illuminated area that is focused on the surface of the sample. 31. The apparatus of claim 30, said apparatus comprising a two dimensional second array of detectors, wherein resolution of the apparatus is determined by size of the detectors. 32. The apparatus of claim 31, further comprising a circuit controlling time delayed integration of output signals of the detectors in the array. 33. The apparatus of claim 1, said first and/or second beam is polarized. 34. The apparatus of claim 33, wherein said first and/or second beam comprises P-polarized or circularized polarized radiation, and the collection optics collects unpolarized radiation scattered or reflected by the surface. 35. The apparatus of claim 33, said collection optics comprising a polarizing element. 36. The apparatus of claim 35, wherein said polarizing element passes P-polarized, S-polarized or radiation of all polarizations. 37. The apparatus of claim 33, wherein said first and/or second beam comprises P-polarized, S-polarized or circularized polarized radiation. 38. The apparatus of claim 1, wherein said first and/or second beam comprises pulsed radiation and wherein the pulsed radiation comprises at least one ultraviolet or deep ultraviolet wavelength. 39. The apparatus of claim 38, said pulsed radiation being pulsed at a frequency that exceeds about 10 MHz. 40. The apparatus of claim 1, wherein said first and/or second beam comprises continuous wave radiation. 41. The apparatus of claim 1, wherein said first and second beams comprise respectively radiation of a first and a second wavelength different from each other, and wherein both beams are focused to the surface substantially simultaneously. 42. The apparatus of claim 41, said apparatus comprising at least two detector arrays, wherein said collection optics comprises a device separating the radiation scattered by the surface into radiation of the first wavelength and radiation of the second wavelength before the scattered radiation is supplied to the at least two detector arrays. 43. The apparatus of claim 1, wherein the beams are focused to the surface sequentially. 44. The apparatus of claim 1, further comprising an instrument causing relative motion between the first and/or second beam and the sample so that said first and/or second optics are stationary when the first and/or second beam are caused to scan the entire surface of the sample. 45. The apparatus of claim 1, wherein said first and second beams are focused to the surface substantially simultaneously so that the first line and the illuminated area are separated by an offset. 46. The apparatus of claim 45, wherein said second beam is focused to a focused line on the surface. 47. The apparatus of claim 45, further comprising a second detector array, said collection optics collecting radiation from the first line and focusing the collected radiation from a portion of the first line to a corresponding detector in the first array, and collecting radiation from the illuminated area and focusing the collected radiation from a portion of the illuminated area to a corresponding detector in the second array. 48. The apparatus of claim 47, said first detector array being in a double dark field location with respect to the first beam, and the second detector array detecting radiation scattered or reflected by the illuminated area in a direction substantially normal or near a normal direction to the surface. 49. The apparatus of claim 1, said first or second optics, or both optics, comprising a cylindrical lens or a cylindrical mirror. 50. The apparatus of claim 1, said first optics focusing the first beam substantially only in a direction normal to the plane of incidence. 51. The apparatus of claim 1, said first or second optics comprising a cylindrical lens that has a principal plane substantially parallel to the surface. 52. The apparatus of claim 1, said first optics comprising a cylindrical lens that has a principal plane substantially parallel to the surface, wherein said first optics focuses an input radiation beam directed at the cylindrical lens, said input beam being in a direction oblique to the surface and to the principal plane of the lens. 53. The apparatus of claim 1, said first optics comprising a cylindrical mirror that has two substantially straight edges, wherein a plane defined by the two edges is substantially parallel to the surface. 54. The apparatus of claim 1, said first array of detectors being a linear array substantially parallel to the line. 55. The method of claim 1, wherein said collection optics and/or said array are/is such that an image of said line falls onto said array of detectors despite changes in position of the surface. 56. The apparatus of claim 1, wherein a dimension of said first array and/or said collection optics cause/causes an image of said first line to fall onto said first array of detectors despite changes in position of the surface. 57. The apparatus of claim 1, wherein said first line has a substantially uniform width. 58. The apparatus of claim 1, said first optics focusing a collimated beam into the first focused beam. 59. The apparatus of claim 1, said first array comprising detectors having pixel sizes along a direction along an image of the first line on the first array in the range of about 0.3 to 0.7 microns. 