IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0103224
(2005-04-11)
|
등록번호 |
US-7494530
(2009-02-24)
|
발명자
/ 주소 |
|
출원인 / 주소 |
- Advanced Technology Materials, Inc.
|
대리인 / 주소 |
|
인용정보 |
피인용 횟수 :
28 인용 특허 :
97 |
초록
▼
A fluid storage and dispensing apparatus, including a cylindrical fluid storage and dispensing vessel having an interior volume, in which the interior volume contains a physical adsorbent for sorptively retaining a fluid thereon and from which the fluid is desorbable for dispensing from the vessel,
A fluid storage and dispensing apparatus, including a cylindrical fluid storage and dispensing vessel having an interior volume, in which the interior volume contains a physical adsorbent for sorptively retaining a fluid thereon and from which the fluid is desorbable for dispensing from the vessel, and a valve head coupled to the vessel for dispensing desorbed fluid from the vessel. The physical adsorbent includes a monolithic carbon physical adsorbent that is characterized by at least one of the following characteristics: (a) a fill density measured for arsine gas at 25�� C. and pressure of 650 torr that is greater than 400 grams arsine per liter of adsorbent; (b) at least 30% of overall porosity of the adsorbent including slit-shaped pores having a size in a range of from about 0.3 to about 0.72 nanometer, and at least 20% of the overall porosity including micropores of diameter <2 nanometers; and (c) having a bulk density of from about 0.80 to about 2.0 grams per cubic centimeter.
대표청구항
▼
What is claimed is: 1. A fluid storage and dispensing apparatus, comprising a fluid storage and dispensing vessel having an interior volume, wherein the interior volume contains a physical adsorbent for sorptively retaining a fluid thereon and from which the fluid is desorbable for dispensing from
What is claimed is: 1. A fluid storage and dispensing apparatus, comprising a fluid storage and dispensing vessel having an interior volume, wherein the interior volume contains a physical adsorbent for sorptively retaining a fluid thereon and from which the fluid is desorbable for dispensing from the vessel, and a valve head coupled to the vessel for dispensing desorbed fluid from the vessel, wherein the physical adsorbent is a pyrolyzed monolith carbon physical adsorbent that is characterized by at least one of the following characteristics: (a) a fill density measured for arsine gas at 25�� C. and pressure of 650 torr that is greater than 400 grams arsine per liter of adsorbent; (b) at least 30% of overall porosity of said adsorbent comprising slit-shaped pores having a size in a range of from about 0.3 to about 0.72 nanometer, and at least 20% of the overall porosity comprising micropores of diameter 1 wherein the fluid has a pressure in said interior volume in a range of from about 20 to about 1800 torr. 21. The fluid storage and dispensing apparatus of claim 1 wherein the fluid has a subatmospheric pressure in said interior volume. 22. The fluid storage and dispensing apparatus of claim 1, wherein the adsorbent has at least 20% of its porosity in pores with a diameter of less than 2 nanometers. 23. A fluid storage and dispensing vessel having disposed therein a monolithic sorbent that is characterized by at least one of the following characteristics: (a) a fill density measured for arsine gas at 25�� C. and pressure of 650 torr that is greater than 400 grams arsine per liter of adsorbent; (b) at least 30% of overall porosity of said adsorbent comprising slit-shaped pores having a size in a range of from about 0.3 to about 0.72 nanometer, and at least 20% of the overall porosity comprising micropores of diameter <2 nanometers; and (c) having a bulk density of from about 0.80 to about 2.0 grams per cubic centimeter; wherein said monolithic sorbent has adsorbed thereon a gas selected from among metal hydride compounds, halide compounds and organometallic compounds. 