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Method for measurement of weight during a CVI/CVD process 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C23C-016/26
  • G01G-019/00
출원번호 US-0698227 (2007-01-25)
등록번호 US-7476419 (2009-01-13)
발명자 / 주소
  • Rudolph,James W.
  • Daws,David E.
  • Zeigler,Dary
  • Bazshushtari,Afshin
출원인 / 주소
  • Goodrich Corporation
대리인 / 주소
    Brinks Hofer Gilson and Lione
인용정보 피인용 횟수 : 5  인용 특허 : 47

초록

A method of chemical vapor infiltration and deposition includes stacking a number of porous structures in a stack in a furnace. The stack has a center opening region extending through the porous structures and an outer region extending along the porous structures. A first portion of a reactant gas

대표청구항

What is claimed is: 1. A method of chemical vapor infiltration and deposition, comprising stacking a number of porous structures in a stack in a furnace, wherein the stack has a center opening region extending through the porous structures and an outer region extending along the porous structures;

이 특허에 인용된 특허 (47)

  1. Ishihara Shunichi (Ebina JPX) Hanna Jun-ichi (Yokohama JPX) Shimizu Isamu (Yokohama JPX) Hirooka Masaaki (Toride JPX), Apparatus for forming deposited film.
  2. Drowley Clifford I. (Phoenix AZ) Turner John E. (Woodside CA), Apparatus for forming shallow electrical junctions.
  3. Vaudel Serge (Teuillac FRX), Apparatus for preheating a flow of gas in an installation for chemical vapor infiltration, and a densification method us.
  4. Higashiyama Kazutoshi (Hitachi) Ushida Takahisa (Nagoya) Hirabayashi Izumi (Nagoya) Tanaka Shoji (Tokyo JPX), Apparatus for producing superconducting oxide film.
  5. Rudolph James W. (Colorado Springs CO) Purdy Mark J. (Akron OH) Bok Lowell D. (Anna OH), Apparatus for use with CVI/CVD processes.
  6. Rudolph James W. ; Purdy Mark J. ; Bok Lowell D., Apparatus for use with CVI/CVD processes.
  7. Fisher Ronald (Rugby GB2) Smith Norman (Rugby GB2), Apparatus for vapor deposition on tubular substrate.
  8. Chareire Jean-Louis (Levallois-Perret FRX) Dupupet Guy (Ermont FRX), Brake disc of carbon-carbon composite material.
  9. Caputo Anthony J. (Knoxville TN) Devore Charles E. (Knoxville TN) Lowden Richard A. (Powell TN) Moeller Helen H. (Concord VA), CVD apparatus and process for the preparation of fiber-reinforced ceramic composites.
  10. Miyazaki Shinji (Yokohama JPX), Chemical vapor growth apparatus having an exhaust device including trap.
  11. Gallagher, Emerson Richard; Fong, Paul Po Hang; Clemens, Oliver; Thumm, Horst; Brown, David, Control process for impregnating porous parts and apparatus therefor.
  12. Delperier, Bernard; Domblides, Jean-Luc; Richard, Jean-Philippe; Delaurens, Pierre, Densifying hollow porous substrates by chemical vapor infiltration.
  13. Kanai Masahiro (Tokyo JPX) Hirooka Masaaki (Toride JPX) Hanna Junichi (Yokohama JPX) Shimizu Isamu (Yokohama JPX) Takeuchi Eiji (Yokohama JPX), Device for forming a deposited film.
  14. Laxman Murugesh ; Padmanaban Krishnaraj ; Michael Cox ; Canfeng Lai ; Narendra Dubey ; Tom K. Cho ; Sudhir Ram Gondhalekar ; Lily L. Pang, Directing a flow of gas in a substrate processing chamber.
  15. Yano Shozo (Uji JPX) Hujinaga Yasuhiro (Kitaenmachi JPX) Kawara Toshio (Kyoto JPX) Komoto Akira (Otsu JPX), Electronic balance.
  16. Spoor Martin (Cambridge MA), Erasable-foil-resistance compensation of strain gage transducers.
  17. Bauer Dieter W. (Whittier CA), Fiber reinforced composite product.
  18. Weaver John Victor (Water Orton EN) Fisher Ronald (Hillmorton Rugby EN), Friction member.
  19. Goldman Jon C. (Orange CA) Rappaport Robert E. (Westminster CA), Gas control system for chemical vapor deposition system.
  20. Sion, Eric; Baudry, Yvan, Gas preheater and process for controlling distribution of preheated reactive gas in a CVI furnace for densification of porous annular substrates.
  21. Stauffer Craig M. (3066 Scott Blvd. Santa Clara CA 95054), Integrated delivery system for chemical vapor from non-gaseous sources for semiconductor processing.
  22. Swartzendruber Ray E. (Syracuse IN), Load cell and control for bulk bin.
