Light emitting device and method of manufacturing the same
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
H01L-029/10
H01L-029/02
출원번호
US-0043283
(2005-01-27)
등록번호
US-7420208
(2008-09-02)
우선권정보
JP-2001-187351(2001-06-20)
발명자
/ 주소
Yamazaki,Shunpei
Takayama,Toru
Akiba,Mai
출원인 / 주소
Semiconductor Energy Laboratory Co., Ltd.
대리인 / 주소
Nixon Peabody LLP
인용정보
피인용 횟수 :
53인용 특허 :
64
초록▼
The present invention has an object of providing a light emitting device including an OLED formed on a plastic substrate, which can prevent the degradation due to penetration of moisture or oxygen. On a plastic substrate, a plurality of films for preventing oxygen or moisture from penetrating into a
The present invention has an object of providing a light emitting device including an OLED formed on a plastic substrate, which can prevent the degradation due to penetration of moisture or oxygen. On a plastic substrate, a plurality of films for preventing oxygen or moisture from penetrating into an organic light emitting layer in the OLED (hereinafter, referred to as barrier films) and a film having a smaller stress than that of the barrier films (hereinafter, referred to as a stress relaxing film), the film being interposed between the barrier films, are provided. Owing to a laminate structure of a plurality of barrier films, even if a crack occurs in one of the barrier films, the other barrier film(s) can effectively prevent moisture or oxygen from penetrating into the organic light emitting layer. Moreover, the stress relaxing film, which has a smaller stress than that of the barrier films, is interposed between the barrier films, thereby making it possible to reduce a stress of the entire sealing film. As a result, a crack due to stress hardly occurs.
대표청구항▼
What is claimed is: 1. A camera comprising: a display unit, the display unit comprising: a first substrate; a second substrate; a light emitting element formed between the first substrate and the second substrate; a plurality of first insulating films formed between the first substrate and the ligh
What is claimed is: 1. A camera comprising: a display unit, the display unit comprising: a first substrate; a second substrate; a light emitting element formed between the first substrate and the second substrate; a plurality of first insulating films formed between the first substrate and the light emitting element; at least one second insulating film formed in each space between the plurality of first insulating films; a plurality of third insulating films formed between the second substrate and the light emitting element; and at least one fourth insulating film formed in each space between the plurality of third insulating films, wherein the first substrate and the second substrate are formed of plastic, and wherein the at least one second insulating film has a smaller stress than that of each of the plurality of first insulating films and the at least one fourth insulating film has a smaller stress than that of each of the plurality of third insulating films. 2. A camera according to claim 1, wherein at least one of the first substrate and the second substrate has flexibility. 3. A camera according to claim 1, wherein the plastic comprises any one selected from the group consisting of polyether sulfone, polycarbonate, polyethylene terephthalate and polyethylene naphthalate. 4. A camera according to claim 1, wherein at least one of the plurality of first insulating films and the plurality of third insulating films comprises any one selected from the group consisting of silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, aluminum oxynitride and aluminum silicide oxynitride. 5. A camera according to claim 1, wherein the second insulating film and the fourth insulating film comprises any one selected from the group consisting of polyimide, acryl, polyamide, polyimide amide, benzocyclobutene and an epoxy resin. 6. A camera according to claim 1, further comprising a thin film transistor formed between the light emitting element and the plurality of first insulating films. 7. A camera according to claim 1, further comprising a leveling film formed between the light emitting element and the plurality of third insulating films. 8. A camera comprising: a display unit, the display unit comprising: a first substrate; a second substrate; a light emitting element and a thin film transistor, formed between the first substrate and the second substrate; a plurality of first insulating films formed between the first substrate, and the light emitting element and the thin film transistor; at least one second insulating film formed in each space between the plurality of first insulating films; a plurality of third insulating films formed between the second substrate, and the light emitting element and the thin film transistor; and at least one fourth insulating film formed in each space between the plurality of third insulating films, wherein the first substrate and the second substrate are formed of plastic, and wherein the at least one second insulating film has a smaller stress than that of each of the plurality of first insulating films; and the at least one fourth insulating film has a smaller stress than that of each of the plurality of third insulating films. 9. A camera according to claim 8, wherein at least one of the first substrate and the second substrate has flexibility. 10. A camera according to claim 8, wherein the plastic comprises any one selected from the group consisting of polyether sulfone, polycarbonate, polyethylene terephthalate and polyethylene naphthalate. 11. A camera according to claim 8, wherein at least one of the plurality of first insulating films and the plurality of third insulating films comprises any one selected from the group consisting of silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, aluminum oxynitride and aluminum silicide oxynitride. 12. A camera according to claim 8, wherein at least one of the second insulating film and the fourth insulating film comprises any one selected from the group consisting of polyimide, acryl, polyamide, polyimide amide, benzocyclobutene and an epoxy resin. 