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Pump controller for precision pumping apparatus 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F04B-049/06
  • F04B-049/02
출원번호 US-0051576 (2005-02-04)
등록번호 US-7476087 (2009-01-13)
발명자 / 주소
  • Zagars,Raymond A.
  • McLoughlin,Robert F.
출원인 / 주소
  • Entegris, Inc.
대리인 / 주소
    Sprinkle IP Law Group
인용정보 피인용 횟수 : 32  인용 특허 : 87

초록

A pump controller and pump controlling method for dispensing a precise amount of low viscosity fluid are provided in which the problems of double dispenses and stuttered dispenses are avoided. In particular, the timing of the valves and motors in the pumping apparatus are adjusted to avoid these pro

대표청구항

What is claimed is: 1. A pump for dispensing fluid, comprising: a multistage pump having a feed chamber and a dispensation chamber therein connected through a series of valves and motors configured to draw fluid within the respective chambers and to dispense the fluid from the pump; a fluid reservo

이 특허에 인용된 특허 (87)

  1. Kingsford, Kenji A.; Fregoso, Mario; Savard, Raymond T., Anti-pumping dispense valve.
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  34. Turk, Victor J., Fluid fitting.
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  36. Kingsford Kenji A. (Devore CA) Martinez David R. (Corona CA), Fluid transport coupling.
  37. Kelly Samuel T. ; Dewey ; Jr. Robert G., Fuel control device and methods of making the same.
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  39. Davis, David Lyle, Infusion device with disposable elements.
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  41. Bowers William F. (Topsfield MA) Hunt Stephen G. (N. Billerica MA), Integrated system for filtering and dispensing fluid having fill, dispense and bubble purge strokes.
  42. Zdeblick Mark (Mountain View CA), Integrated, microminiature electric to fluidic valve.
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  58. Frenz, Thomas; Bochum, Hansjoerg, Method and device for diagnosing of a fuel supply system.
  59. Kuo, Chang; Kashkoush, Ismail; Yialamas, Nick; Skibinski, Gregory, Method and system for chemical injection in silicon wafer processing.
  60. Zdeblick Mark (Mountain View CA), Method of making an integrated, microminiature electric-to-fluidic valve.
  61. Kobayashi Shozaburo (Takarazuka JPX), Method of mixing fuel oils.
  62. Pelc, Richard E.; Chibucos, Nicholas S.; Papen, Roeland F.; Meyer, Wilhelm, Microvolume liquid handling system.
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  64. Schrimpf ; Carl F. ; Van Rens ; Russel J., Multistage fluid-actuated diaphragm pump with amplified suction capability.
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  70. Hiraku,Kenji; Takao,Kunihiko; Kaji,Hironori; Ito,Masahito, Pump for liquid chromatography.
  71. Bolt Erwin,CHX, Pump with reduced clamping pressure effect on flap valve.
  72. Kottke, William Curtis, Reciprocating pumps with linear motor driver.
  73. Amada Haruo (Kamisato JPX) Kojima Akihiro (Kasugai JPX) Kagohashi Hiroshi (Kasugai JPX) Sakai Atsuyuki (Nagoya JPX) Shimura Katsumasa (Nagoya JPX) Maekawa Hisamitsu (Kasugai JPX), Spin coating apparatus.
  74. Hillery Frank E. (Cypress CA) Goy Christel C. (Hacienda Heights CA), Spring seal.
  75. Glanville Robert W., Static mixer.
  76. Tano Terukuni (Tokyo JPX), Suck-back pump.
  77. Grohn, Ossi Ilari, System and method for transmitting control information between a control unit and at least one sub-unit.
  78. Nikirk Chris T. (Houston TX) Seidel Francis L. (Houston TX), Tandem seal gasket assembly.
  79. Henager ; Jr. Charles H. (Kennewick WA) Knoll Robert W. (Menomonee Falls WI), Thick, low-stress films, and coated substrates formed therefrom.
  80. Kingsford Kenji (Devore CA), Three-way poppet valve apparatus.
  81. Peterson Ivan H. (Hamilton OH) Hoelle James S. (Hamilton OH) Wakeman Thomas G. (Laurenceburg IN), Tube coupling assembly.
  82. Kurita Muneyasu,JPX ; Kuwabara Fukuji,JPX, Tube pump with flexible tube diaphragm.
  83. Clements George W. (Minnetonka MN), Two-component metering pump.
  84. Houldsworth John ; Field ; Jr. Joseph Ingram ; Cox Geoffrey Bollinger, Two-way, two-wire analog/digital communication system.
  85. Handler Michael D. (Brookfield CT), Vacuum actuated sheath valve.
  86. Ota Masaki,JPX ; Murase Muneharu,JPX ; Fukanuma Tetsuhiko,JPX ; Ohyama Katsuya,JPX, Variable displacement compressor.
  87. Haugli Hans-Christian,CAX ; Seed William Robert,CAX, Wireless packet data distributed communications system.