  23. Sion, Eric; Baudry, Yvan; Delperier, Bernard, Method for densifying porous substrates by chemical vapour infiltration with preheated gas.
  24. Golecki Ilan ; Narasimham Dave, Method for measuring the depositions, densification of etching rate of an electrically conductive body.
  25. Fisher Ronald (Rugby GB2) Smith Norman (Rugby GB2), Method for the production of carbon/carbon composite material.
  26. Bernard Bruno C. (Eusines FRX) Brosse Christian B. (Le Haillan FRX) Cavalier Jean-Claude (Le Pian Medoc FRX), Method of densifying a porous substrate by means of a matrix containing carbon.
  27. Golecki Ilan (Parsippany NJ) Morris Robert C. (Ledgewood NJ) Narasimhan Dave (Flemington NJ), Method of rapidly densifying a porous structure.
  28. Fujii Atsuhiro (Itami JPX), Method of treating a substrate wherein the flow rates of the treatment gases are equal.
  29. Besen Matthew M. (Tewksbury MA) Sevillano Evelio (Lexington MA) Smith Donald K. (Arlington MA), Microwave plasma reactor.
  30. Harris Robert G. (Montreal CAX), Microwave, a closed vessel and methods of determining volatile material content.
  31. Nishikawa Yukinobu (Tokyo JPX) Hashizume Yoshinori (Tokyo JPX) Kimura Takako (Tokyo JPX), Mixed gas supply system with a backup supply system.
  32. Yoshida Hiroshi (Ichinomiya JPX) Noguchi Takeki (Aichi JPX) Ichikawa Masahiko (Okazaki JPX) Nakane Takemi (Hiroshima JPX) Kubo Kyoji (Hiroshima JPX) Kinoshita Kenichiro (Tokyo JPX), Moisture content measuring system.
  33. Poris Jaime (Los Gatos CA), Precision weighing to monitor the thickness and uniformity of deposited or etched thin film.
  34. Rudolph,James W.; Perea,Paul T.; Linck,John S.; Kirkpatrick,Chris T.; Jones,Richard, Pressure gradient CVI/CVD apparatus and method.
  35. Rudolph James W. ; Purdy Mark J., Pressure gradient CVI/CVD apparatus process and product.
  36. Purdy Mark J. ; Rudolph James W., Pressure gradient CVI/CVD apparatus, process and product.
  37. Rudolph James W. ; Purdy Mark J., Pressure gradient CVI/CVD apparatus, process and product.
  38. Purdy, Mark J.; Rudolph, James W.; Bok, Lowell D., Pressure gradient CVI/CVD process.
  39. Okamura Ryuji (Shiga JPX) Otoshi Hirokazu (Nagahama JPX) Takei Tetsuya (Nagahama JPX), Process and apparatus for microwave plasma chemical vapor deposition.
  40. Lackey ; Jr. Walter J. (Oak Ridge TN) Caputo Anthony J. (Knoxville TN), Process for the preparation of fiber-reinforced ceramic composites by chemical vapor deposition.
  41. Maeda Kazuo (Tokyo JPX) Ohira Kouichi (Tokyo JPX) Hirose Mitsuo (Tokyo JPX), Semiconductor fabrication equipment.
  42. Knutson Paul L. ; Oldham Danny R. ; Desatnik Nathan, Thermal jacket for pressurized containers.
  43. Porter Cole D. (San Jose CA) Sanchez Jessie R. (San Jose CA) Kowalski Jeffrey M. (San Jose CA), Thermal processing apparatus and process.
  44. Fisher Ronald (Rugby GB2) Fennell Thomas G. (Coventry GB2) Evans Maurice J. (Lichfield GB2), Toughened carbon composite brake discs.
  45. Christin Fran.cedilla.ois,FRX ; Daubigny Pierre,FRX ; Delaurens Pierre,FRX ; Leluan Jean-Luc,FRX, Vapour phase chemical infiltration process for densifying porous substrates disposed in annular stacks.
  46. Anderson Roger N. (San Jose CA) Lindstrom Paul R. (Aptos CA) Johnson Wayne (Phoenix AZ), Variable rate distribution gas flow reaction chamber.
  47. Piroozmandi Farid, Zero height load measuring system and method of installing same.

이 특허를 인용한 특허 (5)

  1. Lamouroux, Franck; Bertrand, Sébastien; Goujard, Stéphane; Caillaud, Alain; Bagilet, Francis; Mazereau, Stéphane, Method of densifying thin porous substrates by chemical vapor infiltration, and a loading device for such substrates.
  2. Lamouroux, Franck; Bertrand, Sébastien; Goujard, Stéphane; Caillaud, Alain; Bagilet, Francis; Mazereau, Stéphane, Method of densifying thin porous substrates by chemical vapor infiltration, and a loading device for such substrates.
  3. Ikejiri, Takashi, Surface treatment apparatus and surface treatment method.
  4. Sung, Su-Jen, Systems and methods for uniform gas flow in a deposition chamber.
  5. Lay, Eddy; Tseng, Shih-Min; Wu, Sheng-Wei; Chen, Jen-Chung; Chen, Shih-Fang, Vertical furnace for improving wafer uniformity.
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