A deformable reflector includes a plurality of MEMS devices, each having an electrode membrane having a reflective surface thereon, a flat surface, and a pulldown electrode formed in the flat substrate. The electrode membrane has substantially a same flatness of the flat substrate when the electrode
A deformable reflector includes a plurality of MEMS devices, each having an electrode membrane having a reflective surface thereon, a flat surface, and a pulldown electrode formed in the flat substrate. The electrode membrane has substantially a same flatness of the flat substrate when the electrode membrane comes into contact with the flat substrate across a majority of its surface area in response to a voltage being applied to the pulldown electrode. The electrode membrane has a two-dimensional curvature when no voltage is applied to the pulldown electrode.
대표청구항▼
What is claimed is: 1. A retroreflector, comprising: a first non-deformable mirror to provide reflection of light back to a source thereof; and a deformable mirror having a first state to provide reflection of light back to the source thereof and a second state to provide misdirection of light to p
What is claimed is: 1. A retroreflector, comprising: a first non-deformable mirror to provide reflection of light back to a source thereof; and a deformable mirror having a first state to provide reflection of light back to the source thereof and a second state to provide misdirection of light to prevent the reflection of light back to the source thereof; said deformable mirror including a plurality of MEMS devices, each having a reflective surface thereon, such that when said deformable mirror is in the first state, each reflective surface is in a first position to form a reflective surface that provides reflection of light back to the source thereof; said plurality of MEMS devices each including, a substrate, a flexible membrane attached at least one end to a surface of the substrate and having said reflective surface thereon, said flexible membrane having a movable portion, said flexible membrane being configured such that, in a first state, said movable portion of said flexible membrane is disposed to form a reflective surface that provides reflection of light back to the source thereof; and, in a second state, said movable portion of said flexible membrane is disposed to form a reflective surface that scatters light to prevent the reflection of light back to the source thereof, an electrode to cause said movable portion of said flexible membrane to flatten so as to be in the first state, and a plurality of dimples formed on said movable portion of said flexible membrane such that when said movable portion of said flexible membrane is in the first state, the dimples formed on said movable portion of said flexible membrane contact the substrate, said plurality of dimples forming a non co-linear pattern. 2. The retroreflector as claimed in claim 1, wherein when said deformable mirror is in the second state, each reflective surface is in a second position to form a reflective surface that misdirects light to prevent the reflection of light back to the source thereof. 3. The retroreflector as claimed in claim 2, wherein said reflective surfaces of said deformable mirror varying between said first and second positions to modulate the light being reflected back to the source thereof so as to create a serial pattern of light pulses representing encoded information. 4. The retroreflector as claimed in claim 1, further comprising: a second non-deformable mirror to provide reflection of light back to a source thereof; said first non-deformable mirror, said second non-deformable mirror, and said deformable mirror forming a modulated corner cube retroreflector. 5. The retroreflector as claimed in claim 1, wherein each flexible membrane has substantially a same flatness of said flat substrate when said flexible membrane comes into contact with said flat substrate across a majority of its surface area in response to a voltage being applied to a pulldown electrode formed in said flat substrate; said flexible membrane having a two-dimensional curvature when no voltage is applied to an electrode formed in said flat substrate. 6. The retroreflector as claimed in claim 5, wherein said flexible membrane being in contact with said flat substrate when no voltage is applied to said pulldown electrode formed in said flat substrate. 7. The retroreflector as claimed in claim 5, wherein said flexible membrane being in contact with said flat substrate along an edge of said flexible membrane when no voltage is applied to said pulldown electrode formed in said flat substrate. 8. The retroreflector as claimed in claim 5, wherein each flexible membrane is individually addressable such that each flexible membrane has associated therewith an individual pulldown electrode so that each flexible membrane may have a state different from an adjacent flexible membrane. 9. The retroreflector as claimed in claim 5, wherein all the flexible membranes have a common pulldown electrode associated therewith so that all the flexible membranes are electrically ganged together. 10. The retroreflector as claimed in claim 5, wherein said pulldown electrode is located under a center of an associated flexible membrane. 