초록 ▼

The present invention relates to an X-ray source comprising an electron source (1) for the emission of electrons (E), a target (4) for the emission of characteristic, substantially monochromatic X-rays (C) in response to the incidence of the electrons (E) and an outcoupling means (11) for outcouplin

The present invention relates to an X-ray source comprising an electron source (1) for the emission of electrons (E), a target (4) for the emission of characteristic, substantially monochromatic X-rays (C) in response to the incidence of the electrons (E) and an outcoupling means (11) for outcoupling of the X-rays. To achieve characteristic, substantially monochromatic X-rays with a high power loadability electrons are incident on a metal foil (5) of a thickness of less than 10 μm and a base arrangement (7, 12) is arranged wherein the metal of said metal foil (5) has a high atomic number allowing the generation of X-rays (C) and the material substantially included in the base arrangement (7, 12) has a low atomic number not allowing the generation of X-rays (C). The outcoupling means are adapted for outcoupling only X-rays (C) on the side of the metal foil (5) on which the electrons (E) are incident and which is opposite to the side of the base arrangement (7, 12) since on this side almost no bremsstrahlung radiation is generated.

대표청구항 ▼

The invention claimed is: 1. An X-ray source comprising: an electron source for emission of electrons in an electron beam, a target for emission of characteristic, substantially monochromatic X-rays in response to incidence of the electrons of the electron beam onto said target, said target compris

The invention claimed is: 1. An X-ray source comprising: an electron source for emission of electrons in an electron beam, a target for emission of characteristic, substantially monochromatic X-rays in response to incidence of the electrons of the electron beam onto said target, said target comprising a metal foil of a thickness of between one and three μm and a base arrangement for carrying said metal foil, wherein the metal foil thickness of between one and three μm is smaller than or equal to an electron diffusion depth and for which less than twenty percent (80%) of the electron energy is deposited directly into the coolant without exceeding the boiling point of the coolant. 3. The X-ray source as claimed in claim 2, wherein the coolant has a mean atomic number of less than 10. 4. The X-ray source as claimed in claim 2, wherein the coolant is water. 5. The X-ray source as claimed in claim 2, wherein said cooling circuit comprises a constriction in the area of the metal foil. 6. The X-ray source as claimed in claim 2, wherein said target further comprises a carrier of low atomic number material supporting the metal foil on the side facing the coolant. 7. The X-ray source as claimed in claim 1, wherein the metal of said metal foil has an atomic number between 40 and 80. 8. The X-ray source as claimed in claim 1, wherein said outcoupling means is adapted to outcouple X-rays at angles of an angular range from substantially 70�� to 110��, to the surface of the metal foil. 9. The X-ray source as claimed in claim 1, wherein said electrons are directed onto the surface of said metal foil at a substantially 90�� angle. 10. The X-ray source as claimed in claim 1, wherein said electron source is located outside the X-ray beam to be outcoupled, said X-ray source further comprising means for directing the electron beam onto the metal foil. 11. The X-ray source as claimed in claim 1, wherein said outcoupling means is adapted to outcouple X-rays in a direction at an angle in the range from 160�� to 180�� to the direction of incidence of said electrons. 12. A target for use in an X-ray source for the generation of characteristic, substantially monochromatic X-rays in response to the incidence of electrons in an electron beam, said target comprising a metal foil of a thickness of between one and three μm and a base arrangement for carrying said metal foil, wherein the metal foil thickness of between one and three μm is smaller than or equal to an electron diffusion depth and for which less than twenty percent (80%) of the electron energy is deposited directly into the coolant without exceeding the boiling point of the coolant, and wherein said target further comprises a carrier having a mean atomic number of less than 10 supporting the metal foil on the side facing the coolant, further wherein a background of the low-intensity bremsstrahlung X-rays on which quasi-monochromatic characteristic lines of the metal foil are superimposed results in a quasi-monochromatic spectrum of X-rays produced on the side of the metal foil on which the electrons are incident and which is opposite to the side of the base arrangement. 14. The X-ray source as claimed in claim 13, wherein the coolant is water. 15. The X-ray source as claimed in claim 13, wherein said cooling circuit comprises a constriction proximate the metal foil.