60. The apparatus of claim 1, said first line having a width in the range of about 1 to 5 microns. 61. An optical apparatus for detecting anomalies of a sample, comprising: first optics focusing a beam of radiation into a first focused beam at an oblique first incidence angle to a first line focused on a surface of the sample; second optics focusing a beam of radiation into a second focused beam at a second incidence angle to illuminated area illuminated area on the surface of the sample, said second incidence angle being different from the first incidence angle; first detector array; collection optics collecting scattered radiation from the first line and/or the illuminated area on the sample surface and originating from the first and/or second beam and focusing the collected scattered radiation from a portion of the line and/or the illuminated area to a corresponding detector in the first array, said collection optics comprising a spatial filter that filters the scattered radiation at one or more spatial frequencies. 62. The apparatus of claim 61, said first beam and a direction that is through the first beam and that is normal to the surface defining an incidence plane of the first beam, said first line being substantially in the plane of incidence of the first beam. 63. The apparatus of claim 61, said filter comprising a plurality of rods arranged in one or arrays at one or more spatial frequencies. 64. The apparatus of claim 63, wherein a two-dimensional diffracting structure is present on the surface of the sample, said one or more spatial frequencies of the filter match spatial frequencies of two-dimensional Fourier components from the two-dimensional structure on the surface of the sample. 65. The apparatus of claim 61, further comprising collection optics collecting scattered radiation from the first line and/or the illuminated area on the sample surface and originating from the first and/or second beam and focusing the collected scattered radiation from a portion of the line and/or the illuminated area to a corresponding detector in the first array. 66. The apparatus of claim 65, said collection optics collecting radiation from the first line and/or the illuminated area on the sample surface scattered in a direction substantially normal or adjacent to a normal direction to the surface and originating from the first and/or second beam, and focusing the collected scattered radiation from a portion of the line and/or the illuminated area to a corresponding detector in the first array. 67. The apparatus of claim 66, wherein said first array detects specular reflections of the second beam from the surface of the sample. 68. The apparatus of claim 66, said second incidence angle being substantially 0 degrees from a normal direction or within 15 degrees from a normal direction, so that said first detector array detects scattered radiation in a near angle dark field or bright field configuration. 69. The apparatus of claim 65, said collection optics collecting radiation from the first line and/or the illuminated area on the sample surface scattered in directions away from specular reflection directions of the first and second beams from the surface, and focusing the collected scattered radiation from a portion of the line and/or the illuminated area to a corresponding detector in the first array. 70. An optical apparatus for detecting anomalies of a sample, comprising: first optics focusing a beam of radiation into a focused beam at an incidence angle to illuminated area illuminated area on the surface of the sample; a first array of detectors; collection optics collecting scattered radiation from the illuminated area on the sample surface and originating from the first beam and focusing the collected scattered radiation from a portion of the illuminated area to a corresponding detector in the first array, wherein said optics comprises a reflector in a collection aperture of the collection optics that reflects the beam to the surface of the sample, said reflector having an elongated shape to reduce obstruction of the collection aperture of the collection optics. 71. The apparatus of claim 70, said beam being in a direction within a range of about 0 to 5 degrees from a normal direction to the surface of the sample. 72. The apparatus of claim 70, further comprising second optics focusing a beam of radiation into a second focused beam at an oblique second incidence angle to a line focused on a surface of the sample; said second incidence angle being different from the first incidence angle, said second beam and a direction that is through the second beam and that is normal to the surface defining an incidence plane of the second beam, said line being substantially in the plane of incidence of the second beam. 73. The apparatus of claim 70, said reflector comprising a narrow mirror or a narrow partial reflecting mirror on a plate. 74. The apparatus of claim 73, wherein a width of the narrow mirror is such that the mirror obscures not more than about half of a pupil of the collection optics. 75. The apparatus of claim 74, said illuminated area being in the shape of a rectangle or a line, said mirror having a width adequate for illuminating said rectangle or line. 76. The apparatus of claim 70, said collection optics collecting scattered or reflected radiation in a direction substantially normal to the surface of the sample from the illuminated area on the sample surface. 