24. A method of making a gas package useful for storing and dispensing gas, comprising: providing a gas storage and dispensing vessel; disposing a physical adsorbent in the vessel having sorptive affinity for said gas; and coupling said vessel with a valve head containing an actuatable valve; wherein the physical adsorbent is a pyrolyzed monolith carbon physical adsorbent that is characterized by at least one of the following characteristics: (a) a fill density measured for arsine gas at 25�� C. and pressure of 650 torr that is greater than 400 grams arsine per liter of adsorbent; (b) at least 30% of overall porosity of said adsorbent comprising slit-shaped pores having a size in a range of from about 0.3 to about 0.72 nanometer, and at least 20% of the overall porosity comprising micropores of diameter <2 nanometers; and (c) a bulk density of from about 0.80 to about 2.0 grams per cubic centimeter. 25. The method of claim 24, wherein the adsorbent comprises a disc-shaped monolithic article. 26. A method of making a gas package useful for storing and dispensing gas, comprising: providing a gas storage and dispensing vessel; disposing a physical adsorbent in the vessel having sorptive affinity for said gas; and coupling said vessel with a valve head containing an actuatable valve; wherein the physical adsorbent comprises a monolithic carbon physical adsorbent that is characterized by at least one of the following characteristics: (a) a fill density measured for arsine gas at 25�� C. and pressure of 650 torr that is greater than 400 grams arsine per liter of adsorbent; (b) at least 30% of overall porosity of said adsorbent comprising slit-shaped pores having a size in a range of from about 0.3 to about 0.72 nanometer, and at least 20% of the overall porosity comprising micropores of diameter <2 nanometers; and (c) a bulk density of from about 0.80 to about 2.0 grams per cubic centimeter, wherein the adsorbent comprises a stack of disc-shaped monolithic articles, and the adsorbent has a gas adsorbed therein, said gas being selected from the group consisting of silane, germane, arsine, phosphine, phosgene, diborane, germane, ammonia, stibine, hydrogen sulfide, hydrogen selenide, hydrogen telluride, nitrous oxide, hydrogen cyanide, ethylene oxide, deuterated hydrides, halide (chlorine, bromine, fluorine, and iodine) compounds, and organometallic compounds. 27. The method of claim 24, wherein the adsorbent has a fill density measured for arsine gas at 25�� C. and pressure of 650 torr that is greater than 400 grams arsine per liter of adsorbent. 28. The method of claim 24, wherein at least 30% of overall porosity of said adsorbent comprises slit-shaped pores having a size in a range of from about 0.3 to about 0.72 nanometer, and at least 20% of the overall porosity comprises micropores of diameter <2 nanometers. 29. The method of claim 24, wherein the adsorbent has been formed by pyrolysis and optional activation, at temperature(s) below 10000�� C. 30. The method of claim 24, wherein said physical adsorbent comprises pyrolyzed PVDC. 31. The method of claim 30, wherein the pyrolyzed PVDC has been subjected to activation conditions. 32. The method of claim 31 wherein the activation conditions comprise exposure of the pyrolyzed PVDC to an elevated temperature non-oxidizing environment, followed by exposure of the pyrolyzed PVDC to an elevated temperature oxidizing environment. 33. A method of packaging gas for subsequent dispensing, said method comprising: providing a gas storage and dispensing vessel having disposed therein a physical adsorbent having sorptive affinity for said gas, said vessel being coupled with a valve head containing a valve that is actuatable for said subsequent dispensing; charging said gas to said vessel for adsorption on said physical adsorbent; and sealing said vessel; wherein the physical adsorbent is a pyrolyzed monolith carbon physical adsorbent that is characterized by at least one of the following characteristics: (a) a fill density measured for arsine gas at 25�� C. and pressure of 650 torr that is greater than 400 grams arsine per liter of adsorbent; (b) at least 30% of overall porosity of said adsorbent comprising slit-shaped pores having a size in a range of from about 0.3 to about 0.72 nanometer, and at least 20% of the overall porosity comprising micropores of diameter <2 nanometers; and (c) a bulk density of from about 0.80 to about 2.0 grams per cubic centimeter. 