IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0428267
(2006-06-30)
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등록번호 |
US-7370848
(2008-05-13)
|
발명자
/ 주소 |
- Stamp,Michael R.
- AmRhein,Frederick J.
- Dale,Arnold J.
- Pottebaum,Joseph C.
- Ebert,Brian J.
|
출원인 / 주소 |
|
대리인 / 주소 |
Knobbe, Martens, Olson & Bear, LLP.
|
인용정보 |
피인용 횟수 :
3 인용 특허 :
22 |
초록
▼
A vaporization chamber for a substrate processing system includes a main body, a cover member and a transition member. The main body is made of aluminum and defines a first inner surface, which defines, at least in part, a cavity. The cover member is also made of aluminum. The cover member defines a
A vaporization chamber for a substrate processing system includes a main body, a cover member and a transition member. The main body is made of aluminum and defines a first inner surface, which defines, at least in part, a cavity. The cover member is also made of aluminum. The cover member defines a second inner surface, which also defines, at least in part, the cavity. The cover member includes a carrier gas cover inlet, a liquid source cover inlet, a source cover outlet which extends from a first outer surface through the cover member to the second inner surface. The transition member is made of stainless steel and has a transition outer surface and a transition inner surface. The transition inner surface is aluminum cladded. The cover member including a carrier gas cover inlet, a liquid source cover inlet, a source cover outlet which extend from a first outer surface through the cover member to second inner surface. The transition inner surface and the cover outer surface are welded together.
대표청구항
▼
We claim: 1. A vaporization chamber for a substrate processing system that comprises: a main body made of aluminum; the main body defining a first inner surface, which defines, at least in part, a cavity; a cover member that is also made of aluminum, the cover member defining a second inner surface
We claim: 1. A vaporization chamber for a substrate processing system that comprises: a main body made of aluminum; the main body defining a first inner surface, which defines, at least in part, a cavity; a cover member that is also made of aluminum, the cover member defining a second inner surface, which also defines, at least in part, the cavity; the cover member comprising a carrier gas cover inlet, a liquid source cover inlet, a source cover outlet which extend from a first outer surface through the cover member to the second inner surface; and a transition member that is made of stainless steel and has a transition outer surface and a transition inner surface; the transition inner surface being aluminum cladded; the cover member comprising a carrier gas cover inlet, a liquid source cover inlet, a source cover outlet which extend from a first outer surface through the cover member to second inner surface; the transition inner surface and the cover outer surface being welded together. 2. A vaporization chamber as in claim 1, further comprising a liquid level sensing device that extends through an opening in the transition member and the cover member into the cavity. 3. A vaporization chamber as in claim 2, wherein the liquid level sensing device is configured to sense the capacitance difference between a liquid source material and a vaporized source material. 4. A vaporization chamber as in claim 1, wherein the liquid and vaporized source material is trisilane. 5. A vaporization chamber as in claim 1, further comprising a cooling/heating jacket. 6. A vaporization chamber as in claim 1, further comprising a first tubular member that extends from the carrier gas cover inlet to a lower portion of the cavity and a second tubular member that extends from the a liquid source cover inlet to the lower portion of the cavity. 7. A vaporization chamber as in claim 1, including at least one connector that is welded to at least one of the carrier gas cover inlet, a liquid source cover inlet, and the source cover outlet. 8. A vaporization chamber as in claim 1, wherein the transition inner surface comprises aluminum that is mechanically cladded to stainless steel. 9. A vaporization chamber as in claim 1, wherein the vaporization chamber is a bubbler. 10. A vaporization chamber for vaporizing liquid trisilane: a main body made of a non-ferric material the main body defining a first inner surface, which defines, at least in part, a cavity; a quantity of liquid trisilane contained within the cavity; a cover member that is also made of a non-ferric material, the cover member defining a second inner surface, which also defines, at least in part, the cavity; the cover member comprising a carrier gas cover inlet, a liquid source cover inlet, a source cover outlet which extend from a first outer surface through the cover member to the second inner surface; and a transition member that is made of a ferric material and has a transition outer surface and a transition inner surface; the transition inner surface being cladded with a non-ferric material; the cover member comprising a carrier gas cover inlet, a liquid source cover inlet, a source cover outlet which extend from a first outer surface through the cover member to second inner surface; the transition inner surface and the cover outer surface being welded together. 11. A vaporization chamber as in claim 10, wherein the main body is made of aluminum. 12. A vaporization chamber as in claim 10, wherein the cover member is made of aluminum. 13. A vaporization chamber as in claim 10, wherein the transition member is made of stainless steel. 14. A vaporization chamber as in claim 10, wherein the transition inner surface is cladded with aluminum.
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