77. The apparatus of claim 76, said collection optics comprising an objective that focuses the first beam to a line on the surface, collects scattered or reflected radiation in a direction substantially normal to the surface of the sample from the line on the sample surface and focuses the collected scattered or reflected radiation from a portion of the line to a corresponding detector in the first array. 78. The apparatus of claim 77, said objective having a numerical aperture of not more than 0.95. 79. An optical method for detecting anomalies of a sample, comprising: focusing a beam of radiation into a first focused beam at an oblique first incidence angle to a first line focused on a surface of the sample, said first beam and a direction that is through the first beam and that is normal to the surface defining an incidence plane of the first beam, said first line being substantially in the plane of incidence of the first beam; focusing a beam of radiation into a second focused beam at a second incidence angle to an illuminated area on the surface of the sample, said second incidence angle being different from the first incidence angle; and collecting scattered or reflected radiation from the first line and/or the illuminated area on the sample surface and originating from the first and/or second beam and focusing the collected radiation from a portion of the line and/or the illuminated area to a corresponding detector in a first array of detectors. 80. The method of claim 79, further comprising causing relative motion between the first beam and the sample so that the first line and illuminated area are scanned across the surface of the sample in a direction transverse to the first line. 81. The method of claim 80, wherein the relative motion between the first beam and the surface causes the first line to be scanned over the surface at a speed in excess of 50 mm per second. 82. The method of claim 79, further comprising locating said first detector array to detect radiation scattered from the surface in directions away from the plane of incidence of the first beam. 83. The method of claim 82, further comprising collecting radiation from the first line and/or the illuminated area on the sample surface scattered or reflected in a direction substantially normal or adjacent to a normal direction to the surface and originating from the first and/or second beam, and focusing such collected scattered or reflected radiation from a portion of the line and/or the illuminated area to a corresponding detector in a second array of detectors. 84. The method of claim 82, further comprising placing a second detector array to detect specular reflections of the second beam from the surface of the sample. 85. The method of claim 79, wherein said collecting collects radiation from the first line and/or the illuminated area on the sample surface scattered or reflected in a direction substantially normal to or adjacent to a normal direction to the surface and originating from the first and/or second beam, and said focusing focuses the collected scattered radiation to said first detector array. 86. The method of claim 85, said second incidence angle being substantially 0 degrees from a normal direction or within 20 degrees from a normal direction, so that said first detector array detects scattered radiation in a near angle dark field or bright field configuration. 87. The method of claim 85, said second incidence angle being substantially 0 degrees from a normal direction or within 5 degrees from a normal direction, so that said first detector array detects scattered radiation in a near angle dark field or bright field configuration. 88. The method of claim 79, wherein said first array is located to detect specular reflections of the second beam from the surface of the sample. 89. The method of claim 79, wherein said collecting collects radiation from the first line and/or the illuminated area on the sample surface scattered in directions away from specular reflection directions of the first and second beams from the surface, and said focusing focuses the collected scattered radiation to said first detector array. 90. The method of claim 89, wherein said focusing of the second beam focuses such beam to a focused second line on the surface of the sample, and said collecting and focusing scattered or reflected radiation from the first and/or the second line images said first and/or second line onto a second array of detectors, each detector in the second array detecting radiation from a corresponding portion of the first and/or second line. 91. The method of claim 90, wherein resolution of the method in a direction along the first or second line is determined by size of the detectors in the first or second array in a direction along a length of an image of the first or second line at such array. 92. The method of claim 90, said first and/or second detector array comprising a two dimensional array of detectors, said method further comprising performing time delayed integration of output signals of the detectors in the first and/or second array. 