IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0924841
(2004-08-25)
|
등록번호 |
US-7384900
(2008-06-10)
|
우선권정보 |
KR-10-2003-0059628(2003-08-27); KR-10-2003-0064547(2003-09-17) |
발명자
/ 주소 |
- Jo,Gyoo Chul
- Chae,Gee Sung
- Kwon,Oh Nam
- Lee,Kyoung Mook
- Hwang,Yong Sup
- Kim,Seong Bae
- Jang,Suk Chang
- Yoon,Suk ll
|
출원인 / 주소 |
|
대리인 / 주소 |
McKenna Long & Aldridge LLP
|
인용정보 |
피인용 횟수 :
3 인용 특허 :
5 |
초록
▼
A composition for removing a copper-compatible resist includes about 10 to 30% by weight of an amine compound solvent, the amine compound solvent including an alkanol amine, about 10 to 80% by weight of a glycol group solvent, about 9.5 to 80% by weight of a polar solvent, and about 0.5 to 10% by we
A composition for removing a copper-compatible resist includes about 10 to 30% by weight of an amine compound solvent, the amine compound solvent including an alkanol amine, about 10 to 80% by weight of a glycol group solvent, about 9.5 to 80% by weight of a polar solvent, and about 0.5 to 10% by weight of a corrosion inhibitor.
대표청구항
▼
What is claimed is: 1. A method for removing a copper-compatible resist, comprising combining about 10 to 30% by weight of an alkanol amine solvent, combining about 10 to 80% by weight of a glycol group solvent, combining about 9.5 to 80% by weight of a polar solvent, and combining about 0.5 to 10%
What is claimed is: 1. A method for removing a copper-compatible resist, comprising combining about 10 to 30% by weight of an alkanol amine solvent, combining about 10 to 80% by weight of a glycol group solvent, combining about 9.5 to 80% by weight of a polar solvent, and combining about 0.5 to 10% by weight of a corrosion inhibitor, wherein the the alkanol amine solvent is selected from at least one of an alkyl group consisting of N-methylethanolamine, N-ethylethanolamine, diethylethanolamine and dimethylethanolamine, and wherein the corrosion inhibitor is selected from an mercapto group consisting of mercaptobenzodiazole, mercaptoethanol, mercaptopropanediol, dimethylthiophenol, propylthiophenol, methoxythiophenol, methylthiophenol, thioanisole, tert-butylthiophenol, tert-buthyl-2-methylthiophenol, mercaptomethylimidazole, and mercaptomethylbenzimidazole. 2. The method according to claim 1, wherein the glycol group solvent has a boiling point higher than about 180�� C. 3. The method according to claim 1, wherein the glycol group solvent is selected from one of glycolic solvent and glycol ethers solvent. 4. The method according to claim 2, wherein the glycol group solvent is selected from at least one of the group consisting of ethyleneglycol-methylether, ethyleneglycol-ethylether, ethyleneglycol-buthylether, diethyleneglycol-methylether, diethyleneglycol-ethylether, diethyleneglycol-propylether, diethyleneglycol-butylether, ethyleneglycol, diethyleneglycol, tri-ethyleneglycol, and tetra-etyleneglycol. 5. The method according to claim 1, wherein the polar solvent is selected from at least one of the group consisting of N-methyl-2-pyrrolidone, N,N-dimethylacetamide, N,N-dimethylformamide, and N,N-dimethylimidazol.
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