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특허 상세정보

Nozzle for spraying sublimable solid particles entrained in gas for cleaning surface

특허상세정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) B24B-049/00    B24B-051/00   
미국특허분류(USC) 451/008; 451/053; 451/102
출원번호 US-0136732 (2005-05-25)
등록번호 US-7442112 (2008-10-28)
우선권정보 KR-10-2004-0039305(2004-05-31); KR-10-2004-0114260(2004-12-28)
발명자 / 주소
출원인 / 주소
대리인 / 주소
    Leydig, Voit & Mayer, Ltd.
인용정보 피인용 횟수 : 48  인용 특허 : 25
초록

A nozzle for spraying sublimable solid particles and preventing frost from forming at surfaces of the nozzle. The nozzle includes: a cleaning agent block for phase-changing a cleaning agent into a snow containing sublimable solid particles; a nozzle block for growing the cleaning agent snow through adiabatic expansion and spraying the grown cleaning agent snow onto a surface of an object; a carrier gas block for supplying a carrier gas to the nozzle block to mix with the cleaning agent snow; and a heater for heating at least a portion of the carrier gas ...

대표
청구항

What is claimed is: 1. A nozzle for spraying sublimable solid particles entrained in a gas for cleaning a surface, the nozzle comprising: a cleaning agent block producing a phase change in a cleaning agent that is introduced from a cleaning agent supply source, the cleaning agent changing phase to produce a snow containing the sublimable solid particles; a carrier gas block through which a carrier gas is introduced from a carrier gas supply source; a first heater for heating at least part of the carrier gas supplied from the carrier gas supply source; a...

이 특허에 인용된 특허 (25)

  1. Whitlock Walter H. (Peapack NJ) Weltmer ; Jr. William R. (Murray Hill NJ) Clark James D. (Mountainside NJ). Apparatus and method for removing minute particles from a substrate. USP1989024806171.
  2. Bauer Tibor L. (Hopewell Junction NY) Cavaliere William A. (Verbank NY) Dart ; II Charles R. (Coral Springs FL) Freebern Timothy H. (LaGrangeville NY) Linnell David C. (Poughkeepsie NY) Miller James . Apparatus for producing cryogenic aerosol. USP1995015377911.
  3. McDermott Wayne T. (Allentown PA) Wu Jin J. (Ossining NY) Ockovic Richard C. (Northampton PA). Apparatus to clean solid surfaces using a cryogenic aerosol. USP1993055209028.
  4. Fong Calvin C. (Beverly Hills CA) Altizer John W. (Simi Valley CA) Arnold Vernon E. (Fillmore CA) Lawson John K. (Granada Hills CA). Blasting machine utilizing sublimable particles. USP1983064389820.
  5. Goenka Lakhi N. (Ann Arbor MI). CO2 nozzle and method for cleaning pressure-sensitive surfaces. USP1997045616067.
  6. Swain Eugene A. (Webster NY) Carter Stephen R. (Tucson AZ) Hoenig Stuart A. (Tucson AZ). Carbon dioxide snow agglomeration and acceleration. USP1992065125979.
  7. Patrick Loubeyre FR. Device for decontamination of surfaces. USP2002056390899.
  8. Krone-Schmidt Wilfried (Fullerton CA) Di Milia Edward S. (Gardena CA) Slattery Michael J. (Gardena CA). Electrostatic discharge control during jet spray. USP1995045409418.
  9. Bingham Dennis N. (Idaho Falls ID). Method and apparatus for cutting and abrading with sublimable particles. USP1995105456629.
  10. Rankin George J. (13103 Barryknoll Houston TX 77056). Method and apparatus for liquid-abrasive blast cleaning. USP1991105054249.
  11. Culkins Timothy S. ; Colvin Brent M. ; Carter Michael R.. Method and apparatus for mechanically cleaning the edges of wafers. USP1999115976267.
  12. Pao Y. H. Michael ; Madonna Peter L. ; Coogan Ross T.. Method and apparatus for producing a high-velocity particle stream. USP2001016168503.
  13. Frohlich, Hans; Gebhardt, Sabine; Trampusch, Berthold. Method and device for generating a two-phase gas-particle jet, in particular containing CO2 dry ice particles. USP2004026695686.
  14. Cryer Michael A. (Byron GA) Danielson William D. (Decatur GA) Babb Robert A. (Warner Robins GA). Method and system for cleaning a surface with CO2 pellets that are delivered through a temperature control. USP1995085445553.
  15. Bonora Anthony C. ; Kedarnath N. ; Oen Joshua T.. Method for dry cleaning clean room containers. USP1998125846338.
  16. Williford ; Jr. John F. (7155 NE. 126th St. Kirkland WA 98034). Method for removing particulate matter. USP1994115364474.
  17. Moriya Kozo (Ibaragi JPX) Ookatsu Tadashi (Kobe JPX). Method of cleaning wafers or the like. USP1990114972677.
  18. Lloyd Daniel L. (Mason OH). Phase change injection nozzle. USP1991055018667.
  19. Hayashi Chikara (Chigasaki JPX). Process for removing covering film and apparatus therefor. USP1986124631250.
  20. Chao Sidney C. ; Purer Edna M.. Solvent resupply method for use with a carbon dioxide cleaning system. USP1998105822818.
  21. Goenka Lakhi N. (Ann Arbor MI). Supersonic exhaust nozzle having reduced noise levels for CO2 cleaning system. USP1995025390450.
  22. McDermott Wayne T. (Allentown PA) Ockovic Richard C. (Northampton PA) Wu Jin J. (Ossining NY) Cooper Douglas W. (Milwood NY) Schwarz Alexander (Bethlehem PA) Wolfe Henry L. (Pleasant Valley NY). Surface cleaning using an argon or nitrogen aerosol. USP1994035294261.
  23. Tamai Tadamoto (Tokyo JPX) Ikeya Yoichiro (Houya JPX). Surface cleaning with argon. USP1996045512106.
  24. Hazlebeck, David A.; Spritzer, Michael H.; Downey, Kevin W.; Martinez, Martin R.; Isoya, Toshisuke; Suzuki, Kunitoshi; Nakayama, Satoshi. System and method for solids transport in hydrothermal processes. USP2004086773581.
  25. Peterson Ronald V. (Thousand Oaks CA) Krone-Schmidt Wilfried (Fullerton CA). System for precision cleaning by jet spray. USP1994055315793.