11. The retroreflector as claimed in claim 5, wherein an edge of said flexible membrane, being in contact with said flat substrate, having slits therein to make said flexible membrane more flexible at said edge. 12. The retroreflector as claimed in claim 5, wherein an edge of said flexible membrane, being in contact with said flat substrate, having cutaway sections therein to make said flexible membrane more flexible at said edge. 13. The retroreflector as claimed in claim 5, wherein said pulldown electrode is segmented. 14. The retroreflector as claimed in claim 5, wherein said pulldown electrode is segmented to reduce capacitance and energy. 15. The retroreflector as claimed in claim 1, wherein said plurality of addressable MEMS devices are individually addressable such that when the individually addressable MEMS device is in a first state, the reflective surface thereof is in a first position to form a reflective surface that provides reflection of a portion of the light back to the source thereof. 16. The retroreflector as claimed in claim 15, wherein when the individually addressable MEMS device is in the second state to scatter a portion of the light to prevent the reflection of a portion of the light back to the source thereof. 17. The retroreflector as claimed in claim 16, wherein said individual reflective surfaces of said deformable mirror individually varying between said first and second positions to modulate the light being reflected back to the source thereof so as to create a parallel pattern of light pulses representing encoded information. 18. The retroreflector as claimed in claim 1, wherein said plurality of individually addressable MEMS devices are individually addressable such that when all of the individually addressable MEMS devices are in a first state, the reflective surface thereof is in a first position to form a reflective surface, the reflective surfaces of all the individually addressable MEMS device being in the same plane so as to provide reflection of the light back to the source thereof. 19. The retroreflector as claimed in claim 18, wherein when all of the individually addressable MEMS devices are in the second state, the reflective surface thereof is in a second position so as to scatter the light to prevent the reflection of the light back to the source thereof. 20. The retroreflector as claimed in claim 19, wherein said individual reflective surfaces of said deformable mirror individually varying between said first and second positions to modulate the light being reflected back to the source thereof so as to create a serial pattern of light pulses representing encoded information. 21. The retroreflector as claimed in claim 1, further comprising: a light absorbing material; said deformable mirror, when in the second state, misdirecting light to said light absorbing material to prevent the reflection of light back to the source thereof. 22. A retroreflector, comprising: a first non-deformable mirror to provide reflection of light back to a source thereof; and a deformable mirror having a first state to provide reflection of light back to the source thereof and a second state to provide misdirection of light to prevent the reflection of light back to the source thereof; said deformable mirror including a plurality of MEMS devices, each having a reflective surface thereon, such that when said deformable mirror is in the first state, each reflective surface is in a first position to form a reflective surface that provides reflection of light back to the source thereof; said plurality of MEMS devices each including, a substrate, a flexible membrane attached at least one end to a surface of the substrate and having said reflective surface thereon, said flexible membrane having a movable portion, said flexible membrane being configured such that, in a first state, said movable portion of said flexible membrane is disposed to form a reflective surface that provides reflection of light back to the source thereof, and, in a second state, said movable portion of said flexible membrane is disposed to form a reflective surface that scatters light to prevent the reflection of light back to the source thereof, an electrode to cause said movable portion of said flexible membrane to flatten so as to be in the first state, and a plurality of posts projections formed on the substrate in a predetermined pattern, said predetermined pattern of posts providing a surface to which said movable portion of said flexible membrane is substantially flattened when said movable portion of said flexible membrane is in the first state, said predetermined pattern of posts formed on the substrate contact said movable portion of said flexible membrane, said predetermined pattern of posts being a non co-linear pattern. 23. The retroreflector as claimed in claim 22, wherein when said deformable mirror is in the second state, each reflective surface is in a second position to form a reflective surface that misdirects light to prevent the reflection of light back to the source thereof. 24. The retroreflector as claimed in claim 23, wherein said reflective surfaces of said deformable mirror varying between said first and second positions to modulate the light being reflected back to the source thereof so as to create a serial pattern of light pulses representing encoded information. 25. The retroreflector as claimed in claim 22, further comprising: a second non-deformable mirror to provide reflection of light back to a source thereof; said first non-deformable mirror, said second non-deformable mirror, and said deformable mirror forming a modulated corner cube retroreflector. 