초록 ▼

Rotary valve comprising (a) a rotor having a rotor face rotatable about an axis perpendicular to the rotor face, a plurality of openings, and at least one passage connecting at least one pair of the plurality of openings; (b) a stator having a stator face in sealing contact with the rotor face to fo

Rotary valve comprising (a) a rotor having a rotor face rotatable about an axis perpendicular to the rotor face, a plurality of openings, and at least one passage connecting at least one pair of the plurality of openings; (b) a stator having a stator face in sealing contact with the rotor face to form a planar rotary valve seal with an outer periphery, a plurality of openings in the stator face that are connected to respective passages through the stator, and wherein at least one of the passages through the stator is a stator vacuum passage directly connected to a vacuum pump; (c) a sealed valve chamber having an interior volume contiguous with the outer periphery of the rotary valve seal, which chamber is sealed from the atmosphere surrounding the rotary valve; and (d) a vacuum vent passage connected to the sealed valve chamber.

대표청구항 ▼

The invention claimed is: 1. A rotary valve comprising: (a) a rotor having a rotor face rotatable about an axis perpendicular to the rotor face, wherein the rotor face has a plurality of openings, and wherein the rotor includes at least one passage connecting at least one pair of the plurality of o

The invention claimed is: 1. A rotary valve comprising: (a) a rotor having a rotor face rotatable about an axis perpendicular to the rotor face, wherein the rotor face has a plurality of openings, and wherein the rotor includes at least one passage connecting at least one pair of the plurality of openings; (b) a stator having a stator face in sealing contact with the rotor face to form a planar rotary valve seal having an outer periphery, wherein the stator face has a plurality of openings in which at least two openings are adapted to register sequentially with openings in the rotor face as the rotor rotates, wherein each opening in the stator face is connected to a respective passage through the stator, and wherein at least one of the passages through the stator is a stator vacuum passage directly connected to a vacuum pump; (c) a sealed valve chamber having an interior volume contiguous with the outer periphery of the rotary valve seal, which chamber is sealed from the atmosphere surrounding the rotary valve; and (d) a vacuum vent passage connected to the sealed valve chamber. 2. The rotary valve of claim 1 wherein the vacuum vent passage is disposed in the stator and connects the interior volume of the sealed valve chamber with the stator vacuum passage. 3. The rotary valve of claim 1 wherein the sealed valve chamber is enclosed in part by an outer wall and the vacuum vent passage is disposed in and passes through the outer wall. 4. The rotary valve of claim 3 wherein the vacuum vent passage is connected to the vacuum pump. 5. The rotary valve of claim 1 wherein the rotor has an arcuate vacuum groove that registers continuously with the stator vacuum passage and wherein the vacuum vent passage is disposed in the rotor and connects the arcuate vacuum groove with the interior volume of the sealed valve chamber. 6. The rotary valve of claim 1 wherein the sealed valve chamber is formed in part by a portion of the stator adapted to surround the rotor. 7. The rotary valve of claim 1 further comprising (e) an additional rotor having a rotor face rotatable about an axis perpendicular to the rotor face, wherein the rotor face of the additional rotor has a plurality of openings, and wherein the additional rotor includes at least one passage connecting at least one pair of the plurality of openings; and (f) an additional stator having a stator face in sealing contact with the rotor face of (e) to form an additional planar rotary valve seal having an outer periphery, wherein the stator face has a plurality of openings in which at least two openings are adapted to register sequentially with openings in the rotor face of (e) as the additional rotor rotates, wherein each opening in the stator face is connected to a respective passage through the stator, and wherein the additional rotor and additional stator are disposed coaxially with the rotor of (a) and the stator of (b); wherein the outer periphery of the additional planar rotary valve seal is contiguous with the sealed valve chamber. 8. The rotary valve of claim 6 wherein the vacuum vent passage is disposed in the stator of (b) and connects the interior volume of the sealed valve chamber with the stator vacuum passage of (b). 9. The rotary valve of claim 6 wherein the sealed valve chamber is enclosed in part by an outer wall and the vacuum vent passage is disposed in and passes through the outer wall. 10. The rotary valve of claim 8 wherein the vacuum vent passage is connected to the vacuum pump. 11. The rotary valve of claim 6 wherein the rotor of (a) has an arcuate vacuum groove that registers continuously with the stator vacuum passage and wherein the vacuum vent passage is disposed in the rotor and connects the arcuate vacuum groove with the interior volume of the sealed valve chamber. 12. The rotary valve of claim 6 wherein the sealed valve chamber is formed in part by an axial circumferential extension of the stator of (b), an axial circumferential extension of the additional stator of (f), or axial circumferential extensions of the stator of (b) and the additional stator of (f). 