IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0744814
(2007-05-04)
|
등록번호 |
US-7500649
(2009-03-10)
|
우선권정보 |
CH-0726/06(2006-05-05) |
발명자
/ 주소 |
- Litscher,Bernhard
- Blecha,Thomas
|
출원인 / 주소 |
|
대리인 / 주소 |
Muncy, Geissler, Olds & Lowe, PLLC.
|
인용정보 |
피인용 횟수 :
5 인용 특허 :
9 |
초록
▼
A vacuum valve drive for linear displacement of a valve closure along an adjustment axis between an opened and closed position, and a vacuum valve comprising the vacuum valve drive, are provided. The vacuum valve drive comprises a drive housing containing a gas tight working space, a piston inside t
A vacuum valve drive for linear displacement of a valve closure along an adjustment axis between an opened and closed position, and a vacuum valve comprising the vacuum valve drive, are provided. The vacuum valve drive comprises a drive housing containing a gas tight working space, a piston inside the working space, and at least one connecting rod which is led from the working space in a gas-tight manner to the valve closure. A static guide rod extends centrally and parallel to the adjustment axis inside the working space and is led through the piston. A precision linear bearing is between the piston and the guide rod. The piston is linearly guided by the guide rod with high precision and centered in the working space so that the valve closure is moved with high precision and pressed onto the valve seat.
대표청구항
▼
What is claimed is: 1. A Vacuum valve drive for linear displacement of a valve closure along an adjustment axis between an opened position of the vacuum valve and a position in which it is closed gas-tight, comprising a drive housing which contains a substantially gas-tight working space, a piston
What is claimed is: 1. A Vacuum valve drive for linear displacement of a valve closure along an adjustment axis between an opened position of the vacuum valve and a position in which it is closed gas-tight, comprising a drive housing which contains a substantially gas-tight working space, a piston which is displaceable inside the working space along the adjustment axis and is arranged in such a way that the piston divides the working space into a first pressure space and a second pressure space, the pressure spaces being separated by the piston in a substantially gas-tight manner, means for linear guidance of the piston along the adjustment axis, at least one connecting rod which extends parallel to the adjustment axis and is fixed to the piston and is led from the working space in a gas-tight manner into the outer region of the drive housing to the valve closure, a first connection of the drive housing, which leads into the first pressure space and by means of which gas pressure can be applied to the first gas space, a second connection in the drive housing, which leads into the second pressure space and by means of which gas pressure can be applied to the second pressure space so that the valve closure arranged on the at least one connecting rod can be moved between the opened position and the closed position by producing a gas pressure difference between the first pressure space and the second pressure space, wherein the means for linear guidance of the piston are in the form of at least one static guide rod which is connected to the drive housing and which extends parallel to the adjustment axis inside the working space and is led in a substantially gas-tight manner through the piston, and at least one precision linear bearing between the piston and the guide rod. 2. The Vacuum valve drive according to claim 1, wherein the piston and the working space have an elongated--in particular slot-like or oval--cross-section. 3. The Vacuum valve drive according to claim 2, wherein the cross-sectional length of the cross-section of the piston and of the working space is at least twice the cross-sectional width. 4. The Vacuum valve drive according to claim 1, further comprising: a guide rod extending centrally inside the working space being provided. 5. A Vacuum valve for substantially gas-tight closing of a flow path, comprising a valve housing having an opening for the flow path and a valve seat and a valve closure which is linearly displaceable along an adjustment axis between an opened position unblocking the opening and a position in which the vacuum valve is closed gas-tight and the valve closure is moved linearly over the opening and hence pressed onto the valve seat, characterized by the vacuum valve drive according to claim 1 for linear displacement of the valve closure along the adjustment axis between the opened position and the position with gas-tight closure. 6. A Vacuum valve drive for linear displacement of a valve closure along an adjustment axis between an opened position of the vacuum valve and a position in which it is closed gas-tight, comprising a drive housing which contains a substantially gas-tight working space, a piston which is displaceable inside the working space along the adjustment axis and is arranged in such a way that the piston divides the working space into a first pressure space and a second pressure space, the pressure spaces being separated by the piston in a substantially gas-tight manner, means for linear guidance of the piston along the adjustment axis, at least one connecting rod which extends parallel to the adjustment axis and is fixed to the piston and is led from the working space in a gas-tight manner into the outer region of the drive housing to the valve closure, a first connection of the drive