A valve assembly for controlling gas delivery from a higher pressure fluid source to a lower pressure processing tool. The valve assembly includes a valve poppet movingly engageable with a valve seating member and a fluid permeable insert positioned between the valve poppet and the valve seating mem
A valve assembly for controlling gas delivery from a higher pressure fluid source to a lower pressure processing tool. The valve assembly includes a valve poppet movingly engageable with a valve seating member and a fluid permeable insert positioned between the valve poppet and the valve seating member that is unexposed to flowing fluid when the valve poppet is in a closed position thereby preventing fluid flow through the valve assembly and providing a diffusional path for transfer of all flowing fluid when the valve poppet is in an open position. The permeable insert can be inserted into the sealable and engageable surface of either the valve seat member or the valve poppet.
대표청구항▼
I claim: 1. A fluid supply apparatus including a fluid source and a permeable fluid valve assembly for delivery of a fluid from the fluid source to a downstream processing tool, wherein the permeable valve assembly comprises: an inlet port for communication with an outlet of a fluid source for flow
I claim: 1. A fluid supply apparatus including a fluid source and a permeable fluid valve assembly for delivery of a fluid from the fluid source to a downstream processing tool, wherein the permeable valve assembly comprises: an inlet port for communication with an outlet of a fluid source for flowing fluid from the fluid source; and a permeable valve device positioned downstream from the fluid source comprising a valve member and a permeable valve seat member, wherein: the valve device is adapted for movement between a sealing position that blocks fluid flow through the inlet port and an open position that permits fluid flow through the inlet port and valve device, the valve member has a first end and a second end and the first end is positioned in the inlet port, the valve seat member has an abutting first end having an outflow bore therethrough for acceptance of an extension attached to at least a section of the second end of the valve member, the abutting first end of the valve seat member comprises a member that is conformingly configured for engagement with the second end of the valve member and fabricated of a fluid permeable material for transference of the fluid from the fluid source through the inlet port and the permeable material of the valve seat member to the downstream processing tool when the valve device is in the open position, and the fluid source comprises at least one of (i) a fluid storage and dispensing vessel holding a storage medium for said fluid, and (ii) a fluid storage and dispensing vessel having a pressure actuated fluid flow control assembly interiorly disposed therein. 2. The fluid supply apparatus according to claim 1, wherein the fluid source comprises a fluid storage and dispensing vessel holding a storage medium for said fluid. 3. The fluid supply apparatus according to claim 2, wherein the fluid storage and dispensing vessel includes a valve head comprising said permeable fluid valve assembly. 4. The fluid supply apparatus according to claim 1, wherein the fluid source comprises a fluid storage and dispensing vessel having a pressure actuated fluid flow control assembly interiorly disposed therein. 5. The fluid supply apparatus according to claim 4, wherein the pressure actuated fluid flow control assembly comprises the permeable valve assembly in a regulator. 6. The fluid supply apparatus according to claim 1, wherein the valve member is an elongated structure comprising a first end extension having a reduced cross-section relative to the inlet port to provide sufficient area for passing fluid through the inlet port around the valve member to pass through the permeable material of the valve seat member. 7. The fluid supply apparatus according to claim 6, wherein the valve seat member further comprises an outflow bore through the fluid permeable material member for receiving an extension element attached to the second end of the valve member, wherein the extension element sealingly fits within the bore to allow movement in the bore but substantially reduces fluid passage through the bore from the fluid source. 8. The fluid supply apparatus according to claim 7, further comprising a chamber surrounding a diaphragm that defines an interior volume isolated from pressure conditions upstream of the valve element and engaged with the extension element of the valve member to control the movement of the valve member in a manner that retains the valve member in the sealing position until a pressure differential between the interior volume of the diaphragm and the interior of the chamber moves the valve member to the open position. 9. The fluid supply apparatus according to claim 8, further comprising resilient means positioned near the first end of the valve member and holding the valve member in the sealing position. 10. The fluid supply apparatus according to claim 7, wherein the extension element has a reduced cross-section tip to provide sufficient space in the outflow bore for filling of the fluid source when the valve member is moved to the fully open position. 11. The fluid supply apparatus according to claim 1, wherein the fluid permeable material member surrounds the outflow bore that traverses through the valve seating member. 12. The fluid supply apparatus according to claim 1, wherein the fluid source comprises a semiconductor manufacturing fluid. 