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Electrochemical drive circuitry and method

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01N-027/42
출원번호 US-0838390 (2004-05-04)
등록번호 US-7427346 (2008-09-23)
발명자 / 주소
  • Tom,Glenn M.
  • Lurcott,Steven
출원인 / 주소
  • Advanced Technology Materials, Inc.
대리인 / 주소
    Hultquist,Steven J.
인용정보 피인용 횟수 : 8  인용 특허 : 71

초록

An electrochemical drive circuitry and method, such as may be employed in electroplating bath chemical monitoring. A microcontroller can be utilized to selectively apply galvanostatic or potentiostatic conditions on the electrochemical cell, for measurement of response of the electrochemical cell to

대표청구항

What is claimed is: 1. A circuitry for monitoring an electrochemical process in an electrochemical cell including working, reference and counter electrodes, arranged to carry out galvanostatic and potentiostatic modes of operation of said electrochemical cell, involving electrochemical plating in a

이 특허에 인용된 특허 (71)

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  53. Hui Wang, Methods and apparatus for electropolishing metal interconnections on semiconductor devices.
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  66. Robert Peat GB; Paul Antony Harry Fennell GB, Sensing liquids in oil well using electrochemical sensor.
  67. Peters, W. Neil, Shaped-tube electrolytic polishing process.
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  69. Schomburg,Cory, System and methods for analyzing copper chemistry.
  70. Gunasingham Hari (Singapore CNX), Voltammetric detector for flow analysis.
  71. Kogan, Alex; Shalyt, Eugene; Bratin, Peter; Pavlov, Michael; Perpich, Michael James, Voltammetric measurement of halide ion concentration.

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  1. Chandrasekhar, Prasanna, Complimentary polymer electrochromic device.
  2. Chandrasekhar, Prasanna, Complimentary polymer electrochromic device.
  3. Chandrasekhar, Prasanna, Complimentary polymer electrochromic device.
  4. Chandrasekhar, Prasanna; Zay, Brian J.; Laganis, Edward J.; Romanov, Vasily V.; LaRosa, Anthony J., Electrochromic eyewear.
  5. Henry, Richard O.; Hilscher, David F.; Merritt, Sandi E.; Taft, Charles J.; Zigner, Jr., Robert W., Partial solution replacement in recyclable persulfuric acid cleaning systems.
  6. Henry, Richard O.; Hilscher, David F.; Merritt, Sandi E.; Taft, Charles J.; Zigner, Jr., Robert W., Partial solution replacement in recyclable persulfuric acid cleaning systems.
  7. Chandrasekhar, Prasanna; Chai, Yanjie, Potentiostat/galvanostat with digital interface.
  8. Chandrasekhar, Prasanna, Variable-emittance electrochromic devices and methods of preparing the same.
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