13. A camera comprising: a display unit, the display unit comprising: a substrate; a light emitting element; a plurality of first insulating films formed between the substrate and the light emitting element; at least one second insulating film formed in each space between the plurality of first insulating films; a plurality of third insulating films; and at least one fourth insulating film formed in each space between the plurality of third insulating films, wherein the light emitting element is formed between the plurality of third insulating films and the substrate, wherein the substrate is formed of plastic, and wherein the at least one second insulating film has a smaller stress than that of each of the plurality of first insulating films and the at least one fourth insulating film has a smaller stress than that of each of the plurality of third insulating films. 14. A camera comprising: a display unit, the display unit comprising: a substrate; a light emitting element and a thin film transistor; a plurality of first insulating films formed between the substrate, and the light emitting element and the thin film transistor; at least one second insulating film formed in each space between the plurality of first insulating films; a plurality of third insulating films; and at least one fourth insulating film formed in each space between the plurality of third insulating films, wherein the light emitting element and the thin film transistor are formed between the plurality of third insulating films and the substrate, wherein the substrate is formed of plastic, and wherein the at least one second insulating film has a smaller stress than that of each of the plurality of first insulating films and the at least one fourth insulating film has a smaller stress than that of each of the plurality of third insulating films. 15. A camera comprising: a display unit, the display unit comprising: a first substrate; a second substrate; a light emitting element formed between the first substrate and the second substrate; a plurality of first insulating films formed between the first substrate and the light emitting element; at least one second insulating film formed in each space between the plurality of first insulating films; a first bonding layer formed between the light emitting element and the plurality of first insulating films; a plurality of third insulating films formed between the second substrate and the light emitting element; at least one fourth insulating film formed in each space between the plurality of third insulating films; and a second bonding layer formed between the light emitting element and the plurality of third insulating films, wherein the first substrate and the second substrate are formed of plastic, and wherein the at least one second insulating film has a smaller stress than that of each of the plurality of first insulating films and the at least one fourth insulating film has a smaller stress than that of each of the plurality of third insulating films. 16. A camera according to claim 15, wherein at least one of the first substrate and the second substrate has flexibility. 17. A camera according to claim 15, wherein the plastic comprises any one selected from the group consisting of polyether sulfone, polycarbonate, polyethylene terephthalate and polyethylene naphthalate. 18. A camera according to claim 15, wherein at least one of the plurality of first insulating films and the plurality of third insulating films comprises any one selected from the group consisting of silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, aluminum oxynitride and aluminum silicide oxynitride. 19. A camera according to claim 15, wherein at least one of the second insulating film and the fourth insulating film comprises any one selected from the group consisting of polyimide, acryl, polyamide, polyimide amide, benzocyclobutene and an epoxy resin. 20. A camera according to claim 15, further comprising a thin film transistor formed between the light emitting element and the plurality of first insulating films. 21. A camera according to claim 15, further comprising a leveling film formed between the light emitting element and the plurality of third insulating films. 22. A computer comprising: a display unit, the display unit comprising: a first substrate; a second substrate; a light emitting element formed between the first substrate and the second substrate; a plurality of first insulating films formed between the first substrate and the light emitting element; at least one second insulating film formed in each space between the plurality of first insulating films; a plurality of third insulating films formed between the second substrate and the light emitting element; and at least one fourth insulating film formed in each space between the plurality of third insulating films, wherein the first substrate and the second substrate are formed of plastic, and wherein the at least one second insulating film has a smaller stress than that of each of the plurality of first insulating films and the at least one fourth insulating film has a smaller stress than that of each of the plurality of third insulating films. 23. A computer according to claim 22, wherein at least one of the first substrate and the second substrate has flexibility. 24. A computer according to claim 22, wherein the plastic comprises any one selected from the group consisting of polyether sulfone, polycarbonate, polyethylene terephthalate and polyethylene naphthalate. 25. A computer according to claim 22, wherein at least one of the plurality of first insulating films and the plurality of third insulating films comprises any one selected from the group consisting of silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, aluminum oxynitride and aluminum silicide oxynitride. 26. A computer according to claim 22, wherein the second insulating film and the fourth insulating film comprises any one selected from the group consisting of polyimide, acryl, polyamide, polyimide amide, benzocyclobutene and an epoxy resin. 