13. The fluid supply apparatus according to claim 1, coupled in fluid supplying relationship to a semiconductor manufacturing tool. 14. The fluid supply apparatus according to claim 13, wherein the semiconductor manufacturing tool comprises an ion implant tool. 15. A semiconductor manufacturing facility including a fluid supply apparatus according to claim 1, and a semiconductor manufacturing tool. 16. The semiconductor manufacturing facility according to claim 15, further enclosing flow circuitry interconnecting the fluid source and the semiconductor manufacturing tool. 17. The semiconductor manufacturing facility according to claim 15, wherein the semiconductor manufacturing tool comprises an ion implant tool. 18. A fluid supply apparatus including a higher pressure fluid source and a permeable valve assembly for controlling gas delivery from the higher pressure fluid source to a lower pressure processing tool, said permeable valve assembly comprising: an inlet port for connection to an outlet of the fluid source for flowing fluid from the fluid source; a valve poppet movingly engageable with a valve seating member, wherein the valve poppet has a first end and a second end and the first end is positioned in the inlet port; and a fluid permeable member positioned between the second end of the valve poppet and the valve seating member, wherein: the fluid permeable member is isolated from flowing fluid when the valve poppet is sealingly engaged with the valve seating member thereby preventing fluid flow through the valve assembly, the fluid permeable member provides a diffusional path for transfer of all flowing fluid from the higher pressure fluid source when the valve poppet is not sealingly engaged with the valve seating member, the fluid permeable member can be inserted into the sealable and engageable surface of either the valve seat member or the second end of the valve poppet, and the higher pressure fluid source comprises at least one of (i) a fluid storage and dispensing vessel holding a storage medium for said fluid, and (ii) a fluid storage and dispensing vessel having a pressure actuated fluid flow control assembly interiorly disposed therein. 19. A fluid supply apparatus including a fluid source and a permeable fluid valve assembly for delivery of a fluid from the fluid source to a downstream processing tool, said permeable fluid valve assembly comprising; an inlet port for communication with an outlet of a fluid source for flowing fluid from the fluid source; and a valve device positioned downstream from the fluid source comprising a valve member and a valve seat member, wherein: the valve device is adapted for movement between a sealing position that blocks fluid flow through the inlet port and an open position that permits fluid flow through the inlet port and valve device, the valve member has a first end and a second end, wherein the first end is positioned in the inlet port, the valve seat member has an abutting first end having a bore therethrough for acceptance of an extension attached to at least a section of the second end of the valve member, the extension at the second end of the valve member is fabricated of a fluid permeable material for transference of the fluid from the fluid source through the inlet port, the permeable extension of the valve member and the outflow bore of the valve seat member to the downstream processing tool when the valve device is in an open position, and the fluid source comprises at least one of (i) a fluid storage and dispensing vessel holding a storage medium for said fluid, and (ii) a fluid storage and dispensing vessel having a pressure actuated fluid flow control assembly interiorly disposed therein. 20. The fluid supply apparatus according to claim 19, wherein the fluid source comprises a fluid storage and dispensing vessel holding a storage medium for said fluid. 21. The fluid supply apparatus according to claim 19, wherein the fluid source comprises a fluid storage and dispensing vessel having a pressure actuated fluid flow control assembly interiorly disposed therein. 22. The fluid supply apparatus according to claim 19, wherein the valve member includes an elongated structure comprising a first end extension having a reduced cross-section relative to the inlet port to provide sufficient area for passing fluid through the inlet port around the valve member to pass through the permeable material of the valve seat member. 23. The fluid supply apparatus according to claim 22, wherein the valve seat member further comprises a bore through the member for receiving an extension element attached to the second end of the valve member, wherein the extension element sealingly fits within the bore to allow movement in the bore but substantially reduces fluid passage through the bore from the fluid source. 24. The fluid supply apparatus according to claim 23, further comprising a chamber surrounding a diaphragm that defines an interior volume isolated from pressure conditions upstream of the valve element and engaged with the extension element of the valve member to control the movement of the valve member in a manner that retains the valve member in the sealing position until a pressure differential between the interior volume of the diaphragm and the interior of the chamber moves the valve member to the open position. 25. The fluid supply apparatus according to claim 24, further comprising resilient means positioned near the first end of the valve member and holding the valve member in the sealing position. 26. The fluid supply apparatus according to claim 23, wherein the extension element has a reduced cross-section tip to provide sufficient space in the outlet bore for filling of the fluid source when the valve member is moved to the fully open position. 27. A fluid supply apparatus including a higher pressure fluid source and a permeable valve assembly for controlling gas delivery from the higher pressure fluid source to a lower pressure processing tool, said permeable valve assembly comprising a valve poppet movingly engageable with a valve seating member, and a fluid permeable member positioned between the valve poppet and the valve seating member, wherein: the fluid permeable member is isolated from flowing fluid when the valve poppet is sealingly engaged with the valve seating member thereby preventing fluid flow through the valve assembly, the fluid permeable member provides a diffusional path for transfer of all flowing fluid from the higher pressure fluid source when the valve poppet is not sealingly engaged with the valve seating member, the fluid permeable member comprises a vapor/gas-permeable and liquid-impermeable material and can be inserted into the sealable and engageable surface of either the valve seat member or the valve poppet, and the higher pressure fluid source comprises a fluid storage and dispensing vessel. 