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Device and method for organic vapor jet deposition 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C23C-014/012
출원번호 US-0422269 (2003-04-23)
등록번호 US-7404862 (2008-07-29)
발명자 / 주소
  • Shtein,Max
  • Forrest,Stephen R.
  • Benzinger,Jay B.
출원인 / 주소
  • The Trustees of Princeton University
대리인 / 주소
    Kenyon & Kenyon LLP
인용정보 피인용 횟수 : 30  인용 특허 : 18

초록

A device and a method for facilitating the deposition and patterning of organic materials onto substrates utilizing the vapor transport mechanisms of organic vapor phase deposition is provided. The device includes one or more nozzles, and an apparatus integrally connected to the one or more nozzles,

대표청구항

What is claimed is: 1. A device, comprising: one or more nozzles; and an apparatus integrally connected to the one or more nozzles, the apparatus comprising: a plurality of source cells, each source cell containing an organic material; a carrier gas inlet leading to each source cell; a carrier gas

이 특허에 인용된 특허 (18)

  1. Jolly Stuart Talbot (Yardley PA), Accurate control during vapor phase epitaxy.
  2. Powell Ricky C. ; Dorer Gary L. ; Reiter Nicholas A. ; McMaster Harold A. ; Cox Steven M. ; Kahle Terence D., Apparatus and method for depositing a semiconductor material.
  3. Bergamini Lorenzo,ITX, Gas mass flow metering valve.
  4. Nguyen, Tue; Bercaw, Craig Alan, Integrated precursor delivery system.
  5. Halpern Bret (Bethany CT), Jet vapor deposition of organic molecule guest-inorganic host thin films.
  6. Hasegawa Toshiaki (Kanagawa JPX), Low pressure CVD apparatus comprising gas distribution collimator.
  7. Stephen R. Forrest ; Paul E. Burrows ; Vladimir S. Ban, Low pressure vapor phase deposition of organic thin films.
  8. Kenji Matsumoto JP; Hiroshi Shinriki JP, Metal organic chemical vapor deposition method and apparatus.
  9. Schmitt Jerome J. (265 College St. (12N) New Haven CT 06510), Method and apparatus for the deposition of solid films of a material from a jet stream entraining the gaseous phase of s.
  10. Forrest Stephen R. (Princeton NJ) Ban Vladimir S. (Princeton NJ) Burrows Paul E. (Princeton NJ) Schwartz Jeffrey (Princeton NJ), Method and apparatus using organic vapor phase deposition for the growth of organic thin films with large optical non-li.
  11. J?rgensen, Holger; Strauch, Gerhard Karl; Schwambera, Markus, Method and device for depositing in particular organic layers using organic vapor phase deposition.
  12. Schmitt ; III Jerome J. (New Haven CT) Halpern Bret L. (Bethany CT), Microwave plasma assisted supersonic gas jet deposition of thin film materials.
  13. Forrest Stephen Ross ; Thompson Mark Edward ; Burrows Paul Edward ; Sapochak Linda Susan ; McCarty Dennis Matthew, Multicolor organic light emitting devices.
  14. Burrows Paul ; Forrest Stephen R. ; Thompson Mark E., Red-emitting organic light emitting devices (OLED's).
  15. Swanson, Leland S., Selective deposition of emissive layer in electroluminescent displays.
  16. Shtein, Max; Forrest, Stephen R., Self-aligned hybrid deposition.
  17. Fujikawa Yuichiro (Yamanashi-ken JPX) Hatano Tatsuo (Yamanashi-ken JPX) Murakami Seishi (Yamanashi-ken JPX), Shower head and film forming apparatus using the same.
  18. Sajoto Talex ; Selyutin Leonid ; Zhao Jun ; Dornfest Charles, Temperature controlled gas feedthrough.

