Mold die for molding chip array, molding equipment including the same, and method for molding chip array
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
B29C-045/14
H01L-021/56
H01L-021/02
출원번호
US-0772242
(2004-02-06)
등록번호
US-7393489
(2008-07-01)
우선권정보
KR-10-2003-0008010(2003-02-08)
발명자
/ 주소
Cho,Chang Ho
출원인 / 주소
Samsung Electronics Co., Ltd.
대리인 / 주소
Harness, Dickey & Pierce, P.L.C.
인용정보
피인용 횟수 :
2인용 특허 :
14
초록▼
Provided are a mold die for molding a chip array, molding equipment including such a mold die and a molding method utilizing such molding equipment. The mold die provides for the selective injection of mold resin through a corner gate controlled by a gate block whereby the flow of the mold resin is
Provided are a mold die for molding a chip array, molding equipment including such a mold die and a molding method utilizing such molding equipment. The mold die provides for the selective injection of mold resin through a corner gate controlled by a gate block whereby the flow of the mold resin is neither perpendicular nor parallel to the side surfaces of the semiconductor chips arranged in the chip array. In this manner failures associated with the sweeping effects of the mold resin flowing past the bonding wires on the semiconductor chips may be reduced.
대표청구항▼
What is claimed is: 1. A mold die for molding a semiconductor device package, comprising: a cavity block, the cavity block comprising a concave surface defining a cavity in which a semiconductor chip may be positioned, the semiconductor chip being generally rectangular and comprising a top surface,
What is claimed is: 1. A mold die for molding a semiconductor device package, comprising: a cavity block, the cavity block comprising a concave surface defining a cavity in which a semiconductor chip may be positioned, the semiconductor chip being generally rectangular and comprising a top surface, bottom surface, and four side surfaces; a gate, the gate defining a mold resin entry into the cavity and having a gate width; and a gate block arranged and configured for movement relative to the cavity block to provide selective opening and closing of the gate; wherein the gate is arranged relative to the semiconductor chip whereby mold resin entering the cavity through the gate will contact two closest side surfaces of the semiconductor chip, flowing substantially parallel to the top and bottom surfaces, at an angle of less than about 70��. 2. A mold die for molding a semiconductor device package according to claim 1, wherein: the cavity defined in the cavity block is substantially rectangular and comprises side walls; and the semiconductor chip is oriented with the side surfaces generally parallel to closest side walls of the cavity. 3. A mold die for molding a semiconductor device package according to claim 1, wherein: the cavity defined in the cavity block comprises four side wall segments and three corners defining a first portion of a cavity perimeter; the semiconductor chip is oriented with the side surfaces generally parallel to the closest side wall segments; and the gate block, when closed, forms a second portion of the cavity perimeter. 4. The mold die for molding a semiconductor device package according to claim 1, wherein: a cavity perimeter is substantially rectangular when the gate is closed by the gate block. 5. The mold die for molding a semiconductor device package according to claim 3, wherein: the gate block comprises an internal surface that provides the second portion of the cavity perimeter, the internal surface being positioned between a first side wall segment and a second side wall segment defined by the cavity block, and the internal surface comprises an inclined portion that is not parallel to the first or second side wall segments. 6. The mold die for molding a semiconductor device package according to claim 5, wherein the internal surface further comprises: a first portion that is substantially parallel to the first side wall segment and a second portion that is substantially parallel to the second side wall segment. 7. The mold die for molding a semiconductor device package according to claim 5, wherein: the internal surface is substantially identical to the inclined portion of the internal surface, and the gate width is substantially identical to a length of the inclined portion. 8. The mold die for molding a semiconductor device package according to claim 5, wherein: a third side wall segment is positioned opposite and generally parallel to the first side wall segment, the third side wall segment being longer than the first side wall segment; a fourth side wall segment is positioned opposite and generally parallel to the second side wall segment, the fourth side wall segment being longer than the second side wall segment; and the gate width is at least equal to one-half of a first length and is less than a second length, wherein the first length is equal to the shorter of the third and fourth side wall segments and the second length is equal to the longer of the third and fourth side wall segments. 9. The mold die for molding a semiconductor device package according to claim 8, wherein: the internal surface is symmetric about an axis extending from a corner of the cavity opposite the gate and extending through a center of the cavity. 