13. The rotary valve of claim 11 wherein the sealed valve chamber is formed by an axial circumferential extension of the stator of (b) extending axially around the rotor of (a) and the additional rotor of (e), and wherein the axial circumferential extension the stator of (b) is in sealable contact with the additional stator of (f). 14. The rotary valve of claim 11 wherein the sealed valve chamber is formed by an axial circumferential extension of the additional stator of (f) extending axially around the rotor of (a) and the additional rotor of (e), and wherein the axial circumferential extension of the additional stator of (f) is in sealable contact with the stator of (b). 15. The rotary valve of claim 1 further comprising a rotatable drive shaft adapted to drive the rotor. 16. The rotary valve of claim 15 wherein the drive shaft passes coaxially through the stator and is rotatably sealed by a shaft seal in contact with the shaft and the stator. 17. The rotary valve of claim 7 further comprising a rotatable drive shaft adapted to drive the rotor. 18. The rotary valve of claim 17 wherein the drive shaft passes coaxially through the stator of (b) and is rotatably sealed by a shaft in contact with the shaft and the stator of (b). 19. The rotary valve of claim 17 wherein the drive shaft passes coaxially through the additional stator of (f) and is rotatably sealed by a shaft seal in contact with the shaft and the stator of (f). 20. A rotary valve comprising: (a) a first rotor having a rotor face rotatable about an axis perpendicular to the rotor face, wherein the rotor face has a plurality of openings, and wherein the first rotor includes at least one passage connecting at least one pair of the plurality of openings; (b) a first stator having a stator face in sealing contact with the rotor face of the first rotor to form a first planar rotary valve seal having an outer periphery, wherein the stator face of the first stator has a plurality of openings in which at least two openings are adapted to register sequentially with openings in the rotor face of the first rotor as the first rotor rotates, wherein each opening in the stator face of the first stator is connected to a respective passage through the first stator; (c) a second rotor having a rotor face rotatable about an axis perpendicular to the rotor face, wherein the rotor face of the second rotor has a plurality of openings, and wherein the second rotor includes at least one passage connecting at least one pair of the plurality of openings; and (d) a second stator having a stator face in sealing contact with the rotor face of the second rotor to form a second planar rotary valve seal having an outer periphery, wherein the second stator face has a plurality of openings in which at least two openings are adapted to register sequentially with openings in the second rotor face as the second rotor rotates, wherein each opening in the stator face of the second stator is connected to a respective passage through the second stator, and wherein the second rotor and second stator are disposed coaxially with the first rotor and first stator; (e) a sealed valve chamber having an interior volume contiguous with the outer periphery of the first planar rotary valve seal and the outer periphery of the second planar rotary valve seal, which chamber is sealed from the atmosphere surrounding the rotary valve; and (f) a vacuum vent passage connected to the sealed valve chamber. 21. The rotary valve of claim 20 wherein at least one of the passages through the first stator is a stator vacuum passage directly connected to a vacuum pump and wherein the vacuum vent passage is disposed in the first stator and connects the interior volume of the sealed valve chamber with the stator vacuum passage in the first stator. 22. The rotary valve of claim 20 wherein the sealed valve chamber is enclosed in part by an outer wall and the vacuum vent passage is disposed in and passes through the outer wall. 23. The rotary valve of claim 22 wherein the vacumn vent passage is connected to the vacuum pump. 24. The rotary valve of claim 20 wherein the first rotor has an arcuate vacuum groove that registers continuously with a stator vacuum passage connected to a vacuum pump and wherein the vacuum vent passage is disposed in the first rotor and connects the arcuate vacuum groove with the interior volume of the sealed valve chamber. 25. The rotary valve of claim 24 wherein the sealed valve chamber is formed in part by an axial circumferential extension of the first stator, an axial circumferential extension of the second stator, or axial circumferential extensions of the first and second stators. 26. The rotary valve of claim 25 wherein the sealed valve chamber is formed by an axial circumferential extension of the first stator extending axially around the first and second rotors, and wherein the axial circumferential extension of the first stator is in sealable contact with the second stator. 27. The rotary valve of claim 25 wherein the sealed valve chamber is formed by an axial circumferential extension of the second stator extending axially around the first and second rotors, and wherein the axial circumferential extension of the second stator is in sealable contact with the first stator. 28. The rotary valve of claim 20 further comprising a rotatable drive shaft adapted to drive the first and second rotors. 