housing, which leads into the first pressure space and by means of which gas pressure can be applied to the first gas space, a second connection in the drive housing, which leads into the second pressure space and by means of which gas pressure can be applied to the second pressure space so that the valve closure arranged on the at least one connecting rod can be moved between the opened position and the closed position by producing a gas pressure difference between the first pressure space and the second pressure space, wherein the means for linear guidance of the piston are in the form of at least one static guide rod which extends parallel to the adjustment axis inside the working space and is led in a substantially gas-tight manner through the piston, and at least one precision linear bearing between the piston and the guide rod, and wherein the precision linear bearing is in the form of a precision linear sliding bearing comprising a guide sleeve which is arranged on the piston and surrounds the guide rod substantially radially without play in the manner of a sliding bearing. 7. A Vacuum valve drive for linear displacement of a valve closure along an adjustment axis between an opened position of the vacuum valve and a position in which it is closed gas-tight, comprising a drive housing which contains a substantially gas-tight working space, a piston which is displaceable inside the working space along the adjustment axis and is arranged in such a way that the piston divides the working space into a first pressure space and a second pressure space, the pressure spaces being separated by the piston in a substantially gas-tight manner, means for linear guidance of the piston along the adjustment axis, at least one connecting rod which extends parallel to the adjustment axis and is fixed to the piston and is led from the working space in a gas-tight manner into the outer region of the drive housing to the valve closure, a first connection of the drive housing, which leads into the first pressure space and by means of which gas pressure can be applied to the first gas space, a second connection in the drive housing, which leads into the second pressure space and by means of which gas pressure can be applied to the second pressure space so that the valve closure arranged on the at least one connecting rod can be moved between the opened position and the closed position by producing a gas pressure difference between the first pressure space and the second pressure space, wherein the means for linear guidance of the piston are in the form of at least one static guide rod which extends parallel to the adjustment axis inside the working space and is led in a substantially gas-tight manner through the piston, and at least one precision linear bearing between the piston and the guide rod, and wherein the precision linear bearing is in the form of a precision linear roller bearing. 8. The Vacuum valve drive according to claim 7, wherein the precision linear roller bearing is in the form of a guide sleeve which is arranged on the piston and surrounds the guide rod, and a sleeve-like separator which holds roll bodies between the guide rod and the guide sleeve in such a way that the guide sleeve is mounted radially without play on the guide rod in a linearly displaceable manner. 9. The Vacuum valve drive according to claim 8, wherein the roll bodies is in the form of a multiplicity of balls distributed in a plurality of rows around the guide rod and parallel to the adjustment axis. 10. A Vacuum valve drive for linear displacement of a valve closure along an adjustment axis between an opened position of the vacuum valve and a position in which it is closed gas-tight, comprising a drive housing which contains a substantially gas-tight working space, a piston which is displaceable inside the working space along the adjustment axis and is arranged in such a way that the piston divides the working space into a first pressure space and a second pressure space, the pressure spaces being separated by the piston in a substantially gas-tight manner, means for linear guidance of the piston along the adjustment axis, at least one connecting rod which extends parallel to the adjustment axis and is fixed to the piston and is led from the working space in a gas-tight manner into the outer region of the drive housing to the valve closure, a first connection of the drive housing, which leads into the first pressure space and by means of which gas pressure can be applied to the first gas space, a second connection in the drive housing, which leads into the second pressure space and by means of which gas pressure can be applied to the second pressure space so that the valve closure arranged on the at least one connecting rod can be moved between the opened position and the closed position by producing a gas pressure difference between the first pressure space and the second pressure space, wherein the means for linear guidance of the piston are in the form of at least one static guide rod which extends parallel to the adjustment axis inside the working space and is led in a substantially gas-tight manner through the piston, and at least one precision linear bearing between the piston and the guide rod, wherein the piston and the working space have an elongated--in particular slot-like or oval--cross-section, and a piston guide band resting on the adjacent inner surface of the working space being arranged on the outer surface of the piston so that the