26. The retroreflector as claimed in claim 22, wherein each flexible membrane has substantially a same flatness of said flat substrate when said flexible membrane comes into contact with said flat substrate across a majority of its surface area in response to a voltage being applied to a pulldown electrode formed in said flat substrate; said flexible membrane having a two-dimensional curvature when no voltage is applied to an electrode formed in said flat substrate. 27. The retroreflector as claimed in claim 26, wherein said flexible membrane being in contact with said flat substrate when no voltage is applied to said pulldown electrode formed in said flat substrate. 28. The retroreflector as claimed in claim 26, wherein said flexible membrane being in contact with said flat substrate along an edge of said flexible membrane when no voltage is applied to said pulldown electrode formed in said flat substrate. 29. The retroreflector as claimed in claim 26, wherein each flexible membrane is individually addressable such that each flexible membrane has associated therewith an individual pulldown electrode so that each flexible membrane may have a state different from an adjacent flexible membrane. 30. The retroreflector as claimed in claim 26, wherein all the flexible membranes have a common pulldown electrode associated therewith so that all the flexible membranes are electrically ganged together. 31. The retroreflector as claimed in claim 26, wherein said pulldown electrode is located under a center of an associated flexible membrane. 32. The retroreflector as claimed in claim 26, wherein an edge of said flexible membrane, being in contact with said flat substrate, having slits therein to make said flexible membrane more flexible at said edge. 33. The retroreflector as claimed in claim 26, wherein an edge of said flexible membrane, being in contact with said flat substrate, having cutaway sections therein to make said flexible membrane more flexible at said edge. 34. The retroreflector as claimed in claim 26, wherein said pulldown electrode is segmented. 35. The retroreflector as claimed in claim 26, wherein said pulldown electrode is segmented to reduce capacitance and energy. 36. The retroreflector as claimed in claim 22, wherein said plurality of addressable MEMS devices are individually addressable such that when the individually addressable MEMS device is in a first state, the reflective surface thereof is in a first position to form a reflective surface that provides reflection of a portion of the light back to the source thereof. 37. The retroreflector as claimed in claim 36, wherein when the individually addressable MEMS device is in the second state to scatter a portion of the light to prevent the reflection of a portion of the light back to the source thereof. 38. The retroreflector as claimed in claim 37, wherein said individual reflective surfaces of said deformable mirror individually varying between said first and second positions to modulate the light being reflected back to the source thereof so as to create a parallel pattern of light pulses representing encoded information. 39. The retroreflector as claimed in claim 22, wherein said plurality of individually addressable MEMS devices are individually addressable such that when all of the individually addressable MEMS devices are in a first state, the reflective surface thereof is in a first position to form a reflective surface, the reflective surfaces of all the individually addressable MEMS device being in the same plane so as to provide reflection of the light back to the source thereof. 40. The retroreflector as claimed in claim 39, wherein when all of the individually addressable MEMS devices are in the second state, the reflective surface thereof is in a second position so as to scatter the light to prevent the reflection of the light back to the source thereof. 41. The retroreflector as claimed in claim 40, wherein said individual reflective surfaces of said deformable mirror individually varying between said first and second positions to modulate the light being reflected back to the source thereof so as to create a serial pattern of light pulses representing encoded information. 42. The retroreflector as claimed in claim 22, further comprising: a light absorbing material; said deformable mirror, when in the second state, misdirecting light to said light absorbing material to prevent the reflection of light back to the source thereof. 43. A passive interrogatable sensor for being interrogated by an interrogation source using interrogation light, comprising: a sensing device to sense a predetermined condition of a surrounding environment and generate signals representative of the sensed predetermined condition, the predetermined condition being independent of the interrogation light; a controller to process the generated signals and to produce drive signals in response thereof; a first non-deformable mirror to provide reflection of the interrogation light; and a deformable mirror, operatively connected to said controller, being driven to either a first state or a second state in response to drive signals from said controller, said first state providing reflection of the interrogation light, said second state providing misdirection of light to prevent the reflection of the interrogation light. 44. The passive interrogatable sensor as claimed in claim 43, wherein said deformable mirror comprises a plurality of MEMS devices, each having a reflective surface thereon, such that when said deformable mirror is driven to said first state, each reflective surface is in a first position to form a reflective surface that provides reflection of the interrogation light. 