이 특허를 인용한 특허 (30)

  1. Quinn, William E.; Harikrishna Mohan, Siddharth; McGraw, Gregory; Xu, Xin, Controlled deposition of materials using a differential pressure regime.
  2. McGraw, Gregory; Burrows, Paul E.; Harikrishna Mohan, Siddharth, Deposition of patterned organic thin films.
  3. Burrows, Paul E.; Weaver, Michael Stuart; Adamovich, Vadim, Device structure.
  4. Mauck, Justin; Ko, Alexander Sou-Kang; Vronsky, Eliyahu; Alderson, Shandon, Gas enclosure assembly and system.
  5. Mauck, Justin; Ko, Alexander Sou-Kang; Vronsky, Eliyahu; Alderson, Shandon, Gas enclosure assembly and system.
  6. Mauck, Justin; Ko, Alexander Sou-Kang; Vronsky, Eliyahu; Alderson, Shandon, Gas enclosure systems and methods utilizing an auxiliary enclosure.
  7. Golda, Dariusz; Kim, Hyeun-Su; Gassend, Valerie, Low-profile MEMS thermal printhead die having backside electrical connections.
  8. Golda, Dariusz; Kim, Hyeun-Su; Gassend, Valerie, Low-profile MEMS thermal printhead die having backside electrical connections.
  9. Bulovic, Vladimir; Chen, Jianglong; Madigan, Conor F.; Schmidt, Martin A., Method and apparatus for controlling film deposition.
  10. Bulovic, Vladimir; Baldo, Marc A.; Schmidt, Martin A.; Gassend, Valerie; Chen, Jianglong, Method and apparatus for depositing LED organic film.
  11. Bulovic, Vladimir; Baldo, Marc A.; Schmidt, Martin A.; Gassend, Valerie; Chen, Jianglong, Method and apparatus for depositing LED organic film.
  12. Bulovic, Vladimir; Baldo, Marc A.; Schmidt, Martin A.; Gassend, Valerie; Chen, Jianglong, Method and apparatus for depositing LED organic film.
  13. Bulovic, Vladimir; Baldo, Marc A.; Schmidt, Martin A.; LeBlanc, Valerie; Chen, Jianglong, Method and apparatus for depositing LED organic film.
  14. Dinh, Thuc; Ma, Yamin; Liu, Benjamin Y. H., Method and apparatus for generating vapor at high rates.
  15. Somekh, Sass; Vronsky, Eliyahu, Method and apparatus for load-locked printing.
  16. Somekh, Sass; Vronsky, Eliyahu, Method and apparatus for load-locked printing.
  17. Somekh, Sass; Vronsky, Eliyahu, Method and apparatus for load-locked printing.
  18. Somekh, Sass; Vronsky, Eliyahu, Method and apparatus for load-locked printing.
  19. Somekh, Sass; Vronsky, Eliyahu, Method and apparatus for load-locked printing.
  20. Somekh, Sass; Vronsky, Eliyahu, Method and apparatus for load-locked printing.
  21. Somekh, Sass; Vronsky, Eliyahu; Madigan, Conor, Method and apparatus for load-locked printing.
  22. Somekh, Sass; Vronsky, Eliyahu; Madigan, Conor, Method and apparatus for load-locked printing.
  23. Madigan, Conor F.; Ko, Alexander Sou-Kang; Chen, Jianglong, Method and apparatus for organic vapor printing.
  24. Madigan, Conor Francis; Vronsky, Eliyahu; Ko, Alexander Sou-Kang; Lowrance, Robert B.; Buchner, Christopher, Method and apparatus for printing using a facetted drum.
  25. Burrows, Paul E.; Silvernail, Jeffrey; Brown, Julie J., Method and system for high-throughput deposition of patterned organic thin films.
  26. Quinn, William E.; McGraw, Gregory; Harikrishna Mohan, Siddharth; King, Matthew; Hartford, Jr., Elliot H., Micro-nozzle and micro-nozzle array for OVJP and method of manufacturing the same.
  27. Golda, Dariusz; Gassend, Valerie; Kim, Hyeun-Su, Modular printhead for OLED printing.
  28. Golda, Dariusz; Gassend, Valerie; Kim, Hyeun-Su, Modular printhead for OLED printing.
  29. Quinn, William E.; McGraw, Gregory; Harikrishna Mohan, Siddharth; King, Matthew; Hartford, Jr., Elliot H., Nozzle assembly and nozzle array for OVJP.
  30. Madigan, Conor F.; Vronsky, Eliyahu, Rapid ink-charging of a dry ink discharge nozzle.

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