28. A fluid supply apparatus, comprising: a fluid source including a fluid storage and dispensing vessel; and a flow control valve adapted to control flow of fluid dispensed from said vessel(s), said flow control valve including (i) a valve poppet movingly engageable with a valve seating member, and (ii) fluid permeable material that is unexposed to flowing fluid when the valve poppet is in a closed position thereby preventing fluid flow through the valve assembly and providing a diffusional path for transfer of flowing fluid when the valve poppet is in an open position; wherein the fluid permeable material contacts both the valve poppet and the valve seating member when the valve poppet is in said closed position. 29. The fluid supply apparatus according to claim 28, wherein the fluid storage and dispensing vessel has a pressure actuated fluid flow control assembly comprises the flow control valve. 30. A method of dispensing fluid, comprising providing a fluid supply apparatus including: a fluid source comprising a fluid storage and dispensing vessel; and a flow control valve adapted to control flow of fluid dispensed from said vessel(s), said flow control valve including (i) a valve poppet movingly engageable with a valve seating member, and (ii) fluid permeable material that is unexposed to flowing fluid when the valve poppet is in a closed position thereby preventing fluid flow through the valve assembly and providing a diffusional path for transfer of flowing fluid when the valve poppet is in an oven position; wherein the fluid permeable material contacts both the valve poppet and the valve seating member when the valve poppet is in said closed position. 31. A method of manufacturing a product in a production process utilizing a fluid, comprising dispensing said fluid from a fluid supply apparatus including: a fluid source comprising a fluid storage and dispensing vessel; and a flow control valve adapted to control flow of fluid dispensed from said vessel(s), said flow control valve including (i) a valve poppet movingly engageable with a valve seating member, and (ii) fluid permeable material that is unexposed to flowing fluid when the valve poppet is in a closed position thereby preventing fluid flow through the valve assembly and providing a diffusional path for transfer of flowing fluid when the valve poppet is in an open position; wherein the fluid permeable material contacts both the valve poppet and the valve seating member when the valve poppet is in said closed position. 32. The method of claim 31, wherein said product is a semiconductor device. 33. A method of producing a fluid source for use in dispensing fluid, said method comprising providing a fluid supply apparatus including: a fluid source comprising a fluid storage and dispensing vessel; and a flow control valve adapted to control flow of fluid dispensed from said vessel(s), said flow control valve including (i) a valve poppet movingly engageable with a valve seating member, and (ii) fluid permeable material that is unexposed to flowing fluid when the valve poppet is in a closed position thereby preventing fluid flow through the valve assembly and providing a diffusional path for transfer of flowing fluid when the valve poppet is in an open position; wherein the fluid permeable material contacts both the valve poppet and the valve seating member when the valve poppet is in said closed position. 34. The fluid supply apparatus of claim 28, wherein the fluid permeable material is constructed and arranged in a conformation, wherein said conformation is selected from among: a first conformation in which the fluid permeable material has a bore opening with which a portion of the valve poppet is movingly engageable; and a second conformation in which the valve seating member has a bore opening therein, and the fluid permeable material is coupled to the valve poppet and movingly engageable with the bore opening of the valve seating member. 35. The fluid supply apparatus of claim 28, wherein the fluid permeable material has a bore opening with which a portion of the valve poppet is movingly engageable. 36. The fluid supply apparatus of claim 28, wherein the fluid permeable material is coupled to the valve poppet and movingly engageable with the bore opening of the valve seating member. 37. The fluid supply apparatus of claim 27, wherein the fluid storage and dispensing vessel (1) holds a storage medium for said fluid, and/or (2) has a pressure actuated fluid flow control assembly interiorly disposed therein. 38. The fluid supply apparatus of claim 28, wherein the fluid storage and dispensing vessel (1) holds a storage medium for said fluid, and/or (2) has a pressure actuated fluid flow control assembly interiorly disposed therein. 39. The method of claim 31, wherein the fluid storage and dispensing vessel (1) holds a storage medium for said fluid, and/or (2) has a pressure actuated fluid flow control assembly interiorly disposed therein. 40. The method of claim 30, wherein the fluid storage and dispensing vessel (1) holds a storage medium for said fluid, and/or (2) has a pressure actuated fluid flow control assembly interiorly disposed therein; further comprising actuating the valve to said open position to effect dispensing from said fluid source. 41. The method of claim 33, wherein the fluid storage and dispensing vessel (1) holds a storage medium for said fluid, and/or (2) has a pressure actuated fluid flow control assembly interiorly disposed therein; further comprising filling said fluid storage and dispensing vessel with fluid. 42. A fluid supply apparatus according to claim 28, wherein the fluid storage and dispensing vessel comprises a vessel adapted to hold a source material from which fluid is generated.
연구과제 타임라인
LOADING...
LOADING...
LOADING...
LOADING...
LOADING...
이 특허에 인용된 특허 (10)
Hughes Allan B. (Wilmington DE) Dear Terrence A. (Elkton MD), Control valve.
Tom Glenn M. (New Milford CT) McManus James V. (Danbury CT), Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.