|국가/구분||United States(US) Patent 등록|
|미국특허분류(USC)||206/710; 206/711; 137/508|
|§371/§102 date||20040525 (20040525)|
|발명자 / 주소|
|출원인 / 주소|
|대리인 / 주소||
|인용정보||피인용 횟수 : 8 인용 특허 : 11|
A substrate storage container includes a container body for accommodating and aligning semiconductor wafers, a door which opens and closes the front of the container body and a pair of valve units disposed at the bottom of the container body for controlling gas flow. Each valve unit includes a fixed sleeve for gas flow, fitted in a rib of a through-hole of the container body, a holding sleeve fitted in the through-hole of the container body with an o-ring interposed therebetween and mated and threaded with the fixed sleeve, a check valve built between th...
The invention claimed is: 1. A substrate storage container including: a container body; a door for opening and closing the container body; a valve unit attached to a through-hole formed in, at least, one of the container body and the door, for regulating the gas flow with respect to the container body, characterized in that the valve unit comprises: a fixed sleeve for gas flow, fitted in the through-hole; a holding sleeve for gas flow, threadably mated with the fixed sleeve; an elastic check valve built in between the fixed sleeve and the holding sleeve...