최소 단어 이상 선택하여야 합니다.
최대 10 단어까지만 선택 가능합니다.
다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
NTIS 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
DataON 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
Edison 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
Kafe 바로가기국가/구분 | United States(US) Patent 등록 |
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국제특허분류(IPC7판) |
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출원번호 | US-0977280 (2007-10-24) |
등록번호 | US-7489149 (2009-02-10) |
발명자 / 주소 |
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출원인 / 주소 |
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대리인 / 주소 |
|
인용정보 | 피인용 횟수 : 4 인용 특허 : 940 |
A probe for measuring the electrical characteristics of integrated circuits or other microelectronic devices at high frequencies may include a dielectric substrate that supports a signal path interconnecting test instrumentation and a probe tip and a ground path that shields both the signal oath and
A probe for measuring the electrical characteristics of integrated circuits or other microelectronic devices at high frequencies may include a dielectric substrate that supports a signal path interconnecting test instrumentation and a probe tip and a ground path that shields both the signal oath and the probe tip.
We claim: 1. A probe comprising: (a) a dielectric substrate supporting an elongate conductor on said substrate and a conductive member supported on said substrate; (b) a contact electrically interconnected to said elongate conductor for testing a device under test; (c) wherein said elongate conduct
We claim: 1. A probe comprising: (a) a dielectric substrate supporting an elongate conductor on said substrate and a conductive member supported on said substrate; (b) a contact electrically interconnected to said elongate conductor for testing a device under test; (c) wherein said elongate conductor and said conductive member form a controlled impedance structure; (d) a flexible structure interconnected with said dielectric substrate, and a pre-loading mechanism that pre-loads said flexible structure with a force when said contact is free from being engaged with said device under test in such a manner that when force is applied to said probe it has a non-linear vertical deformation profile versus force applied. 2. The probe of claim 1 further comprising a conductive path between said first side of said substrate and said second side of said substrate. 3. The probe of claim 1 wherein said controlled impedance structure is a microstrip. 4. The probe of claim 1 wherein said flexible structure is a co-axial cable. 5. The probe of claim 1 herein said substrate has a thickness of less than 40 microns with a dielectric constant of less than 7. 6. The probe of claim 1 wherein said conductive path is in a region within the periphery of said substrate for at least a majority of the thickness of said substrate. 7. The probe of claim 1 wherein an elongate conductor is electrically interconnected to a central conductor of a coaxial cable. 8. The probe of claim 1 wherein said conductive member is electrically connected to a conductor surrounding said central conductor of said coaxial cable. 9. The probe of claim 1 herein said substrate has a thickness of less than 40 microns with a dielectric constant of less than 7. 10. A probe comprising: (a) a dielectric substrate supporting an elongate conductor; (b) a probing element electrically interconnected to said elongate conductor for testing a device under test; and (c) a flexible structure interconnected with said dielectric substrate, and a pre-loading mechanism that pre-loads said flexible structure with a force when said contact is free from being engaged with said device under test in such a manner that when force is applied to said probe it has a non-linear vertical deformation profile versus force applied. 11. The probe of claim 10 wherein said elongate conductor forms part of a controlled impedance structure. 12. The probe of claim 11 wherein a tensioned state is released when sufficient pressure is exerted between said probing element and said device under test. 13. The probe of claim 11 herein said substrate has a thickness of less than 40 microns with a dielectric constant of less than 7. 14. The probe of claim 11 wherein said elongate conductor is electrically interconnected to a central conductor of a coaxial cable. 15. The probe of claim 10 wherein a tensioned state is released when sufficient pressure is exerted between said probing element and said device under test. 16. The probe of claim 10 herein said substrate has a thickness of less than 40 microns with a dielectric constant of less than 7. 17. The probe of claim 10 wherein said elongate conductor is electrically interconnected to a central conductor of a coaxial cable.
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