초록 ▼

A system for dispensing and filtering fluid is disclosed, in which the fluid flow path is substantially vertical from the fluid inlet through fluid dispense. Substantially all wetted surfaces are Teflon�� or some similar non-contaminating fluid, for applications such as cleanroom processes. A valve

A system for dispensing and filtering fluid is disclosed, in which the fluid flow path is substantially vertical from the fluid inlet through fluid dispense. Substantially all wetted surfaces are Teflon�� or some similar non-contaminating fluid, for applications such as cleanroom processes. A valve and a filter chamber are incorporated into a pump head to simplify the flow path and reduce potential contamination points. Preferred methods, and chips or other microelectronic devices fabricated from the apparatus or methods, are also disclosed.

대표청구항 ▼

I claim: 1. A method for depositing fluids, comprising: depositing fluid substantially free of air bubbles from a pump, wherein depositing fluid substantially free of air bubbles comprises moving fluid through a substantially vertically aligned fluid path provided by a multistage pump having a upwa

I claim: 1. A method for depositing fluids, comprising: depositing fluid substantially free of air bubbles from a pump, wherein depositing fluid substantially free of air bubbles comprises moving fluid through a substantially vertically aligned fluid path provided by a multistage pump having a upwardly oriented first pumping means and a upwardly oriented second pumping means in fluid communication provided via the fluid path with the first pumping means, wherein the first pumping means is operable to pump the fluid through the fluid path to the second pumping means and the second pumping means is operable to collect or dispense the fluid through an outlet coupled to the second pumping means via the fluid path, wherein the second pumping means is operable to collect or dispense the fluid at a rate of operation independent from a rate of operation of the first pumping means and the fluid path is substantially consistently upward throughout the multistage pump as the fluid flows through the first pumping means and the second pumping means. 2. The method of claim 1, wherein the first pumping means is operable to pump the fluid through a filtering means disposed in the fluid path between the first pumping means and the second pumping means and the second pumping means is operable to prevent backflow of filtered fluid. 3. The method of claim 1, wherein the first pumping means is a diaphragm-type pump operable by incremental pump advancement means, and said step of pumping said fluid with said first pumping means includes the step of operating said incremental pump advancement means. 4. The method of claim 3, wherein the second pumping means has a second pumping head, the second head including a tee flow path coupling the first pumping means to the second pumping means. 5. The method of claim 4, wherein the tee flow path is substantially consistently upward. 6. The method of claim 4, wherein the second pumping means is positioned above the first pumping means. 7. The method of claim 1, wherein the first pumping means has a first pumping head, the first head including a first integrally formed valve. 8. The method of claim 7, wherein the integrally formed valve is operable to direct a fluid in a substantially upward path toward a filter chamber. 9. The method of claim 8, wherein the filter chamber is integrally formed in the pumping head. 10. The method of claim 9, wherein the valve is formed at least in part of non-contaminating material. 11. The method of claim 10, wherein the valve is constructed of Teflon. 12. An apparatus for depositing fluid, comprising a first pumping means; a second pumping means in fluid communication with the first pumping means via a substantially vertically aligned fluid path; and an outlet coupled to the second pumping means via the fluid path, wherein the first pumping means is operable to pump fluid through the fluid path to a second pumping means and the second pumping means is operable to collect or dispense the fluid through the outlet and the second pumping means is operable to collect or dispense the fluid at a rate of operation independent from a rate of operation of the first pumping means and the fluid path is substantially consistently upward throughout the apparatus as the fluid flows through the first pumping means and the second pumping means and the deposited fluid is substantially free of air bubbles. 13. The apparatus of claim 12, wherein the first pumping means is operable to pump the fluid through a filtering means disposed in the fluid path between the first pumping means and the second pumping means and the second pumping means is operable to prevent backflow of filtered fluid. 14. The apparatus of claim 12, wherein the first pumping means is a diaphragm-type pump operable by incremental pump advancement means, and said step of pumping said fluid with said first pumping means includes the step of operating said incremental pump advancement means. 15. The apparatus of claim 12, wherein the first pumping means has a first pumping head, the first head including a first integrally formed valve. 16. The apparatus of claim 15, wherein the valve is formed at least in part of non-contaminating material. 17. The apparatus of claim 16, wherein the valve is constructed of Teflon. 18. The apparatus of claim 15, wherein the second pumping means has a second pumping head, the second head including a tee flow path coupling the first pumping means to the second pumping means. 19. The apparatus of claim 18, wherein the tee flow path is substantially consistently upward. 20. The apparatus of claim 18, wherein the second pumping means is a diaphragm pump. 21. The apparatus of claim 15, wherein the integrally formed valve is operable to direct a fluid in a substantially upward path toward a filter chamber. 22. The apparatus of claim 21, wherein the filter chamber is integrally formed in the pumping head.