45. The passive interrogatable sensor as claimed in claim 44, wherein when said deformable mirror is driven to said second state, each reflective surface is in a second position to misdirect light to prevent the reflection of the interrogation light. 46. The passive interrogatable sensor as claimed in claim 45, wherein said reflective surfaces of said deformable mirror varying between said first and second positions to modulate the interrogation light being reflected so as to create a serial pattern of light pulses representing encoded information. 47. The passive interrogatable sensor as claimed in claim 44, wherein each MEMS device comprises: a substrate; a flexible membrane attached at least one end to a surface of the substrate and having said reflective surface thereon, the flexible membrane being configured such that, in a first state, said flexible membrane is disposed to form a reflective surface that provides reflection of the interrogation light, and, in a second state, said flexible membrane is disposed to form a reflective surface that scatters light to prevent the reflection of the interrogation light; and a plurality of dimples formed on the flexible membrane such that when the flexible membrane is in the first state, the flexible membrane contacts the substrate at the dimples. 48. The passive interrogatable sensor as claimed in claim 44, wherein each MEMS device comprises: a substrate; a flexible membrane attached at least one end to a surface of the substrate and having said reflective surface thereon, the flexible membrane being configured such that, in a first state, said flexible membrane is disposed to form a reflective surface that provides reflection of the interrogation light, and, in a second state, said flexible membrane is disposed to form a reflective surface that scatters light to prevent the reflection of the interrogation light; and a plurality of posts formed on the substrate such that when the flexible membrane is in the first state, the posts formed on the substrate contact the flexible membrane. 49. The passive interrogatable sensor as claimed in claim 43, further comprising: a second non-deformable mirror to provide reflection of the interrogation light being reflected; said first non-deformable mirror, said second non-deformable mirror, and said deformable mirror forming a modulated corner cube retroreflector. 50. The passive interrogatable sensor as claimed in claim 43, wherein said deformable mirror comprises a plurality of MEMS devices, each having an electrode membrane having a reflective surface thereon; said electrode membrane having substantially a same flatness of said flat substrate when said electrode membrane comes into contact with said flat substrate across a majority of its surface area in response to a voltage being applied to a pulldown electrode formed in said flat substrate; said electrode membrane having a two-dimensional curvature when no voltage is applied to an electrode formed in said flat substrate. 51. The passive interrogatable sensor as claimed in claim 50, wherein said electrode membrane being in contact with said flat substrate at two points when no voltage is applied to said pulldown electrode formed in said flat substrate. 52. The passive interrogatable sensor as claimed in claim 50, wherein said electrode membrane being in contact with said flat substrate along an edge of said electrode membrane when no voltage is applied to said pulldown electrode formed in said flat substrate. 53. The passive interrogatable sensor as claimed in claim 50, wherein each electrode membrane is individually addressable such that each electrode membrane has associated therewith an individual pulldown electrode so that each electrode membrane may have a state different from an adjacent electrode membrane. 54. The passive interrogatable sensor as claimed in claim 50, wherein all the electrode membranes have a common pulldown electrode associated therewith so that all the electrode membranes are electrically ganged together. 55. The passive interrogatable sensor as claimed in claim 50, wherein said pulldown electrode is located under a center of an associated electrode membrane. 56. The passive interrogatable sensor as claimed in claim 50, wherein an edge of said electrode membrane, being in contact with said flat substrate, having slits therein to make said electrode membrane more flexible at said edge. 57. The passive interrogatable sensor as claimed in claim 50, wherein an edge of said electrode membrane, being in contact with said flat substrate, having cutaway sections therein to make said electrode membrane more flexible at said edge. 58. The passive interrogatable sensor as claimed in claim 50, wherein said pulldown electrode is segmented. 59. The passive interrogatable sensor as claimed in claim 50, wherein said pulldown electrode is segmented so that a greater electrostatic force is realized at a center of an associated electrode membrane. 60. The passive interrogatable sensor as claimed in claim 43, wherein said deformable mirror comprises a plurality of individually addressable MEMS devices, each having a reflective surface thereon, such that when the individually addressable MEMS device is in a first state, the reflective surface thereof is in a first position to form a reflective surface that provides reflection of a portion of the interrogation light. 