10. A mold die for molding a chip array package, comprising: a plurality of semiconductor chips; a cavity block, the cavity block comprising a concave surface defining a cavity in which the plurality of semiconductor chips may be positioned, the plurality of semiconductor chips being generally rectangular and comprising a top surface, bottom surface, and four side surfaces; a gate, the gate defining a mold resin entry into the cavity and having a gate width; and a gate block arranged and configured for movement relative to the cavity block to provide selective opening and closing of the gate; wherein the gate is arranged relative to the plurality of semiconductor chips whereby mold resin entering the cavity through the gate will contact two closest side surfaces of the plurality of semiconductor chips, flowing substantially parallel to the top and bottom surfaces, at an angle of less than about 70��. 11. A mold die for molding a chip array package according to claim 10, wherein: at least two of the plurality of semiconductor chips are arranged in a stacked orientation with bonding wires providing electrical connection between an upper semiconductor chip and a lower semiconductor chip. 12. A molding apparatus for molding a chip array, comprising: a mold die according to claim 1, wherein the cavity is arranged and configured to receive a plurality of aligned semiconductor chips comprising side surfaces, and wherein the gate is arranged and configured so that mold resin entering the cavity through the gate will approach the side surfaces; a pot for maintaining mold resin; and a channel block defining a fluid path between the pot and the gate block. 13. A molding apparatus for molding a plurality of chip arrays, comprising: a plurality of mold dies according to claim 1; a pot for maintaining mold resin; and a channel block defining a plurality of fluid paths between the pot and the plurality of mold dies. 14. A method for molding a semiconductor device package using a mold die according to claim 1, comprising: arranging a semiconductor chip within the cavity, the semiconductor chip comprising side surfaces; moving the gate block to open the gate; injecting a flow of mold resin into the cavity through the gate to fill the cavity; moving the gate block to close the gate; solidifying the mold resin within the cavity to form the semiconductor device package; and removing the semiconductor device package from the cavity; wherein the gate is configured and positioned such that the flow of mold resin approaches two closest side surfaces of the semiconductor chip at an angle of less than 90��. 15. A method for molding a semiconductor device package using a mold die according to claim 1, comprising: arranging a semiconductor chip within the cavity, the semiconductor chip comprising side surfaces and a plurality of bonding wires arranged adjacent to the side surfaces for providing electrical connection between the semiconductor chip and a substrate; moving the gate block to open the gate; injecting a flow of mold resin into the cavity through the gate to fill the cavity; moving the gate block to close the gate; solidifying the mold resin within the cavity to form the semiconductor device package; and removing the semiconductor device package from the cavity, wherein the gate is configured and positioned such that the mold resin flows past all bonding wires adjacent to a single side surface of the semiconductor chip in a generally uniform direction. 16. A method for molding a semiconductor device package using a mold die according to claim 15, comprising: arranging a semiconductor chip within the cavity, the semiconductor chip comprising side surfaces and a plurality of bonding wires arranged adjacent to the side surfaces for providing electrical connection between the semiconductor chip and a substrate, wherein the bonding wires are arranged so as to provide a region of low bonding wire density adjacent to a first corner of the semiconductor chip; wherein the gate is configured and positioned such that the mold resin separates into two flows as the mold resin reaches a second corner of the semiconductor chip, the second corner being located diagonally across the semiconductor chip from the first corner, the two mold resin flows recombining near the region of low bonding wire density. 17. A mold die for molding a semiconductor device package, comprising: a cavity block, the cavity block comprising a concave surface defining a cavity in which a semiconductor chip may be positioned, the semiconductor chip being generally rectangular and comprising a top surface, bottom surface, and four side surfaces; a gate, the gate defining a mold resin entry into the cavity and having a gate width; and a gate block arranged and configured for movement relative to the cavity block to provide selective opening and closing of the gate; wherein the gate is arranged relative to the semiconductor chip whereby mold resin entering the cavity through the gate will contact two closest side surfaces of the semiconductor chip at an angle of less than about 70��, measured in a plane substantially parallel to the top and bottom surfaces. 18. A mold die for molding a chip array package, comprising: a plurality of semiconductor chips; a cavity block, the cavity block comprising a concave surface defining a cavity in which the plurality of semiconductor chips may be positioned, the plurality of semiconductor chips being generally rectangular and comprising a top surface, bottom surface, and four side surfaces; a gate, the gate defining a mold resin entry into the cavity and having a gate width; and a gate block arranged and configured for movement relative to the cavity block to provide selective opening and closing of the gate; wherein the gate is arranged relative to the plurality of semiconductor chips whereby mold resin entering the cavity through the gate will contact two closest side surfaces of the plurality of semiconductor chips at an angle of less than about 70��, measured in a plane substantially parallel to the top and bottom surfaces.
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