27. A computer comprising: a display unit, the display unit comprising: a first substrate; a second substrate; a light emitting element and a thin film transistor, formed between the first substrate and the second substrate; a plurality of first insulating films formed between the first substrate, and the light emitting element and the thin film transistor; at least one second insulating film formed in each space between the plurality of first insulating films; a plurality of third insulating films formed between the second substrate, and the light emitting element and the thin film transistor; and at least one fourth insulating film formed in each space between the plurality of third insulating films, wherein the first substrate and the second substrate are formed of plastic, and wherein the at least one second insulating film has a smaller stress than that of each of the plurality of first insulating films; and the at least one fourth insulating film has a smaller stress than that of each of the plurality of third insulating films. 28. A computer according to claim 27, wherein at least one of the first substrate and the second substrate has flexibility. 29. A computer according to claim 27, wherein the plastic comprises any one selected from the group consisting of polyether sulfone, polycarbonate, polyethylene terephthalate and polyethylene naphthalate. 30. A computer according to claim 27, wherein at least one of the plurality of first insulating films and the plurality of third insulating films comprises any one selected from the group consisting of silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, aluminum oxynitride and aluminum silicide oxynitride. 31. A computer according to claim 27, wherein at least one of the second insulating film and the fourth insulating film comprises any one selected from the group consisting of polyimide, acryl, polyamide, polyimide amide, benzocyclobutene and an epoxy resin. 32. A computer comprising: a display unit, the display unit comprising: a substrate; a light emitting element; a plurality of first insulating films formed between the substrate and the light emitting element; at least one second insulating film formed in each space between the plurality of first insulating films; a plurality of third insulating films; and at least one fourth insulating film formed in each space between the plurality of third insulating films, wherein the light emitting element is formed between the plurality of third insulating films and the substrate, wherein the substrate is formed of plastic, and wherein the at least one second insulating film has a smaller stress than that of each of the plurality of first insulating films and the at least one fourth insulating film has a smaller stress than that of each of the plurality of third insulating films. 33. A computer according to claim 32, wherein the substrate has flexibility. 34. A computer according to claim 32, wherein the plastic comprises any one selected from the group consisting of polyether sulfone, polycarbonate, polyethylene terephthalate and polyethylene naphthalate. 35. A computer according to claim 32, wherein at least one of the plurality of first insulating films and the plurality of third insulating films comprises any one selected from the group consisting of silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, aluminum oxynitride and aluminum silicide oxynitride. 36. A computer according to claim 32, wherein at least one of the second insulating film and the fourth insulating film comprises any one selected from the group consisting of polyimide, acryl, polyamide, polyimide amide, benzocyclobutene and an epoxy resin. 37. A computer comprising: a display unit, the display unit comprising: a substrate; a light emitting element and a thin film transistor; a plurality of first insulating films formed between the substrate, and the light emitting element and the thin film transistor; at least one second insulating film formed in each space between the plurality of first insulating films; a plurality of third insulating films; and at least one fourth insulating film formed in each space between the plurality of third insulating films, wherein the light emitting element and the thin film transistor are formed between the plurality of third insulating films and the substrate, wherein the substrate is formed of plastic, and wherein the at least one second insulating film has a smaller stress than that of each of the plurality of first insulating films and the at least one fourth insulating film has a smaller stress than that of each of the plurality of third insulating films. 38. A computer according to claim 37, wherein the substrate has flexibility. 39. A computer according to claim 37, wherein the plastic comprises any one selected from the group consisting of polyether sulfone, polycarbonate, polyethylene terephthalate and polyethylene naphthalate. 40. A computer according to claim 37, wherein at least one of the plurality of first insulating films and the plurality of third insulating films comprises any one selected from the group consisting of silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, aluminum oxynitride and aluminum silicide oxynitride. 41. A computer according to claim 37, wherein at least one of the second insulating film and the fourth insulating film comprises any one selected from the group consisting of polyimide, acryl, polyamide, polyimide amide, benzocyclobutene and an epoxy resin. 