61. The passive interrogatable sensor as claimed in claim 60, wherein when the individually addressable MEMS device is in the second state, the reflective surface thereof is in a second position to scatter a portion of the light to prevent the reflection of a portion of the interrogation light. 62. The passive interrogatable sensor as claimed in claim 61, wherein said individual reflective surfaces of said deformable mirror individually varying between said first and second positions to modulate the interrogation light being reflected so as to create a parallel pattern of light pulses representing encoded information. 63. The passive interrogatable sensor as claimed in claim 43, wherein said deformable mirror comprises a plurality of individually addressable MEMS devices, each having a reflective surface thereon, such that when all of the individually addressable MEMS devices are in a first state, the reflective surface thereof is in a first position to form a reflective surface, the reflective surfaces of all the individually addressable MEMS device being in the same plane so as to provide reflection of the interrogation light. 64. The passive interrogatable sensor as claimed in claim 63, wherein when all of the individually addressable MEMS devices are in the second state, the reflective surface thereof is in a second position so as to scatter the light to prevent the reflection of the interrogation light. 65. The passive interrogatable sensor as claimed in claim 64, wherein said individual reflective surfaces of said deformable mirror individually varying between said first and second positions to modulate the interrogation light being reflected so as to create a serial pattern of light pulses representing encoded information. 66. The passive interrogatable sensor as claimed in claim 43, further comprising: a light absorbing material; said deformable mirror, when in the second state, misdirecting light to said light absorbing material to prevent the reflection of the interrogation light. 67. An optical identification system, comprising: a laser source, disposed remotely from an object to be interrogated, for transmitting an unmodulated beam toward the object to be interrogated; a controller, disposed with the object to be interrogated, to produce drive signals associated with identification information; a first non-deformable mirror, disposed with the object to be interrogated, to provide reflection of light back to said laser source; a deformable mirror, disposed with the object to be interrogated and operatively connected to said controller, being driven to either a first state or a second state in response to drive signals from said controller, said first state providing reflection of light back to said laser source, said second state providing misdirection of light to prevent the reflection of light back to said laser source; said deformable mirror modulating the light to be reflected back to the laser source so as to encode identification information as reflected modulated light; and a detector, disposed with said laser source, to decode identification information from light received from said deformable mirror disposed with the object to be interrogated. 68. The optical identification system as claimed in claim 67, wherein said deformable mirror comprises a plurality of MEMS devices, each having a reflective surface thereon, such that when said deformable mirror is driven to the first state, each reflective surface is in a first position to form a reflective surface that provides reflection of light back to said laser source. 69. The optical identification system as claimed in claim 68, wherein when said deformable mirror is driven to the second state, each reflective surface is in a second position to misdirect light to prevent the reflection of light back to said laser source. 70. The optical identification system as claimed in claim 69, wherein said reflective surfaces of said deformable mirror varying between said first and second positions to modulate the light being reflected back to said laser source so as to create a serial pattern of light pulses representing encoded identification information. 71. The optical identification system as claimed in claim 69, wherein said deformable mirror comprises a plurality of MEMS devices, each having an electrode membrane having a reflective surface thereon; said electrode membrane having substantially a same flatness of said flat substrate when said electrode membrane comes into contact with said flat substrate across a majority of its surface area in response to a voltage being applied to a pulldown electrode formed in said flat substrate; said electrode membrane having a two-dimensional curvature when no voltage is applied to an electrode formed in said flat substrate. 72. The optical identification system as claimed in claim 71, wherein said electrode membrane being in contact with said flat substrate at two points when no voltage is applied to said pulldown electrode formed in said flat substrate. 73. The optical identification system as claimed in claim 71, wherein said electrode membrane being in contact with said flat substrate along an edge of said electrode membrane when no voltage is applied to said pulldown electrode formed in said flat substrate. 74. The optical identification system as claimed in claim 71, wherein each electrode membrane is individually addressable such that each electrode membrane has associated therewith an individual pulldown electrode so that each electrode membrane may have a state different from an adjacent electrode membrane. 