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Optical interference display panel and manufacturing method thereof

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G02B-026/00
  • H01L-021/00
출원번호 UP-0807128 (2004-03-24)
등록번호 US-7532385 (2009-07-01)
우선권정보 TW-92122676 A(2003-08-18)
발명자 / 주소
  • Lin, Wen Jian
  • Arbuckle, Brian
  • Gally, Brian
  • Floyd, Philip
  • Palmateer, Lauren
출원인 / 주소
  • QUALCOMM MEMS Technologies, Inc.
대리인 / 주소
    Knobbe Martens Olson & Bear LLP
인용정보 피인용 횟수 : 14  인용 특허 : 71

초록

A first electrode and a sacrificial layer are sequentially formed on a substrate, and then first openings for forming supports inside are formed in the first electrode and the sacrificial layer. The supports are formed in the first openings, and then a second electrode is formed on the sacrificial l

대표청구항

What is claimed is: 1. A method for manufacturing an optical interference display panel, comprising: providing a substrate having a micro electro mechanical structure, wherein the micro electro mechanical structure comprises: a first electrode, on the substrate; a sacrificial layer, on the first el

이 특허에 인용된 특허 (71)

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  19. Lin,Wen Jian, Interference display unit.
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  39. Atobe Mitsuro,JPX ; Koeda Hiroshi,JPX ; Yotsuya Shinichi,JPX, Method of manufacturing spatial light modulator and electronic device employing it.
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  42. Alwan James J., Methods of fabricating flat panel evacuated displays.
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  45. Nelson, William E., Micromechanical device and method for non-contacting edge-coupled operation.
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  47. Stern Ernest, Micromechanical optical switch and flat panel display.
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  51. Yanagisawa, Yoshiyuki, Optical device, optical unit and projector.
  52. Lin,Wen Jian; Tsai,Hsiung Kuang, Optical interference display panel.
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  54. Low, Yee Leng; Ramsey, David Andrew, Packaging micromechanical devices.
  55. Miles,Mark W., Photonic MEMS and structures.
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  62. Wilkinson, Timothy D; Crossland, William A, Sealing of cells having active backplanes.
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  67. Lin, Wen-Jian; Tsai, Hsiung-Kuang, Structure of an optical interference display cell.
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이 특허를 인용한 특허 (14)

  1. Chui, Clarence; Kothari, Manish, Apparatus and system for writing data to electromechanical display elements.
  2. Nichol, Anthony John; Coleman, Zane Arthur, Illumination device comprising a film-based lightguide.
  3. Bita, Ion; Hong, John H.; Alam, Khurshid S., Light-based sealing and device packaging.
  4. Lewis, Alan G.; Mignard, Marc M.; Chui, Clarence; Van Lier, Wilhelmus Johannes Robertus; Todorovich, Mark M.; Cummings, William, Low voltage driver scheme for interferometric modulators.
  5. Lewis, Alan G.; Mignard, Marc Maurice; Chui, Clarence; Van Lier, Wilhelmus Johannes Robertus; Todorovich, Mark M.; Cummings, William, Low voltage driver scheme for interferometric modulators.
  6. Palmateer, Lauren; Cummings, William J.; Gally, Brian; Miles, Mark; Sampsell, Jeffrey B.; Chui, Clarence; Kothari, Manish, Method and device for packaging a substrate.
  7. Tyger, Karen, Method and device for providing electronic circuitry on a backplate.
  8. Palmateer, Lauren; Cummings, William J.; Gally, Brian; Chui, Clarence; Kothari, Manish, Method and system for packaging MEMS devices with glass seal.
  9. Miles, Mark W.; Sampsell, Jeffrey B., Method and system for packaging a MEMS device.
  10. Chui, Clarence; Kothari, Manish, Method and system for writing data to MEMS display elements.
  11. Chui, Clarence; Kothari, Manish, Method and system for writing data to MEMS display elements.
  12. Chui, Clarence; Kothari, Manish, Method and system for writing data to electromechanical display elements.
  13. Tsai, Hsiung-Kuang, Optical interference display panel.
  14. Lin, Wen-Jian; Arbuckle, Brian; Gally, Brian; Floyd, Philip; Palmateer, Lauren, Optical interference display panel and manufacturing method thereof.
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