초록 ▼

In certain example embodiments of this invention, there is provided an ion source including an anode and a cathode. In certain example embodiments, a multi-piece outer cathode is provided. The multi-piece outer cathode allows precision adjustments to be made, thereby permitting adjustment of the mag

In certain example embodiments of this invention, there is provided an ion source including an anode and a cathode. In certain example embodiments, a multi-piece outer cathode is provided. The multi-piece outer cathode allows precision adjustments to be made, thereby permitting adjustment of the magnetic gap between the inner and outer cathodes. This allows improved performance to be realized, and/or prolonged operating life of certain components. This may also permit multiple types of gap adjustment to be performed with different sized outer cathode end pieces. In certain example embodiments, cathode fabrication costs may also be reduced.

대표청구항 ▼

The invention claimed is: 1. An ion source comprising: a conductive cathode comprising an inner cathode and an outer cathode; an ion emitting gap formed at least partially between the inner cathode and the outer cathode; an anode located proximate the ion emitting gap; wherein the outer cathode com

The invention claimed is: 1. An ion source comprising: a conductive cathode comprising an inner cathode and an outer cathode; an ion emitting gap formed at least partially between the inner cathode and the outer cathode; an anode located proximate the ion emitting gap; wherein the outer cathode comprises first, second, third and fourth electrically connected conductive pieces which are at least partially coplanar, wherein each of the first, second, third and fourth conductive pieces of the outer cathode abuts, is substantially coplanar with at at least one major surface thereof, and directly contacts two of the other of said conductive pieces of the outer cathode; and wherein an abutting interface between the second and third conductive pieces is angled so as to define an angle θ of from about 110-170 degrees with a portion of the ion emitting gap at said abutting interface. 2. The ion source of claim 1, wherein the first and second conductive pieces of the outer cathode are end pieces each having an arc-shaped inner edge which at least partially defines the ion emitting gap. 3. The ion source of claim 2, wherein the end pieces do not physically contact each other. 4. The ion source of claim 3, wherein the third and fourth pieces of the outer cathode are side pieces, each of which is located at least partially between the end pieces. 5. The ion source of claim 4, where the side pieces of the outer cathode comprise respective inner edges which at least partially define the ion emitting gap and which are substantially parallel to each other. 6. The ion source of claim 4, wherein the end pieces, and the side pieces, are all at least partially provided in a common plane. 7. The ion source of claim 1, wherein an area between the anode and the cathode is provided with a ceramic insulator. 8. The ion source of claim 1, further comprising at least one magnet at least partially located adjacent the inner cathode portion and located in an aperture defined in the anode as viewed from above and/or below. 9. The ion source of claim 1, wherein the ion source is a cold cathode closed drift ion source. 10. The ion source of claim 1, wherein the inner cathode and the outer cathode are of the same conductive material. 11. An ion source comprising: first and second electrodes, wherein the first electrode comprises an inner electrode and an outer electrode that are spaced apart from one another; an ion emitting gap formed at least partially between the inner electrode and the outer electrode; the second electrode being located proximate the ion emitting gap; and wherein the outer electrode comprises first, second, third and fourth electrically connected conductive pieces, wherein each of the first, second, third and fourth conductive pieces of the outer electrode is adjustable and can be adjusted toward and/or away from the ion emitting gap so that four-way adjustability can be realized, and wherein an interface between the second and third conductive pieces is angled relative to an immediately adjacent edge of the ion emitting gap, and an interface between the first and fourth conductive pieces is angled relative to an immediately adjacent edge of the ion emitting gap. 12. The ion source of claim 11, wherein the first and second conductive pieces of the outer electrode are end pieces, wherein each of the end pieces has an arc-shaped inner edge which at least partially defines the ion emitting gap. 13. The ion source of claim 12, wherein the end pieces do not physically contact each other. 14. The ion source of claim 13, wherein the third and fourth pieces of the outer electrode are side pieces, each of which is located at least partially between the end pieces. 15. The ion source of claim 11, wherein the first electrode is a cathode, and the second electrode is an anode of the ion source. 16. The ion source of claim 14, where the side pieces of the outer electrode comprise respective inner edges which at least partially define the ion emitting gap and which are substantially parallel to each other. 17. The ion source of claim 11, wherein the ion source is a cold cathode closed drift ion source. 18. The ion source of claim 1, wherein said abutting interface between the second and third conductive pieces is angled so as to define an angle θ of from about 120-160 degrees with the portion of the ion emitting gap at said abutting interface. 19. The ion source of claim 1, wherein said abutting interface between the second and third conductive pieces is angled so as to define an angle θ of from about 120-160 degrees with an adjacent side portion of the third conductive piece, the adjacent side portion of the third conductive piece being parallel to a side of the third conductive piece defining an edge of the ion emitting gap at said abutting interface.