75. The optical identification system as claimed in claim 71, wherein all the electrode membranes have a common pulldown electrode associated therewith so that all the electrode membranes are electrically ganged together. 76. The optical identification system as claimed in claim 71, wherein said pulldown electrode is located under a center of an associated electrode membrane. 77. The optical identification system as claimed in claim 71, wherein an edge of said electrode membrane, being in contact with said flat substrate, having slits therein to make said electrode membrane more flexible at said edge. 78. The optical identification system as claimed in claim 71, wherein an edge of said electrode membrane, being in contact with said flat substrate, having cutaway sections therein to make said electrode membrane more flexible at said edge. 79. The optical identification system as claimed in claim 71, wherein said pulldown electrode is segmented. 80. The optical identification system as claimed in claim 71, wherein said pulldown electrode is segmented so that a greater electrostatic force is realized at a center of an associated electrode membrane. 81. The optical identification system as claimed in claim 68, wherein each MEMS device comprises: a substrate; a flexible membrane attached at least one end to a surface of the substrate and having said reflective surface thereon, the flexible membrane being configured such that, in a first state, said flexible membrane is disposed to form a reflective surface that provides reflection of light back to said laser source, and, in a second state, said flexible membrane is disposed to form a reflective surface that scatters light to prevent the reflection of light back to said laser source; and a plurality of dimples formed on the flexible membrane such that when the flexible membrane is in the first state, the flexible membrane contacts the substrate at the dimples. 82. The optical identification system as claimed in claim 68, wherein each MEMS device comprises: a substrate; a flexible membrane attached at least one end to a surface of the substrate and having said reflective surface thereon, the flexible membrane being configured such that, in a first state, said flexible membrane is disposed to form a reflective surface that provides reflection of light back to said laser source, and, in a second state, said flexible membrane is disposed to form a reflective surface that scatters light to prevent the reflection of light back to said laser source; and a plurality of posts formed on the substrate such that when the flexible membrane is in the first state, the posts formed on the substrate contact the flexible membrane. 83. The optical identification system as claimed in claim 67, further comprising: a second non-deformable mirror to provide reflection of light back to said laser source; said first non-deformable mirror, said second non-deformable mirror, and said deformable mirror forming a modulated corner cube retroreflector. 84. The optical identification system as claimed in claim 67, wherein said deformable mirror comprises a plurality of individually addressable MEMS devices, each having a reflective surface thereon, such that when the individually addressable MEMS device is in a first state, the reflective surface thereof is in a first position to form a reflective surface that provides reflection of a portion of the light back to said laser source. 85. The optical identification system as claimed in claim 84, wherein when the individually addressable MEMS device is in the second state, the reflective surface thereof is in a second position to scatter a portion of the light to prevent the reflection of a portion of the light back to said laser source. 86. The optical identification system as claimed in claim 85, wherein said individual reflective surfaces of said deformable mirror individually varying between said first and second positions to modulate the light being reflected back to said laser source so as to create a parallel pattern of light pulses representing encoded identification information. 87. The optical identification system as claimed in claim 67, wherein said deformable mirror comprises a plurality of individually addressable MEMS devices, each having a reflective surface thereon, such that when all of the individually addressable MEMS devices are in a first state, the reflective surface thereof is in a first position to form a reflective surface, the reflective surfaces of all the individually addressable MEMS device being in the same plane so as to provide reflection of the light back to the source thereof. 88. The optical identification system as claimed in claim 87, wherein when all of the individually addressable MEMS devices are in the second state, the reflective surface thereof is in a second position so as to scatter the light to prevent the reflection of the light back to the source thereof. 89. The optical identification system as claimed in claim 88, wherein said individual reflective surfaces of said deformable mirror individually varying between said first and second positions to modulate the light being reflected back to the source thereof so as to create a serial pattern of light pulses representing encoded information. 90. The optical identification system as claimed in claim 67, further comprising: a light absorbing material; said deformable mirror, when in the second state, misdirecting light to said light absorbing material to prevent the reflection of light back to said laser source.
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