93. The method of claim 79, wherein said focusing of the second beam focuses such beam to a focused second line on the surface of the sample, and said collecting and focusing scattered or reflected radiation from the first and/or the second line images said first and/or second line onto the first array of detectors, each detector in the first array detecting radiation from a corresponding portion of the first and/or second line. 94. The method of claim 93, further comprising causing relative motion between the second beam and the sample so that the second line is scanned across the surface of the sample in a direction transverse to the second line. 95. The method of claim 94, wherein the relative motion between the second beam and the surface causes the second line to be scanned over the surface at a speed in excess of 50 mm per second. 96. The method of claim 93, further comprising altering width of an image of the first or second line at said first or second detector array to control resolution of detection in a direction perpendicular to the first or second line. 97. The method of claim 96, wherein said altering comprises expanding a dimension of the first or second beam. 98. The method of claim 97, wherein said altering comprises selectively places one of a plurality of objectives in an optical path of the first or second beam. 99. The method of claim 93, wherein resolution of the method in a direction along the first or second line is determined by size of the detectors in the first or second array in a direction along a length of an image of the first or second line at such array. 100. The method of claim 93, said first and/or second detector array comprising a two dimensional array of detectors, said method further comprising performing time delayed integration of output signals of the detectors in the first and/or second array. 101. The method of claim 79, said second beam illuminating a substantially rectangular illuminated area that is focused on the surface of the sample. 102. The method of claim 101, wherein said collecting and focusing focuses radiation from the rectangular illuminated area to a two dimensional second array of detectors, wherein resolution of the method is determined by size of the detectors in the second array. 103. The method of claim 102, further comprising controlling time delayed integration of output signals of the detectors in the second array. 104. The method of claim 79, further comprising causing said first and/or second beam to be polarized. 105. The method of claim 104, wherein said first and/or second beam comprises P-polarized or circularized polarized radiation, and the collecting collects unpolarized radiation scattered or reflected by the surface. 106. The method of claim 104, wherein said collecting comprises polarizing radiation from said first and/or second beam collected from the surface. 107. The method of claim 106, wherein said polarizing of the collected radiation passes P-polarized, S-polarized or radiation of all polarizations. 108. The method of claim 104, wherein said causing causes said first and/or second beam to comprise P-polarized, S-polarized or circularized polarized radiation. 109. The method of claim 79, further comprising supplying radiation for forming said first and/or second beam, wherein the radiation supplied comprises pulsed radiation and wherein the pulsed radiation comprises at least one ultraviolet or deep ultraviolet wavelength. 110. The method of claim 109, said pulsed radiation being pulsed at a frequency that exceeds about 10 MHz. 111. The method of claim 79, further comprising supplying radiation for forming said first and/or second beam, wherein the radiation supplied comprises continuous wave radiation. 112. The method of claim 79, further comprising supplying radiation for forming said first and/or second beam, wherein said first and second beams comprise respectively radiation of a first and a second wavelength different from each other, and wherein both beams are focused to the surface substantially simultaneously. 113. The method of claim 112, further comprising detecting separately and by means of at least two detector arrays the collected radiation at the first and second wavelengths. 114. The method of claim 113, further comprising separating the radiation scattered or reflected by the surface into radiation of the first wavelength and radiation of the second wavelength before the scattered radiation is supplied to the at least two detector arrays. 115. The method of claim 79, wherein the beams are focused to the surface sequentially. 116. The method of claim 79, wherein said first and second beams are focused to the surface substantially simultaneously so that the first line and the illuminated area are separated by an offset. 117. The method of claim 116, wherein said second beam is focused to a focused line on the surface. 118. The method of claim 116, wherein said collecting and focusing collect radiation from the first line and focus the collected radiation from a portion of the first line to a corresponding detector in the first array, and collect radiation from the illuminated area and focus the collected radiation from a portion of the illuminated area to a corresponding detector in a second array of detectors. 119. The method of claim 118, further comprising placing said first detector array being in a double dark field location with respect to the first beam, and the second detector array detecting radiation scattered or reflected by the illuminated area in a direction substantially normal or near a normal direction to the surface. 