42. A computer comprising: a display unit, the display unit comprising: a first substrate; a second substrate; a light emitting element formed between the first substrate and the second substrate; a plurality of first insulating films formed between the first substrate and the light emitting element; at least one second insulating film formed in each space between the plurality of first insulating films; a first bonding layer formed between the light emitting element and the plurality of first insulating films; a plurality of third insulating films formed between the second substrate and the light emitting element; at least one fourth insulating film formed in each space between the plurality of third insulating films; and a second bonding layer formed between the light emitting element and the plurality of third insulating films, wherein the first substrate and the second substrate are formed of plastic, and wherein the at least one second insulating film has a smaller stress than that of each of the plurality of first insulating films and the at least one fourth insulating film has a smaller stress than that of each of the plurality of third insulating films. 43. A computer according to claim 42, wherein at least one of the first substrate and the second substrate has flexibility. 44. A computer according to claim 42, wherein the plastic comprises any one selected from the group consisting of polyether sulfone, polycarbonate, polyethylene terephthalate and polyethylene naphthalate. 45. A computer according to claim 42, wherein at least one of the plurality of first insulating films and the plurality of third insulating films comprises any one selected from the group consisting of silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, aluminum oxynitride and aluminum silicide oxynitride. 46. A computer according to claim 42, wherein at least one of the second insulating film and the fourth insulating film comprises any one selected from the group consisting of polyimide, acryl, polyamide, polyimide amide, benzocyclobutene and an epoxy resin. 47. A computer according to claim 42, further comprising a thin film transistor formed between the light emitting element and the plurality of first insulating films. 48. A computer according to claim 42, further comprising a leveling film formed between the light emitting element and the plurality of third insulating films. 49. A portable information terminal comprising: a display unit, the display unit comprising: a first substrate; a second substrate; a light emitting element formed between the first substrate and the second substrate; a plurality of first insulating films formed between the first substrate and the light emitting element; at least one second insulating film formed in each space between the plurality of first insulating films; a plurality of third insulating films formed between the second substrate and the light emitting element; and at least one fourth insulating film formed in each space between the plurality of third insulating films, wherein the first substrate and the second substrate are formed of plastic, and wherein the at least one second insulating film has a smaller stress than that of each of the plurality of first insulating films and the at least one fourth insulating film has a smaller stress than that of each of the plurality of third insulating films. 50. A portable information terminal according to claim 49, wherein at least one of the first substrate and the second substrate has flexibility. 51. A portable information terminal according to claim 49, wherein the plastic comprises any one selected from the group consisting of polyether sulfone, polycarbonate, polyethylene terephthalate and polyethylene naphthalate. 52. A portable information terminal according to claim 49, wherein at least one of the plurality of first insulating films and the plurality of third insulating films comprises any one selected from the group consisting of silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, aluminum oxynitride and aluminum silicide oxynitride. 53. A portable information terminal according to claim 49, wherein the second insulating film and the fourth insulating film comprises any one selected from the group consisting of polyimide, acryl, polyamide, polyimide amide, benzocyclobutene and an epoxy resin. 54. A portable information terminal comprising: a display unit, the display unit comprising: a first substrate; a second substrate; a light emitting element and a thin film transistor, formed between the first substrate and the second substrate; a plurality of first insulating films formed between the first substrate, and the light emitting element and the thin film transistor; at least one second insulating film formed in each space between the plurality of first insulating films; a plurality of third insulating films formed between the second substrate, and the light emitting element and the thin film transistor; and at least one fourth insulating film formed in each space between the plurality of third insulating films, wherein the first substrate and the second substrate are formed of plastic, and wherein the at least one second insulating film has a smaller stress than that of each of the plurality of first insulating films; and the at least one fourth insulating film has a smaller stress than that of each of the plurality of third insulating films. 55. A portable information terminal according to claim 54, wherein at least one of the first substrate and the second substrate has flexibility. 56. A portable information terminal according to claim 54, wherein the plastic comprises any one selected from the group consisting of polyether sulfone, polycarbonate, polyethylene terephthalate and polyethylene naphthalate. 57. A portable information terminal according to claim 54, wherein at least one of the plurality of first insulating films and the plurality of third insulating films comprises any one selected from the group consisting of silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, aluminum oxynitride and aluminum silicide oxynitride. 58. A portable information terminal according to claim 54, wherein at least one of the second insulating film and the fourth insulating film comprises any one selected from the group consisting of polyimide, acryl, polyamide, polyimide amide, benzocyclobutene and an epoxy resin. 