이 특허를 인용한 특허 (32)

  1. Manzarek, Donovan K.; Vines, John C.; Laessle, John, Apparatus and method for the remote monitoring, viewing and control of a semiconductor process tool.
  2. Cedrone, James; Gonnella, George, Error volume system and method for a pump.
  3. Cedrone, James; McLoughlin, Robert F.; Gonnella, George, I/O systems, methods and devices for interfacing a pump controller.
  4. Cedrone, James; McLoughlin, Robert F.; Gonnella, George, I/O systems, methods and devices for interfacing a pump controller.
  5. Magoon, Paul J.; Ramirez, Raul A.; Batchelder, Traci L., Method and system for controlling operation of a pump based on filter information in a filter information tag.
  6. Magoon, Paul J.; Ramirez, Raul A.; Batchelder, Traci L., Method and system for controlling operation of a pump based on filter information in a filter information tag.
  7. Cedrone, James; Gonnella, George; Gashgaee, Iraj; Stankowski, Ralph J., Method and system for high viscosity pump.
  8. Magoon, Paul J.; Ramirez, Raul A.; Braggin, Jennifer M., Method and system for optimizing operation of a pump.
  9. Braggin, Jennifer M.; Inui, Shiho; Chow, Wailup; Wu, Aiwen, Method and system for pump priming.
  10. Laessle, John; Vines, John; Kidd, Brian, Precision pump having multiple heads and using an actuation fluid to pump one or more different process fluids.
  11. Laessle, John; Vines, John; Kidd, Brian, Precision pump with multiple heads.
  12. Savard, Raymond T.; Gray, Greg; Laessle, John, Precision pump with multiple heads.
  13. Vines, John C.; Laessle, John, Pump having an automated gas removal and fluid recovery system and method.
  14. Vines, John C.; Laessle, John, Pump having an automated gas removal and fluid recovery system and method using a gas removal reservoir having an internal partition.
  15. Vines, John C.; Laessle, John, Pump system and method having a quick change motor drive.
  16. Cedrone, James; Gonnella, George; Gashgaee, Iraj, System and method for a pump with onboard electronics.
  17. Cedrone, James; Gonnella, George; Gashgaee, Iraj, System and method for a pump with reduced form factor.
  18. Cedrone, James; Gonnella, George; Gashgaee, Iraj, System and method for a pump with reduced form factor.
  19. Laverdiere, Marc; Cedrone, James; Gonnella, George; Gashgaee, Iraj; Magoon, Paul; King, Timothy J., System and method for a variable home position dispense system.
  20. Laverdiere, Marc; Cedrone, James; Gonnella, George; Gashgaee, Iraj; Magoon, Paul; King, Timothy J., System and method for a variable home position dispense system.
  21. Gonnella, George; Cedrone, James, System and method for control of fluid pressure.
  22. Cedrone, James; Gonnella, George; Zagars, Raymond A.; McLoughlin, Robert F., System and method for correcting for pressure variations using a motor.
  23. Gonnella, George L.; Cedrone, James, System and method for monitoring operation of a pump.
  24. Gonnella, George; Cedrone, James, System and method for monitoring operation of a pump.
  25. Magoon, Paul; Gonnella, George; Cedrone, James, System and method for operation of a pump.
  26. Gonnella, George; Cedrone, James; Gashgaee, Iraj, System and method for position control of a mechanical piston in a pump.
  27. Gonnella, George; Cedrone, James; Gashgaee, Iraj, System and method for position control of a mechanical piston in a pump.
  28. Cedrone, James; Gonnella, George, System and method for pressure compensation in a pump.
  29. Cedrone, James; Gonnella, George L., System and method for pressure compensation in a pump.
  30. Cedrone, James; Gonnella, George L., System and method for pressure compensation in a pump.
  31. Gonnella, George; Cedrone, James; Gashgaee, Iraj; Magoon, Paul, System and method for valve sequencing in a pump.
  32. Laverdiere, Marc; Cedrone, James; Gonnella, George; Gashgaee, Iraj; Magoon, Paul; King, Timothy J., System and method for variable dispense position.
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