Electromagnetic valve and fluid control apparatus
IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0137436
(2005-05-26)
|
등록번호 |
US-7441562
(2008-10-28)
|
우선권정보 |
JP-2004-173954(2004-06-11); JP-2004-173955(2004-06-11) |
발명자
/ 주소 |
- Segawa,Taro
- Shinkai,Hiroyuki
- Kamiya,Masahiko
- Kajita,Hidenobu
- Tsujimura,Shinichi
|
출원인 / 주소 |
|
대리인 / 주소 |
|
인용정보 |
피인용 횟수 :
2 인용 특허 :
4 |
초록
▼
A stopper formed of a magnetic material and forming a portion of a magnetic circuit has a deformable portion that deforms in accordance with the pressure in a space within a sleeve. The deformable portion is provided with a pressure sensor that measures the amount of deformation of the deformable po
A stopper formed of a magnetic material and forming a portion of a magnetic circuit has a deformable portion that deforms in accordance with the pressure in a space within a sleeve. The deformable portion is provided with a pressure sensor that measures the amount of deformation of the deformable portion. The deformable portion, corresponding to a diaphragm, is formed in the stopper, which is a conventional electromagnetic valve component part. Therefore, it is no longer necessary to provide a diaphragm or a seal member.
대표청구항
▼
What is claimed is: 1. An electromagnetic valve comprising: a coil that forms a magnetic field when energized; a tubular sleeve which is disposed at an inner peripheral side of the coil and whose interior has a space; a stopper having an end side that is joined to the sleeve and closes an end of th
What is claimed is: 1. An electromagnetic valve comprising: a coil that forms a magnetic field when energized; a tubular sleeve which is disposed at an inner peripheral side of the coil and whose interior has a space; a stopper having an end side that is joined to the sleeve and closes an end of the sleeve; and an armature that is disposed slidably in the space in the sleeve, wherein the stopper is formed of a magnetic material, and forms a portion of a magnetic circuit, a deformable portion that deforms in accordance with a pressure in the space in the sleeve is formed in the stopper, the deformable portion is provided with a pressure sensor that measures an amount of deformation of the deformable portion, and the pressure sensor is made of semiconductor material and is a strain gage based pressure sensor, a specific resistance of the pressure sensor varies in accordance with stress, and the stopper is made of a material that has substantially the same linear expansion coefficient as the semiconductor material. 2. The electromagnetic valve according to claim 1, wherein the pressure sensor is a strain gage, and the strain gage is directly joined to the deformable portion. 3. The electromagnetic valve according to claim 1, wherein the deformable portion is formed in an end surface of one end of the stopper. 4. The electromagnetic valve according to claim 3, wherein the deformable portion has a generally flat surface. 5. The electromagnetic valve according to claim 1, wherein the stopper is made of a material that has substantially the same linear expansion coefficient as a material of a strain gage of the pressure sensor. 6. The electromagnetic valve according to claim 1, wherein the pressure sensor and a signal processing circuit for processing a signal from the pressure sensor are integrated in a chip. 7. The electromagnetic valve according to claim 1, wherein a signal processing circuit that processes a signal from the pressure sensor is attached to the stopper. 8. A fluid control apparatus comprising: an electromagnetic valve as described in claim 1; a housing having a fluid conduit that is opened and closed by the electromagnetic valve; and a circuit board having a control circuit that controls current flow to the coil, wherein the pressure sensor is electrically connected to the circuit board, and wherein the stopper extends toward the circuit board to a position such that the deformable portion is substantially flush with a surface of the circuit board. 9. A fluid control apparatus according to claim 8, wherein the pressure sensor and the circuit board are connected by wire bonding. 10. The electromagnetic valve according to claim 1, wherein the stopper is formed of a magnetic metal material, and the semiconductor material is silicon. 11. The electromagnetic valve according to claim 10, wherein the linear expansion coefficient of the deformable portion of the stopper and the semiconductor material is 11 ppm/�� C. or less. 12. The electromagnetic valve according to claim 1, wherein the electromagnetic valve is normally closed, and when the coil is energized, the armature is attracted toward the stopper to open the electromagnetic valve. 13. The electromagnetic valve according to claim 1, wherein the deformable portion and the pressure sensor are centered on a longitudinal axis of the electromagnetic valve. 14. The electromagnetic valve according to claim 1, wherein the deformable portion is thinner than other portions of the stopper. 15. A fluid control apparatus comprising: an electromagnetic valve comprising; a coil that forms a magnetic field when energized; a tubular sleeve which is disposed at an inner peripheral side of the coil and whose interior has a space; a stopper having an end side that is joined to the sleeve and closes an end of the sleeve; and an armature that is disposed slidably in the space in the sleeve, wherein the stopper is formed of a magnetic material, and forms a portion of a magnetic circuit, wherein a deformable portion that deforms in accordance with a pressure in the space in the sleeve is formed in the stopper, wherein the deformable portion is provided with a pressure sensor that measures an amount of deformation of the deformable portion; a housing having a fluid conduit that is opened and closed by the electromagnetic valve; a circuit board having a control circuit that controls current flow to the coil, wherein the pressure sensor is electrically connected to the circuit board, and wherein the stopper extends toward a side of the circuit board to such a position that a position such that the deformable portion is substantially flush with a surface of the circuit board. 16. The fluid control apparatus according to the claim 15, wherein the deformable portion is thinner than other portions of the stopper.
이 특허에 인용된 특허 (4)
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Morosini, Rik M.; Fenzke, Robert, Hiking stick and method of using the same.
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Henderson Gregory H. ; Bailey Thomas L. ; Manring Edward Benjamin, Integrated fuel measurement and control system for gaseous fuels.
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Beck, Erhard; Volz, Peter, Pressure control device.
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Michael L. Babala ; Marc Bolitho ; Paul M. Schliebe ; Thomas Baron DE; Helmut Gegalski DE, Pressure sensor integrated into an electro-hydraulic control unit.
이 특허를 인용한 특허 (2)
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De Carolis, Enrico; Heriot, Scott; Grissom, Brian, Valve manifold circuit board with serial communication and control circuit line.
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De Carolis, Enrico; Heriot, Scott D.; Hundt, Michael W., Valve manifold circuit board with serial communication circuit line.
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