초록 ▼

A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, that has an increased system throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history (or wafer history), and a reduced footprint.

A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, that has an increased system throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history (or wafer history), and a reduced footprint. The various embodiments of the cluster tool may utilize two or more robots that are configured in a parallel processing configuration to transfer substrates between the various processing chambers retained in the processing racks so that a desired processing sequence can be performed on the substrates. In one aspect, the parallel processing configuration contains two or more robot assemblies that are adapted to move in a vertical and horizontal directions, to access the various processing chambers retained in generally adjacently positioned processing racks. Generally, the various embodiments described herein are advantageous since each row or group of substrate processing chambers are serviced by two or more robots to allow for increased throughput and increased system reliability. Also, the various embodiments described herein are generally configured to minimize and control the particles generated by the substrate transferring mechanisms, to prevent device yield and substrate scrap problems that can affect the cost of ownership of the cluster tool. The flexible and modular architecture allows the user to configure the number of processing chambers, processing racks, and processing robots required to meet the throughput needs of the user.

대표청구항 ▼

The invention claimed is: 1. An apparatus for transferring a substrate, comprising: a base having a supporting surface; a reaction member positioned on the base; an actuator coupled to the base; a contact member that is coupled to the actuator, wherein the actuator is adapted to urge the contact me

The invention claimed is: 1. An apparatus for transferring a substrate, comprising: a base having a supporting surface; a reaction member positioned on the base; an actuator coupled to the base; a contact member that is coupled to the actuator, wherein the actuator is adapted to urge the contact member against an edge of a substrate that is also supported at an edge by the reaction member; a brake member assembly comprising: a brake member; and an brake actuating member, wherein the brake actuating member is adapted to urge the brake member against the contact member to create a restraining force that generally inhibits the movement of the contact member during a substrate transferring process. 2. The apparatus of claim 1, wherein the restraining force is created by the contact between the brake member and the contact member. 3. The apparatus of claim 1, wherein the restraining force is a friction force created between a surface of the contact member and the brake member. 4. The apparatus of claim 1, further comprising a sensor coupled to the contact member and adapted to sense the position of the contact member. 5. The apparatus of claim 4, further comprising a controller in communication with the actuator and the sensor to sense misplacement of a substrate on the supporting surface. 6. An apparatus for transferring a substrate, comprising: a base having a supporting surface; a reaction member positioned on the base; a contact member assembly comprising: an actuator; and a contact member having a substrate contact surface and a compliant member which is positioned between the contact surface and the actuator, wherein the actuator is adapted to urge the contact surface against a substrate that is positioned against a surface of the reaction member; and a brake member assembly comprising: a brake member; and a brake actuating member adapted to urge the brake member against the contact member to inhibit movement of the contact member during a substrate transferring process; and a sensor coupled to the contact member, wherein the sensor is adapted to sense the position of the contact surface. 7. The apparatus of claim 6, wherein the compliant member is a spring. 8. The apparatus of claim 6, wherein the brake member assembly further comprises a lever arm having a first end coupled to the brake actuating member and a second end coupled to the brake member, wherein the lever arm is coupled to a pivot point and is adapted to generate a braking force that inhibits the movement of the contact member and that is greater than the force generated by the brake actuating member. 9. An apparatus for transferring a substrate, comprising: a robot assembly comprising: a first robot that is adapted to transfer a substrate positioned on a robot blade in a first direction; a first motion assembly having an actuator that is adapted to position the first robot in a second direction; and a second motion assembly that is coupled to the first motion assembly and has a second actuator that is adapted to position the first robot and the first motion assembly in a third direction which is generally perpendicular to the second direction; and a substrate gripping device coupled to the robot blade, wherein the substrate gripping device is adapted to support a substrate and comprises: a reaction member positioned on the robot blade; an actuator coupled to the robot blade; a contact member that is coupled to the actuator, wherein the actuator is adapted to restrain a substrate by urging the contact member against an edge of a substrate positioned between the contact member and the reaction member; and a brake member assembly comprising: a brake member; and a brake actuating member adapted to urge the brake member against the contact member to inhibit movement of the contact member during a substrate transferring process. 10. The apparatus of claim 9, wherein the substrate gripping device further comprises a sensor coupled to the contact member and adapted to sense the position of the contact member. 11. The apparatus of claim 9, wherein the substrate gripping device further comprises a controller in communication with the actuator and a sensor to sense the misplacement of a substrate on the supporting surface. 12. The apparatus of claim 9, wherein the substrate gripping device further comprises a compliant member which is positioned between the contact member and the actuator and is adapted to store energy when the contact member is urged against a surface of a substrate by the actuator.