34. A method of packaging gas for subsequent dispensing, said method comprising: providing a gas storage and dispensing vessel having disposed therein a physical adsorbent having sorptive affinity for said gas, said vessel being coupled with a valve head containing a valve that is actuatable for said subsequent dispensing; charging said gas to said vessel for adsorption on said physical adsorbent; and sealing said vessel; wherein the physical adsorbent comprises a monolithic carbon physical adsorbent that is characterized by at least one of the following characteristics: (a) a fill density measured for arsine gas at 25�� C. and pressure of 650 torr that is greater than 400 grams arsine per liter of adsorbent; (b) at least 30% of overall porosity of said adsorbent comprising slit-shaped pores having a size in a range of from about 0.3 to about 0.72 nanometer, and at least 20% of the overall porosity comprising micropores of diameter <2 nanometers; and (c) a bulk density of from about 0.80 to about 2.0 grams per cubic centimeter; wherein the gas comprises a gas selected from the group consisting of arsine, phosphine, hydrogen selenide, hydrogen telluride, nitrogen trifluoride, boron trifluoride, boron trichloride, diborane, trimethylsilane, tetramethylsilane, disilane, silane, germane, and organometallic gaseous reagents. 35. The method of claim 33, wherein the adsorbent has been formed by pyrolysis and optional activation, at temperature(s) below 1000�� C. 36. A method of supplying gas to a gas-utilizing process, said method comprising: providing a gas package including a gas storage and dispensing vessel containing a physical adsorbent and gas adsorbed on said physical adsorbent, and a valve head coupled to said vessel, said valve head including a valve that is actuable for gas dispensing; actuating the actuatable valve in said valve head for gas dispensing, desorbing gas from the physical adsorbent, and dispensing gas from the vessel to said gas-utilizing process; wherein the physical adsorbent is a pyrolyzed monolith carbon physical adsorbent that is characterized by at least one of the following characteristics: (a) a fill density measured for arsine gas at 25�� C. and pressure of 650 torr that is greater than 400 grams arsine per liter of adsorbent; (b) at least 30% of overall porosity of said adsorbent comprising slit-shaped pores having a size in a range of from about 0.3 to about 0.72 nanometer, and at least 20% of the overall porosity comprising micropores of diameter <2 nanometers; and (c) a bulk density of from about 0.80 to about 2.0 grams per cubic centimeter. 37. The method of claim 36, wherein the adsorbent has been formed by pyrolysis and optional activation, at temperature(s) below 1000�� C. 38. A method of supplying gas to a gas-utilizing process, said method comprising: providing a gas package including a gas storage and dispensing vessel containing a physical adsorbent and gas adsorbed on said physical adsorbent, and a valve head coupled to said vessel, said valve head including a valve that is actuable for gas dispensing; actuating the actuatable valve in said valve head for gas dispensing, desorbing gas from the physical adsorbent, and dispensing gas from the vessel to said gas-utilizing process; wherein the physical adsorbent comprises a monolithic carbon physical adsorbent that is characterized by at least one of the following characteristics: (a) a fill density measured for arsine gas at 25�� C. and pressure of 650 torr that is greater than 400 grams arsine per liter of adsorbent; (b) at least 30% of overall porosity of said adsorbent comprising slit-shaped pores having a size in a range of from about 0.3 to about 0.72 nanometer, and at least ��% of the overall porosity comprising micropores of diameter <2 nanometers; and (c) a bulk density of from about 0.80 to about 2.0 grams per cubic centimeter; wherein the gas comprises a gas selected from the group consisting of arsine, phosphine, hydrogen selenide, hydrogen telluride, nitrogen trifluoride, boron trifluoride, boron trichloride, diborane, trimethylsilane, tetramethylsilane, disilane, silane, germane, and organometallic gaseous reagents. 39. The method of claim 36, wherein said gas-utilizing process comprises a semiconductor manufacturing process. 