Methods of fabricating a microlens including selectively curing flowable, uncured optically trasmissive material
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
H01L-021/50
H01L-021/02
H01L-023/043
H01L-023/02
출원번호
UP-0336228
(2006-01-20)
등록번호
US-7521296
(2009-07-01)
발명자
/ 주소
Wood, Alan G.
Farnworth, Warren M.
Watkins, Charles M.
Benson, Peter A.
출원인 / 주소
Micron Technology, Inc.
대리인 / 주소
TraskBritt
인용정보
피인용 횟수 :
3인용 특허 :
195
초록▼
Microlenses for directing radiation toward a sensor of an imaging device include a plurality of mutually adhered layers of cured optically transmissive material. Systems include at least one microprocessor and a substrate including an array of microlenses formed thereon in electrical communication w
Microlenses for directing radiation toward a sensor of an imaging device include a plurality of mutually adhered layers of cured optically transmissive material. Systems include at least one microprocessor and a substrate including an array of microlenses formed thereon in electrical communication with the at least one microprocessor. At least one microlens in the array includes a plurality of mutually adhered layers of cured optically transmissive material.
대표청구항▼
What is claimed is: 1. A method of fabrication of a microlens for use in an imaging device, comprising: disposing a flowable, uncured optically transmissive material in at least one layer onto a surface of a substrate; selectively curing at least a portion of the flowable, uncured optically transmi
What is claimed is: 1. A method of fabrication of a microlens for use in an imaging device, comprising: disposing a flowable, uncured optically transmissive material in at least one layer onto a surface of a substrate; selectively curing at least a portion of the flowable, uncured optically transmissive material to form at least a portion of a microlens; and removing the flowable, uncured optically transmissive material from the surface of the substrate. 2. The method of claim 1, wherein disposing a flowable, uncured optically transmissive material in at least one layer onto a surface of a substrate comprises disposing a flowable, uncured optically transmissive material in at least one layer onto a surface of a substrate by way of at least one of maskless mesoscale materials deposition, 3-D printing deposition, and micropen deposition. 3. The method of claim 1, wherein disposing a flowable, uncured optically transmissive material in at least one layer onto a surface of a substrate comprises at least one of immersing, dipping, spin-coating, printing, stamping, and spraying. 4. The method of claim 1, further comprising: micromachining at least one layer of the selectively cured optically transmissive material with a laser beam. 5. The method of claim 1, wherein disposing the flowable, uncured optically transmissive material in at least one layer onto a surface of a substrate comprises disposing at least one of a photopolymer and a thermoplastic onto the surface of the substrate. 6. The method of claim 1, further comprising: heating at least a surface of the selectively cured optically transmissive material to a temperature exceeding a glass transition temperature thereof. 7. The method of claim 1, wherein selectively curing at least a portion of the flowable, uncured optically transmissive material comprises: curing a first layer of the flowable, uncured optically transmissive material; and curing at least one additional layer of the flowable, uncured optically transmissive material; wherein the at least one additional layer is superimposed in relationship to the first layer. 8. The method of claim 7, further comprising: heating at least a surface of the optically transmissive material to a temperature exceeding a glass transition temperature thereof. 9. The method of claim 7, further comprising: micromachining at least the first layer and the at least one additional layer with a laser beam. 10. The method of claim 1, wherein disposing the flowable, uncured optically transmissive material in at least one layer onto the surface of the substrate and selectively curing the at least a portion of the flowable, uncured optically transmissive material comprises sequentially forming the microlens of a plurality of vertically superimposed mutually adhered layers of the optically transmissive material. 11. The method of claim 10, further comprising: micromachining at least one layer of the plurality of vertically superimposed mutually adhered layers with a laser beam. 12. The method of claim 10, further comprising: heating at least a surface of the optically transmissive material to a temperature exceeding a glass transition temperature thereof. 13. The method of claim 1, wherein disposing the flowable, uncured optically transmissive material in at least one layer onto the surface of the substrate and selectively curing the at least a portion of the flowable, uncured optically transmissive material comprises repeatedly sequentially disposing the flowable, uncured optically transmissive material onto the surface of the substrate and selectively curing the at least a portion of the flowable, uncured optically transmissive material to form a plurality of superimposed mutually adhered layers of the cured optically transmissive material. 14. The method of claim 13, further comprising: micromachining at least one layer of the plurality of superimposed mutually adhered layers with a laser beam. 15. The method of claim 13, further comprising: heating at least a surface of the cured optically transmissive material to a temperature exceeding a glass transition temperature thereof.
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