이 특허를 인용한 특허 피인용횟수: 48

  1. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for administering compartmentalized frozen particles. USP2013108545857.
  2. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for administering compartmentalized frozen particles. USP2013108563012.
  3. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for administering compartmentalized frozen particles. USP2013108551506.
  4. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for administering compartmentalized frozen particles. USP2013128603494.
  5. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for biological remodeling with frozen particle compositions. USP2013128603495.
  6. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for biological remodeling with frozen particle compositions. USP2013128603496.
  7. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for biological remodeling with frozen particle compositions. USP2013108545806.
  8. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for biological remodeling with frozen particle compositions. USP2014058731842.
  9. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for biological remodeling with frozen particle compositions. USP2013128613937.
  10. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for biological remodeling with frozen particle compositions. USP2014078788212.
  11. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for delivery of frozen particle adhesives. USP2015069056047.
  12. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for delivery of frozen particle adhesives. USP2015069050251.
  13. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for delivery of frozen particle adhesives. USP2013108545856.
  14. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for delivery of frozen particle adhesives. USP2015069060931.
  15. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for surface abrasion with frozen particles. USP2013048409376.
  16. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for surface abrasion with frozen particles. USP2015079072799.
  17. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for surface abrasion with frozen particles. USP2014058721583.
  18. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for surface abrasion with frozen particles. USP2014058725420.
  19. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for surface abrasion with frozen particles. USP2013108545855.
  20. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for surface abrasion with frozen particles. USP2015069050070.
  21. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for surface abrasion with frozen particles. USP2015069060934.
  22. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for surface abrasion with frozen particles. USP2014058722068.
  23. Boyden, Edward S.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for therapeutic delivery with frozen particles. USP2015079072688.
  24. Boyden, Edward S.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for therapeutic delivery with frozen particles. USP2015069050317.
  25. Boyden, Edward S.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for therapeutic delivery with frozen particles. USP2014058731840.
  26. Boyden, Edward S.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for therapeutic delivery with frozen particles. USP2015069060926.
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