Glass-based semiconductor on insulator structures and methods of making same
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
H01L-021/46
H01L-021/02
출원번호
US-0159889
(2005-06-23)
등록번호
US-7410883
(2008-08-12)
발명자
/ 주소
Gadkaree,Kishor Purushottam
출원인 / 주소
Corning Incorporated
대리인 / 주소
Schaeberle,Timothy M.
인용정보
피인용 횟수 :
6인용 특허 :
12
초록
Methods and apparatus provide for: a semiconductor wafer; at least one porous layer in the semiconductor wafer; an epitaxial semiconductor layer directly or indirectly on the porous layer; and a glass substrate bonded to the epitaxial semiconductor layer via electrolysis.
대표청구항▼
The invention claimed is: 1. A method of forming a semiconductor on glass structure, comprising: creating first and second porous layers in a semiconductor wafer, the second layer being below the first layer and including at least mostly larger pores than the first layer; forming an epitaxial semic
The invention claimed is: 1. A method of forming a semiconductor on glass structure, comprising: creating first and second porous layers in a semiconductor wafer, the second layer being below the first layer and including at least mostly larger pores than the first layer; forming an epitaxial semiconductor layer directly or indirectly on the first porous layer; bonding a glass substrate to the epitaxial semiconductor layer using electrolysis; and applying stress to at least one of the first and second porous layers such that the bonded glass substrate and epitaxial semiconductor layer separates from the semiconductor wafer. 2. The method of claim 1, wherein the step of creating the first and second porous layers includes: immersing the semiconductor wafer into a solution and inducing a current to flow between the semiconductor wafer and another electrode such that the first porous layer is formed via electrochemical etching; and increasing an amplitude of the current such that the second porous layer is formed below the first layer. 3. The method of claim 2, wherein the solution includes an HF and an electrolyte solution and the semiconductor wafer is used an anode electrode. 4. The method of claim 3, wherein the other electrode is taken from the group consisting of a semiconductor electrode, a silicon electrode, a platinum electrode, and a noble metal electrode. 5. The method of claim 2, wherein the magnitude of the current is in the range of between about 1 ma to about 10 ma per square centimeter to produce the first porous layer. 6. The method of claim 2, wherein a resistivity of the semiconductor wafer is between about 0.001 to about 100 ohm��cm. 7. The method of claim 2, wherein the current to form the first porous layer is applied for a period of less than about two hours. 8. The method of claim 2, wherein the pores of the first porous layer are of a nm scale. 9. The method of claim 2, wherein a maximum increase in the magnitude of the current is from about 2 to about 4 to produce the second porous layer. 10. The method of claim 1, further comprising oxidizing the pores of the first porous layer prior to forming the epitaxial semiconductor layer. 11. The method of claim 10, wherein the oxidizing step is a dry oxidation at a temperature of about 350 to about 500 degrees C. 12. The method of claim 1, further comprising annealing the semiconductor wafer in an atmosphere conducive to reducing surface roughness. 13. The method of claim 12, wherein at least one of: the atmosphere is at least a hydrogen atmosphere; and a temperature of the annealing step is between about 900 to about 1250 degrees C. 14. The method of claim 12, further comprising introducing a silicon gas into the atmosphere during annealing. 15. The method of claim 14, wherein the atmosphere contains at least SiH4. 16. The method of claim 1, wherein the epitaxial semiconductor layer is formed via one or more of: chemical vapor deposition, sputtering, e-beam evaporation, and thermal evaporation of silicon. 17. The method of claim 1, wherein pore sizes of the first porous layer are between about 2 to 5 nm, and pore sizes of the second porous layer are between about 10 to 20 nm. 18. The method of claim 1, further comprising: applying heating at least one of the glass substrate and the epitaxial semiconductor layer; bringing the glass substrate into direct or indirect contact with the epitaxial semiconductor layer; and applying a voltage potential across the glass substrate and the epitaxial semiconductor layer to induce the bond therebetween. 19. The method of claim 18, wherein the temperature of the glass substrate and the epitaxial semiconductor layer are elevated to within about 150 degrees C. of the strain point of the glass substrate. 20. The method of claim 18, wherein the voltage potential across the glass substrate and the epitaxial semiconductor layer is between about 100 to 2000 volts. 21. The method of claim 1, wherein the stress is induced by cooling the bonded glass substrate, epitaxial semiconductor layer, porous layers and semiconductor wafer such that a fracture occurs substantially at the first and second porous layers. 22. The method of claim 21, further comprising providing mechanical stress to facilitate the separation. 23. The method of claim 21, wherein the separation results in a structure including the glass substrate, the epitaxial semiconductor layer and at least a portion of the first porous layer. 24. The method of claim 23, further comprising polishing off the first porous layer to form the semiconductor on glass structure. 25. The method of claim 1, wherein the semiconductor of at least one of the semiconductor wafer and the epitaxial semiconductor layer is taken from the group consisting of: silicon (Si), germanium-doped silicon (SiGe), silicon carbide (SiC), germanium (Ge), gallium arsenide (GaAs), GaP, and InP. 26. A method of forming a semiconductor on glass structure, comprising: creating a porous layer in a semiconductor wafer using anodization; forming an epitaxial semiconductor layer directly or indirectly on the porous layer; bonding a glass substrate to the epitaxial semiconductor layer using electrolysis; and applying stress to at least the porous layer such that the bonded glass substrate and epitaxial semiconductor layer separates from the semiconductor wafer. 27. The method of claim 26, wherein pore sizes of the porous layer are about 6 to 9 nm.
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