120. The method of claim 79, wherein said focusing of the first beam focuses substantially only in a direction normal to the plane of incidence. 121. The method of claim 79, wherein said focusing of the first or second beam comprises orienting a cylindrical lens that has a principal plane so that such principal plane is substantially parallel to the surface. 122. The method of claim 79, wherein said focusing of the first beam comprises directing an input radiation beam at the cylindrical lens in a direction oblique to the surface and to the principal plane of the lens. 123. The method of claim 79, further comprising orienting said first array of detectors so that it forms a linear array substantially parallel to the line. 124. The method of claim 79, wherein said collecting causes an image of said line to fall onto said array of detectors despite changes in position of the surface. 125. The method of claim 79, wherein said focusing of the first beam is such that the first line has a substantially uniform width. 126. The method of claim 79, wherein focusing of said first beam focuses a collimated beam into the first focused beam. 127. The method of claim 79, wherein said focusing of the first beam is such that said first line having a width in the range of about 1 to 5 microns. 128. An optical method for detecting anomalies of a sample, comprising: focusing a beam of radiation into a first focused beam at an oblique first incidence angle to a first line focused on a surface of the sample; focusing a beam of radiation into a second focused beam at an second incidence angle to illuminated area illuminated area on the surface of the sample, said second incidence angle being different from the first incidence angle; and collecting scattered radiation from the first line and/or the illuminated area on the sample surface and originating from the first and/or second beam and focusing the collected scattered radiation from a portion of the line and/or the illuminated area to a corresponding detector in the first array, wherein said collecting comprises passing the collected radiation through a spatial filter that filters the scattered radiation at one or more spatial frequencies. 129. The method of claim 128, wherein a two-dimensional diffracting structure is present on the surface of the sample, said one or more spatial frequencies of the filter match spatial frequencies of two-dimensional Fourier components from the two-dimensional structure on the surface of the sample. 130. The method of claim 128, wherein said collecting and focusing collect scattered radiation from the first line and/or the illuminated area on the sample surface and originating from the first and/or second beam and focus the collected scattered radiation from a portion of the line and/or the illuminated area to a corresponding detector in the first array. 131. The method of claim 130, wherein said collecting and focusing collect radiation from the first line and/or the illuminated area on the sample surface scattered in a direction substantially normal or adjacent to a normal direction to the surface and originating from the first and/or second beam, and focus the collected scattered radiation from a portion of the line and/or the illuminated area to a corresponding detector in the first array. 132. The method of claim 131, wherein said collecting and focusing collect specular reflections of the second beam from the surface of the sample and focus the collected radiation to said first array. 133. The method of claim 131, said second incidence angle being substantially 0 degrees from a normal direction or within 15 degrees from a normal direction, so that said first detector array detects scattered radiation in a near angle dark field or bright field configuration. 134. An optical method for detecting anomalies of a sample, comprising: focusing a beam of radiation into a focused beam at an incidence angle to illuminated area illuminated area on the surface of the sample; collecting by means of collection optics scattered radiation from the illuminated area on the sample surface and originating from the first beam and focusing the collected scattered radiation from a portion of the illuminated area to a corresponding detector in a first array of detectors, wherein said focusing employs a reflector in a collection aperture of the collection optics that reflects the beam to the surface of the sample, said reflector having an elongated shape to reduce obstruction of the collection aperture of the collection optics. 135. The method of claim 134, said beam being in a direction within a range of about 0 to 5 degrees from a normal direction to the surface of the sample. 136. The method of claim 134, further comprising focusing a beam of radiation into a second focused beam at an oblique second incidence angle to a line focused on a surface of the sample; said second incidence angle being different from the first incidence angle, said second beam and a direction that is through the second beam and that is normal to the surface defining an incidence plane of the second beam, said line being substantially in the plane of incidence of the second beam. 137. The method of claim 134, wherein a width of the reflector is such that the reflector obscures not more than about half of a pupil of the collection optics.