59. A portable information terminal comprising: a display unit, the display unit comprising: a substrate; a light emitting element; a plurality of first insulating films formed between the substrate and the light emitting element; at least one second insulating film formed in each space between the plurality of first insulating films; a plurality of third insulating films; and at least one fourth insulating film formed in each space between the plurality of third insulating films, wherein the light emitting element is formed between the plurality of third insulating films and the substrate, wherein the substrate is formed of plastic, and wherein the at least one second insulating film has a smaller stress than that of each of the plurality of first insulating films and the at least one fourth insulating film has a smaller stress than that of each of the plurality of third insulating films. 60. A portable information terminal according to claim 59, wherein the substrate has flexibility. 61. A portable information terminal according to claim 59 wherein the plastic comprises any one selected from the group consisting of polyether sulfone, polycarbonate, polyethylene terephthalate and polyethylene naphthalate. 62. A portable information terminal according to claim 59, wherein at least one of the plurality of first insulating films and the plurality of third insulating films comprises any one selected from the group consisting of silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, aluminum oxynitride and aluminum silicide oxynitride. 63. A portable information terminal according to claim 59, wherein at least one of the second insulating film and the fourth insulating film comprises any one selected from the group consisting of polyimide, acryl, polyamide, polyimide amide, benzocyclobutene and an epoxy resin. 64. A portable information terminal comprising: a display unit, the display unit comprising: a substrate; a light emitting element and a thin film transistor; a plurality of first insulating films formed between the substrate, and the light emitting element and the thin film transistor; at least one second insulating film formed in each space between the plurality of first insulating films; a plurality of third insulating films; and at least one fourth insulating film formed in each space between the plurality of third insulating films, wherein the light emitting element and the thin film transistor are formed between the plurality of third insulating films and the substrate, wherein the substrate is formed of plastic, and wherein the at least one second insulating film has a smaller stress than that of each of the plurality of first insulating films and the at least one fourth insulating film has a smaller stress than that of each of the plurality of third insulating films. 65. A portable information terminal according to claim 64, wherein the substrate has flexibility. 66. A portable information terminal according to claim 64, wherein the plastic comprises any one selected from the group consisting of polyether sulfone, polycarbonate, polyethylene terephthalate and polyethylene naphthalate. 67. A portable information terminal according to claim 64, wherein at least one of the plurality of first insulating films and the plurality of third insulating films comprises any one selected from the group consisting of silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, aluminum oxynitride and aluminum silicide oxynitride. 68. A portable information terminal according to claim 64, wherein at least one of the second insulating film and the fourth insulating film comprises any one selected from the group consisting of polyimide, acryl, polyamide, polyimide amide, benzocyclobutene and an epoxy resin. 69. A portable information terminal comprising: a display unit, the display unit comprising: a first substrate; a second substrate; a light emitting element formed between the first substrate and the second substrate; a plurality of first insulating films formed between the first substrate and the light emitting element; at least one second insulating film formed in each space between the plurality of first insulating films; a first bonding layer formed between the light emitting element and the plurality of first insulating films; a plurality of third insulating films formed between the second substrate and the light emitting element; at least one fourth insulating film formed in each space between the plurality of third insulating films; and a second bonding layer formed between the light emitting element and the plurality of third insulating films, wherein the first substrate and the second substrate are formed of plastic, and wherein the at least one second insulating film has a smaller stress than that of each of the plurality of first insulating films and the at least one fourth insulating film has a smaller stress than that of each of the plurality of third insulating films. 70. A portable information terminal according to claim 69, wherein at least one of the first substrate and the second substrate has flexibility. 71. A portable information terminal according to claim 69, wherein the plastic comprises any one selected from the group consisting of polyether sulfone, polycarbonate, polyethylene terephthalate and polyethylene naphthalate. 72. A portable information terminal according to claim 69, wherein at least one of the plurality of first insulating films and the plurality of third insulating films comprises any one selected from the group consisting of silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, aluminum oxynitride and aluminum silicide oxynitride. 73. A portable information terminal according to claim 69, wherein at least one of the second insulating film and the fourth insulating film comprises any one selected from the group consisting of polyimide, acryl, polyamide, polyimide amide, benzocyclobutene and an epoxy resin. 74. A portable information terminal according to claim 69, further comprising a thin film transistor formed between the light emitting element and the plurality of first insulating films. 75. A portable information terminal according to claim 69, further comprising a leveling film formed between the light emitting element and the plurality of third insulating films.
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