piston is prevented from rotating about the guide rod axis. 11. A Vacuum valve drive for linear displacement of a valve closure along an adjustment axis between an opened position of the vacuum valve and a position in which it is closed gas-tight, comprising a drive housing which contains a substantially gas-tight working space, a piston which is displaceable inside the working space along the adjustment axis and is arranged in such a way that the piston divides the working space into a first pressure space and a second pressure space, the pressure spaces being separated by the piston in a substantially gas-tight manner, means for linear guidance of the piston along the adjustment axis, at least one connecting rod which extends parallel to the adjustment axis and is fixed to the piston and is led from the working space in a gas-tight manner into the outer region of the drive housing to the valve closure, a first connection of the drive housing, which leads into the first pressure space and by means of which gas pressure can be applied to the first gas space, a second connection in the drive housing, which leads into the second pressure space and by means of which gas pressure can be applied to the second pressure space so that the valve closure arranged on the at least one connecting rod can be moved between the opened position and the closed position by producing a gas pressure difference between the first pressure space and the second pressure space, wherein the means for linear guidance of the piston are in the form of at least one static guide rod which extends parallel to the adjustment axis inside the working space and is led in a substantially gas-tight manner through the piston, and at least one precision linear bearing between the piston and the guide rod, and a guide rod extending centrally inside the working space being provided, wherein two connecting rods which extend parallel to the adjustment axis and are fixed to the piston, opposite the central guide rod, and are led from the working space in a gas-tight manner into the outer region of the drive housing to the valve closure are provided. 12. A Vacuum valve drive for linear displacement of a valve closure along an adjustment axis between an opened position of the vacuum valve and a position in which it is closed gas-tight, comprising a drive housing which contains a substantially gas-tight working space, a piston which is displaceable inside the working space along the adjustment axis and is arranged in such a way that the piston divides the working space into a first pressure space and a second pressure space, the pressure spaces being separated by the piston in a substantially gas-tight manner, means for linear guidance of the piston along the adjustment axis, at least one connecting rod which extends parallel to the adjustment axis and is fixed to the piston and is led from the working space in a gas-tight manner into the outer region of the drive housing to the valve closure, a first connection of the drive housing, which leads into the first pressure space and by means of which gas pressure can be applied to the first gas space, a second connection in the drive housing, which leads into the second pressure space and by means of which gas pressure can be applied to the second pressure space so that the valve closure arranged on the at least one connecting rod can be moved between the opened position and the closed position by producing a gas pressure difference between the first pressure space and the second pressure space, wherein the means for linear guidance of the piston are in the form of at least one static guide rod which extends parallel to the adjustment axis inside the working space and is led in a substantially gas-tight manner through the piston, and at least one precision linear bearing between the piston and the guide rod, and wherein a channel which opens into the second pressure space and connects the second pressure space to the second connection which is arranged on the drive housing on the side of the first pressure space is formed inside the guide rod. 13. The Vacuum valve drive according to claim 12, further comprising: a damping bore being formed in the second pressure space in the drive housing, which pressure space is arranged on the valve side of the drive housing, a partial section of the guide rod being led centrally and radially a distance away through the damping bore so that a sleeve-like space closed towards the valve side and open towards the piston side is formed, a damping bore seal being arranged on the inner edge section on the piston side in the damping bore, a flow path bypassing the damping bore seal, in particular an additional channel leading from the damping bore into the second pressure space, being provided, the channel formed inside the guide rod opening into that partial section of the guide rod which is surrounded by the damping bore, and the guide sleeve, the damping bore, the damping bore seal and in particular the separator being dimensioned and arranged in such a way that, on going over from the opened position into the closed position (B), the guide sleeve is introduced into the damping bore and a substantially radially sealing contact is produced between the damping bore seal and the guide sleeve so that pneumatic damping is effected on going over into the closed position by gas displacement via the flow path, in particular the additional channel.
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