초록 ▼

A system and method for controlling the temperature of a process tool uses the vaporizable characteristic of a refrigerant that is provided in direct heat exchange relation with the process tool. Pressurized refrigerant is provided as both condensed liquid and in gaseous state. The condensed liquid

A system and method for controlling the temperature of a process tool uses the vaporizable characteristic of a refrigerant that is provided in direct heat exchange relation with the process tool. Pressurized refrigerant is provided as both condensed liquid and in gaseous state. The condensed liquid is expanded to a vaporous mix, and the gaseous refrigerant is added to reach a target temperature determined by its pressure. Temperature corrections can thus be made very rapidly by gas pressure adjustments. The process tool and the operating parameters will usually require that the returning refrigerant be conditioned and processed for compatibility with the compressor and other units, so that cycling can be continuous regardless of thermal demands and changes.

대표청구항 ▼

The invention claimed is: 1. A method for correcting the pressure and enthalpy of a refrigerant used directly in thermal exchange relation with a thermal load which might heat or cool the refrigerant, comprising the steps of: substantially equally pressurizing the refrigerant as an ambient temperat

The invention claimed is: 1. A method for correcting the pressure and enthalpy of a refrigerant used directly in thermal exchange relation with a thermal load which might heat or cool the refrigerant, comprising the steps of: substantially equally pressurizing the refrigerant as an ambient temperature liquid and a high temperature gas; mixing a proportion of the gas with an expanded misted vapor from the liquid to provide a mixture having a target temperature and pressure; passing the mixture in thermal exchange relation to the thermal load, and internally compensating in the mixture for changes in pressure and enthalpy before again pressurizing. 2. The method as set forth in claim 1 above, further including the steps of: varying the mass flow of the high temperature gas after pressurization thereof; expanding the pressurized ambient temperature liquid to a misted vapor state to provide a selected temperature, and wherein the step of internally compensating further comprises . . . sensing the temperature of said thermal load; comparing said sensed temperature with the desired temperature of said thermal load, and adjusting the proportions of said gas and said expanded misted vapor so as to alter said temperature of said thermal load to the desired temperature solely by exchange of thermal energy between said thermal load and the enthalpy of said mixture of vapor and gas to maintain said mixture at a substantially constant selected temperature. 3. The method as set forth in claim 2 above, further including the step of exchanging heat between said thermal load and said mixture in such manner that both liquid and gas are present at the exit of said thermal load. 4. The method as set forth in claim 2 above, further including the step of exchanging heat between said thermal load and said mixture of liquid and gas such that said mixture exists completely within the range of pressure and enthalpy within the vapor dome of said refrigerant. 5. The method as set forth in claim 4 above, further including the step of adding enthalpy to said mix after thermal exchange with the thermal load so as to remove said liquid from said mix prior to said again pressurizing. 6. The method as set forth in claim 2 above, wherein the step of adjusting proportions includes adjusting the pressure, temperature and enthalpy of said mixtures to selected levels within continuous ranges. 7. The method as set forth in claim 1 above, further including the step of setting the pressure and enthalpy of the mixture such that the temperature of thermal exchange with the thermal load is stabilized for a period of time because thermal energy interchange in that time period is primarily effected using the latent heat of evaporation or condensation. 8. A method of varying the heat transfer properties of a two phase refrigerant to exchange thermal energy with a thermal load so as to heat or cool the load to a chosen temperature within a range, comprising the steps of: compressing the refrigerant to a high enthalpy level such that it is wholly in gas phase; dividing the compressed refrigerant into first and second parts; lowering the enthalpy of a first part of the compressed refrigerant; lowering the pressure of the first part to create a controllable expanded flow at lower temperature; maintaining the enthalpy of the second part of the compressed refrigerant while selectively varying the flow mass thereof; combining the controlled expanded flow with the selectively varied flow mass into a mixture of misted vapor whose temperature is determined by the proportions of the mixture; exchanging thermal energy between the combined flow and the thermal load while maintaining the thermal load at a selected temperature by controlling the pressure of the combined flow, and restoring the combined flow to gas phase for subsequent compression.