Underfill and encapsulation of semiconductor assemblies with materials having differing properties
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
H01L-023/29
H01L-023/28
H01L-023/02
H01L-023/34
H01L-023/58
출원번호
UP-0867257
(2004-06-14)
등록번호
US-7547978
(2009-07-01)
발명자
/ 주소
Hembree, David R.
Farnworth, Warren M.
출원인 / 주소
Micron Technology, Inc.
대리인 / 주소
TraskBritt
인용정보
피인용 횟수 :
3인용 특허 :
198
초록▼
Polymerized materials for forming the underfill and encapsulation structures for semiconductor package are disclosed. A filler constituent, such as boron nitride, silicates, elemental metals, or alloys, may be added to a liquid photopolymer resin to tailor the physical properties thereof upon curing
Polymerized materials for forming the underfill and encapsulation structures for semiconductor package are disclosed. A filler constituent, such as boron nitride, silicates, elemental metals, or alloys, may be added to a liquid photopolymer resin to tailor the physical properties thereof upon curing. The filler constituents may be employed to alter the coefficient of thermal expansion, thermal conductivity, or electrical conductivity of the polymerized material. A number of different embodiments are disclosed that employ the above materials in selected regions of the underfill and encapsulation structures of the semiconductor package. The polymerized materials may also be used to form support structures and covers for optically interactive semiconductor devices. Methods for forming the above structures using stereolithography are also disclosed.
대표청구항▼
What is claimed is: 1. A semiconductor device assembly comprising: at least one semiconductor die having lateral sides, a back side, and an active surface including a plurality of discrete conductive elements projecting therefrom; and a carrier substrate bearing a plurality of conductive traces in
What is claimed is: 1. A semiconductor device assembly comprising: at least one semiconductor die having lateral sides, a back side, and an active surface including a plurality of discrete conductive elements projecting therefrom; and a carrier substrate bearing a plurality of conductive traces in electrical communication with the plurality of discrete conductive elements; wherein at least a portion of the semiconductor device assembly is covered with a first cured photopolymer material, the first cured photopolymer material comprising a polymerized matrix having a plurality of discrete particles dispersed therethrough. 2. The semiconductor device assembly of claim 1, wherein the first cured photopolymer material substantially fills a volume between the at least one semiconductor die and the carrier substrate. 3. The semiconductor device assembly of claim 2, wherein the first cured photopolymer material substantially encloses the at least one semiconductor die. 4. The semiconductor device assembly of claim 3, wherein the discrete particles comprise boron nitride. 5. The semiconductor device assembly of claim 1, wherein the first cured photopolymer material covers the back side of the at least one semiconductor die and a second cured photopolymer material substantially fills a volume between the at least one semiconductor die and the carrier substrate and surrounds a lateral periphery of the at least one semiconductor die to form a contiguous structure with the first cured photopolymer material. 6. The semiconductor device assembly of claim 5, wherein the first cured photopolymer material exhibits a thermal conductivity greater than that of the second cured photopolymer material. 7. The semiconductor device assembly of claim 6, wherein the discrete particles comprise boron nitride. 8. The semiconductor device assembly of claim 1, further comprising: a second cured photopolymer material that substantially fills a volume between the at least one semiconductor die and the carrier substrate, the first cured photopolymer material at least partially enclosing the at least one semiconductor die and the second cured photopolymer material. 9. The semiconductor device assembly of claim 8, wherein the first cured photopolymer material exhibits an electrical conductivity greater than an electrical conductivity of the second cured photopolymer material. 10. The semiconductor device assembly of claim 9, wherein the discrete particles of the first cured photopolymer material comprise an elemental metal or an alloy. 11. The semiconductor device assembly of claim 1, wherein the first cured photopolymer material substantially fills a volume between the at least one semiconductor die and the carrier substrate, the first cured photopolymer material exhibiting a gradient in coefficient of thermal expansion that increases in a direction from the active surface of the at least one semiconductor die to a face of the carrier substrate. 12. The semiconductor device assembly of claim 11, wherein the first cured photopolymer material is comprised of more than one layer, each layer having a different concentration of the discrete particles. 13. The semiconductor device assembly of claim 11, wherein the discrete particles comprise boron nitride or a silicate material. 14. The semiconductor device assembly of claim 11, further comprising a second cured photopolymer material that covers the back side and at least a portion of the lateral sides of the at least one semiconductor die. 15. The semiconductor device assembly of claim 14, wherein the second cured photopolymer material comprises a polymerized matrix having a plurality of discrete particles dispersed therethrough. 16. The semiconductor device assembly of claim 15, wherein the discrete particles of the second cured photopolymer material comprise boron nitride. 17. The semiconductor device assembly of claim 16, further comprising a third cured photopolymer material comprising a polymerized matrix having a plurality of discrete particles dispersed therethrough, the third cured photopolymer material at least partially enclosing each of the at least one semiconductor die, the first cured photopolymer material, and the second cured photopolymer material, the third cured photopolymer material exhibiting an electrical conductivity greater than an electrical conductivity of each of the first cured photopolymer material and the second cured photopolymer material. 18. A semiconductor package comprising: at least one semiconductor die having an active surface including an array of optically interactive semiconductor devices defining at least one image sensor on the at least one semiconductor die; and a substantially opaque support structure that surrounds the array of optically interactive semiconductor devices formed from a first cured photopolymer material. 19. The semiconductor package of claim 18, further comprising a second cured, optically transparent photopolymer material that covers the array of optically interactive semiconductor devices. 20. The semiconductor package of claim 19, wherein the second cured, optically transparent photopolymer material substantially filters infrared radiation. 21. The semiconductor package of claim 19, further comprising at least one lens supported by the support structure over the array of optically interactive semiconductor devices. 22. The semiconductor package of claim 18, further comprising at least one lens supported by the support structure. 23. The semiconductor package of claim 22, further comprising an infrared filter disposed between the active surface and the at least one lens. 24. The semiconductor package of claim 18, wherein the first cured photopolymer material comprises a polymerized matrix including a plurality of discrete particles dispersed therethrough. 25. The semiconductor package of claim 24, wherein the discrete particles of the first cured photopolymer material comprise an elemental metal or an alloy.
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