40. A method of packaging gas for subsequent dispensing, said method comprising: providing a gas storage and dispensing vessel having disposed therein a physical adsorbent having sorptive affinity for said gas, said vessel being coupled with a valve head containing a valve that is actuatable for said subsequent dispensing; charging said gas to said vessel for adsorption on said physical adsorbent; and sealing said vessel; wherein the physical adsorbent comprises a monolithic carbon physical adsorbent that is characterized by at least one of the following characteristics: (a) a fill density measured for arsine gas at 25�� C. and pressure of 650 torr that is greater than 400 grams arsine per liter of adsorbent; (b) at least 30% of overall porosity of said adsorbent comprising slit-shaped pores having a size in a range of from about 0.3 to about 0.72 nanometer, and at least ��% of the overall porosity comprising micropores of diameter <2 nanometers; and (c) a bulk density of from about 0.80 to about 2.0 grams per cubic centimeter, wherein the gas comprises a gas selected from the group consisting of hydride compounds, halide compounds and organometallic compounds. 41. A method of supplying gas to a gas-utilizing process, said method comprising: providing a gas package including a gas storage and dispensing vessel containing a physical adsorbent and gas adsorbed on said physical adsorbent, and a valve head coupled to said vessel, said valve head including a valve that is actuable for gas dispensing; actuating the actuatable valve in said valve head for gas dispensing, desorbing gas from the physical adsorbent, and dispensing gas from the vessel to said gas-utilizing process; wherein the physical adsorbent comprises a monolithic carbon physical adsorbent that is characterized by at least one of the following characteristics: (a) a fill density measured for arsine gas at 25�� C and pressure of 650 torr that is greater than 400 grams arsine per liter of adsorbent; (b) at least 30% of overall porosity of said adsorbent comprising slit-shaped pores having a size in a range of from about 0.3 to about 0.72 nanometer, and at least 20% of the overall porosity comprising micropores of diameter <2 nanometers; and (c) a bulk density of from about 0.80 to about 2.0 grams per cubic centimeter, wherein the gas comprises a gas selected from the group consisting of hydride compounds, halide compounds and organometallic compounds. 42. The fluid storage and dispensing apparatus of claim 1,wherein the vessel comprises a cylindrical vessel. 43. The fluid storage and dispensing apparatus of claim 1, wherein the adsorbent has a bulk density of from about 0.80 to about 2.0 grams per cubic centimeter. 44. The fluid storage and dispensing apparatus of claim 1,wherein the adsorbent is characterized by characteristics (a) and (b). 45. The fluid storage and dispensing apparatus of claim 1,wherein the adsorbent is characterized by characteristics (a) and (c). 46. The fluid storage and dispensing apparatus of claim 1,wherein the adsorbent is characterized by characteristics (b) and (c). 47. The fluid storage and dispensing apparatus of claim 1,wherein the adsorbent is characterized by characteristics (a), (b) and (c). 48. The fluid storage and dispensing apparatus of claim 1, wherein the sorbent mass occupies at least 60% of the interior volume of the vessel. 49. The fluid storage and dispensing apparatus of claim 1, wherein the sorbent mass occupies from about 75% to about 95% of the interior volume of the vessel. 50. The fluid storage and dispensing vessel of claim 23, wherein the adsorbent is characterized by characteristic (a). 51. The fluid storage and dispensing vessel of claim 23, wherein the adsorbent is characterized by characteristic (b). 52. The fluid storage and dispensing vessel of claim 23, wherein the adsorbent is characterized by characteristic (c). 53. The fluid storage and dispensing vessel of claim 23, wherein the adsorbent is characterized by characteristics (a) and (b). 54. The fluid storage and dispensing vessel of claim 23, wherein the adsorbent is b characterized by characteristics (a) and (c). 55. The fluid storage and dispensing vessel of claim 23, wherein the adsorbent is characterized by characteristics (b) and (c). 56. The fluid storage and dispensing vessel of claim 23, wherein the adsorbent is characterized by characteristics (a), (b) and (c).
※ AI-Helper는 부적절한 답변을 할 수 있습니다.