초록 ▼

A sensing apparatus comprises a sensing beam having piezo-resistive components mounted therein that output a signal as a function of a strain on the sensing beam and a main body holding the sensing beam. The sensing beam includes a gasket pattern integrated thereon to create a substantially uniform

A sensing apparatus comprises a sensing beam having piezo-resistive components mounted therein that output a signal as a function of a strain on the sensing beam and a main body holding the sensing beam. The sensing beam includes a gasket pattern integrated thereon to create a substantially uniform interface between the main body and the clamp.

대표청구항 ▼

We claim: 1. A sensing apparatus comprising: a sensing beam having piezo-resistive components mounted thereon that output a signal as a function of a strain on the sensing beam; and a clamp including an upper portion and a lower portion, said sensing beam being disposed between said upper and lower

We claim: 1. A sensing apparatus comprising: a sensing beam having piezo-resistive components mounted thereon that output a signal as a function of a strain on the sensing beam; and a clamp including an upper portion and a lower portion, said sensing beam being disposed between said upper and lower portions of said clamp, wherein said sensing beam includes a gasket pattern integrated on both an upper side and a lower side thereof to create a substantially uniform interface between said upper and lower portions of said clamp and said sensing beam. 2. The sensing apparatus according to claim 1, wherein said sensing beam is cantilever-mounted relative to said main body, such that one portion of said sensing beam is fixed with respect to said main body and a second portion of said sensing beam is deflectable. 3. The sensing apparatus according to claim 2, wherein said piezo-resistive components output a signal representing deflection of a second portion of said sensing beam from a neutral position. 4. The sensing apparatus according to claim 3, wherein the amount said second portion of said sensing beam deflects from the neutral position represents position of a movable member. 5. The sensing apparatus according to claim 4, wherein said movable member is a valve. 6. The sensing apparatus according to claim 1, wherein said sensing beam comprises a metal substrate on which said piezo-resistive components are mounted and glass or ceramic coating said piezo-resistive components. 7. The sensing apparatus according to claim 1, wherein said gasket pattern is formed of a soft metal. 8. The sensing apparatus according to claim 7, wherein said metal is an Au, Pt, Si, Cu, or Ni alloy. 9. The sensing apparatus according to claim 8, wherein said metal is AuPt. 10. The sensing apparatus according to claim 1, wherein said sensing beam includes piezo-resistive components on both an upper surface and a lower surface. 11. The sensing apparatus according to claim 10, wherein said piezo-resistive components form a Wheatstone bridge. 12. The sensing apparatus according to claim 1, wherein said sensing apparatus is a position sensor. 13. The sensing apparatus according to claim 1, wherein said sensing apparatus is a valve position sensor for an aerospace system.