IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0886039
(2004-07-08)
|
등록번호 |
US-7463338
(2008-12-09)
|
우선권정보 |
JP-2003-271924(2003-07-08); JP-2003-279961(2003-07-25); JP-2003-292317(2003-08-12); JP-2003-299711(2003-08-25) |
발명자
/ 주소 |
|
출원인 / 주소 |
|
대리인 / 주소 |
|
인용정보 |
피인용 횟수 :
4 인용 특허 :
5 |
초록
▼
A container is adapted to receive a mask blank having a resist film and includes a container body having an upper opening and a cap put on the container body. The container body has an opening edge provided with an annular elastic member made of polyolefin elastomer or the like and extending through
A container is adapted to receive a mask blank having a resist film and includes a container body having an upper opening and a cap put on the container body. The container body has an opening edge provided with an annular elastic member made of polyolefin elastomer or the like and extending throughout entire circumference. When the cap is put on the container body, the elastic member is interposed at a joint portion between the cap and the container body to hermetically seal the container.
대표청구항
▼
What is claimed is: 1. A container which is for housing a mask blank having a chemically amplified resist film in its interior and which comprises a container body having an upper opening and a cap member to be put on the container body, wherein the container has an elastic member formed on at leas
What is claimed is: 1. A container which is for housing a mask blank having a chemically amplified resist film in its interior and which comprises a container body having an upper opening and a cap member to be put on the container body, wherein the container has an elastic member formed on at least one of an opening edge of the container body and a lower edge of the cap member to extend throughout entire circumference so that the interior of the container is hermetically sealed under an atmosphere in which at least an acid substance is removed by a heating treatment or a cleaning treament to an extent that the chemically amplified resist film is not contaminated when the cap member is put on the container body. 2. A container which is for housing a mask blank having a chemically amplified resist film in its interior and which comprises a container body having an upper opening and a cap member to be put on the container body, wherein the container has an elastic member formed on at least one of an opening edge of the container body and a lower edge of the cap member to extend throughout entire circumference so that the elastic member is interposed between the opening edge of the container body and the lower edge of the cap member at a joint portion therebetween when the cap member is put on the container body, whereby the interior of the container is hermetically sealed under an atmosphere in which at least an acid substance is removed by a heating treatment or a cleaning treament to an extent that the chemically amplified resist film is not contaminated. 3. A container according to claim 1 or 2, wherein the joint portion is fixed and secured by a sliding locking member for clamping the joint portion between the container body and the cap member. 4. A method of housing a mask blank, wherein the mask blank having a chemically amplified resist film is housed in a container according to claim 1 or 2. 5. A method according to claim 4, wherein the acid substance in the atmosphere contains chlorine ions, sulfate ions or nitrate ions, wherein a content of the chlorine ions is 0.05 μg or less per 1 m3 of the atmosphere, a content of the sulfate ions is 0.1 μg or less per 1 m3 of the atmosphere, and a content of the nitrate ions is 0.7 μg or less per 1 m3 of the atmosphere. 6. A mask blank package, which is obtained by housing a mask blank by a method according to claim 4. 7. A mask blank package according to claim 6, wherein the acid substance in the atmosphere contains chlorine ions, sulfate ions or nitrate ions, wherein a content of the chlorine ions is 0.05 μg or less per 1 m3 of the atmosphere, a content of the sulfate ions is 0.1 μg or less per 1 m3 of the atmosphere, and a content of the nitrate ions is 0.7 μg or less per 1 m3 of the atmosphere. 8. A container which is for housing a mask blank having a chemically amplified resist film in its interior and which at least comprises a container body having an upper opening and a cap member to be put on the container body, comprises a mechanism for inhibiting entry of foreign matters in ambient air into the container, wherein the mechanism has a vent hole formed on the container to allow communication between the ambient air and internal air, and a filtering member formed in the vent hole to remove the foreign matters in the ambient air, wherein the foreign matters in the ambient air is a chemical substance inhibiting a desired chemically amplifying effect in the chemically amplified resist, and wherein the cap member is put on the container body under an atmosphere in which at least an acid substance is removed by a heating treatment or a cleaning treatment to an extent that the chemically amplified resist film is not contaminated. 9. A mask blank package, which is obtained by housing the mask blank in the container according to claim 8. 10. A method of transporting a mask blank package according to claim 9, wherein the mask blank package is transported by the use of traffic means. 11. A container according to claims 1, 2 or 8 wherein the acid substance in the atmosphere contains chlorine ions, sulfate ions or nitrate ions, wherein a content of the chlorine ions is 0.05 μg or less per 1 m3 of the atmosphere, a content of the sulfate ions is 0.1 μg or less per 1 m3 of the atmosphere, and a content of the nitrate ions is 0.7 μor less per 1 m3 of the atmosphere. 12. A container according to claim 8, wherein the chemical substance is an acid substance. 13. A container according to claim 8 or 12, wherein the filtering member is a chemical filter for adsorbing the chemical substance. 14. A container according to claim 8, wherein the filtering member serves to remove the foreign matters only in the ambient air. 15. A method of housing a mask blank having a chemically amplified resist film in a container, wherein the mask blank is housed in the container together with an atmosphere from which at least an acidic substance is removed. 16. A method according to claim 15, comprising the step of: supplying the container with the atmosphere to replace an interior of the container, or purging the container by the atmosphere. 17. A method of housing a mask blank having a chemically amplified resist film in a container, wherein the mask blank is housed in the container under an atmosphere from which at least an acidic substance is removed. 18. A method according to claim 15 or 17, wherein the container has means for absorbing or adsorbing the acidic substance. 19. A method according to claims 10, 15, 14 or 17 wherein the acid substance in the atmosphere contains chlorine ions, sulfate ions or nitrate ions, wherein a content of the chlorine ions is 0.05 μg or less per 1 m3 of the atmosphere, a content of the sulfate ions is 0.1 μg or less per 1 m3 of the atmosphere, and a content of the nitrate ions is 0.7 μg or less per 1 m3 of the atmosphere. 20. A method according to claim 17, comprising the step of: using a chemical filter upon housing the mask blank in the container. 21. A mask blank package, wherein a mask blank having a chemically amplified resist film is housed in a container having an atmosphere which does not contain at least an acidic substance. 22. A mask blank package according to claim 9 or 21 wherein the acid substance in the atmosphere contains chlorine ions, sulfate ions or nitrate ions, wherein a content of the chlorine ions is 0.05 μg or less per 1 m3 of the atmosphere, a content of the sulfate ions is 0.1 μg or less per 1 m3 of the atmosphere, and a content of the nitrate ions is 0.7 μg or less per 1 m3 of the atmosphere.
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