29. The rotary valve of claim 28 wherein the drive shaft passes coaxially through the first stator and is rotatably sealed by a shaft seal in contact with the shaft and the first stator. 30. The rotary valve of claim 28 wherein the drive shaft passes coaxially through either the second stator and is rotatably sealed by a shaft sealed in contact with the shaft and the second stator. 31. A rotary valve comprising: (a) a rotor having a rotor face rotatable about an axis perpendicular to the rotor face, wherein the rotor face has a plurality of openings, and wherein the rotor includes at least one passage connecting at least one pair of the plurality of openings; (b) a stator having a stator face in sealing contact with the rotor face to form a planar rotary valve seal having an outer periphery, wherein the stator face has a plurality of openings in which at least two openings are adapted to register sequentially with openings in the rotor face as the rotor rotates, wherein each opening in the stator face is connected to a respective passage through the stator; (c) a sealed valve chamber having an interior volume contiguous with the outer periphery of the rotary valve seal and a wall separating the interior volume from the ambient atmosphere; and (d) a vacuum vent passage connected to the sealed valve chamber; wherein none of the passages through the stator discharges into the interior volume of the sealed valve chamber. 32. The rotary valve of claim 31 wherein the vacuum vent passage is disposed in and passes through the wall of the sealed valve chamber. 33. The rotary valve of claim 32 wherein the vacuum vent passage is connected to a vacuum pump. 34. The rotary valve of claim 31 wherein the rotor has an arcuate vacuum groove that registers continuously with a stator vacuum passage connected to a vacuum pump and wherein the vacuum vent passage is disposed in the rotor and connects the arcuate vacuum groove with the interior volume of the sealed valve chamber. 35. A method of operating a rotary valve comprising (a) providing a rotary valve comprising: (1) a rotor having a rotor face rotatable about an axis perpendicular to the rotor face, wherein the rotor face has a plurality of openings, and wherein the rotor includes at least one passage connecting at least one pair of the plurality of openings; (2) a stator having a stator face in sealing contact with the rotor face to form a planar rotary valve seal having an outer periphery, wherein the stator face has a plurality of openings in which at least two openings are adapted to register sequentially with openings in the rotor face as the rotor rotates, wherein each opening in the stator face is connected to a respective passage through the stator, and wherein at least one of the passages through the stator is a stator vacuum passage directly connected to a vacuum pump; (3) a sealed valve chamber having an interior volume contiguous with the outer periphery of the rotary valve seal; and (4) a vacuum vent passage connected to the sealed valve chamber; and (b) rotating the rotor in sealing contact with the stator and maintaining the pressure in the interior volume of the sealed valve chamber at a value essentially equal to or less than the lowest pressure in any of the passages through the stator. 36. A method of operating a rotary valve comprising (a) providing rotary valve comprising (1) a first rotor having a rotor face rotatable about an axis perpendicular to the rotor face, wherein the rotor face has a plurality of openings, and wherein the first rotor includes at least one passage connecting at least one pair of the plurality of openings; (2) a first stator having a stator face in sealing contact with the rotor face of the first rotor to form a first planar rotary valve seal having an outer periphery, wherein the stator-face of the first stator has a plurality of openings in which at least two openings are adapted to register sequentially with openings in the rotor face of the first rotor as the first rotor rotates, wherein each opening in the stator face of the first stator is connected to a respective passage through the first stator; (3) a second rotor having a rotor face rotatable about an axis perpendicular to the rotor face, wherein the rotor face of the second rotor has a plurality of openings, and wherein the second rotor includes at least one passage connecting at least one pair of the plurality of openings; and (4) a second stator having a stator face in sealing contact with the rotor face of the second rotor to form a second planar rotary valve seal having an outer periphery, wherein the second stator face has a plurality of openings adapted to register sequentially with openings in the second rotor face as the second rotor rotates, wherein each opening in the stator face of the second stator is connected to a respective passage through the second stator, and wherein the second rotor and second stator are disposed coaxially with the first rotor and first stator; (5) a sealed valve chamber having an interior volume contiguous with the outer periphery of the first planar rotary valve seal and the outer periphery of the second planar rotary valve seal; and (6) a vacuum vent passage connected to the sealed valve chamber; and (b) rotating the first and second rotors in sealing contact with the first and second stators, respectively, and maintaining the pressure in the interior volume of the sealed valve chamber at a value essentially equal to or less than the lowest pressure in any of the passages through the first stator and the second stator.