Method and apparatus for manufacturing data indexing
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
G06K-009/00
G06K-009/62
G01N-021/00
G01R-031/02
G06F-019/00
G06F-011/30
G21C-017/00
G06F-007/00
G06F-017/30
출원번호
UP-0341701
(2006-01-27)
등록번호
US-7583833
(2009-09-16)
발명자
/ 주소
McIntyre, Michael G.
Bierwag, Alex
Reading, Charlie
Herrera, Alfredo V.
출원인 / 주소
Advanced Micro Devices, Inc.
대리인 / 주소
Williams, Morgan & Amerson, P.C.
인용정보
피인용 횟수 :
2인용 특허 :
22
초록▼
A method, apparatus, and a system for generating an index for storing data. A pattern associated with a first set of data is determined. The first set of data is stored. A determination is made as to whether the pattern associated with a second set of data corresponds to the pattern associated with
A method, apparatus, and a system for generating an index for storing data. A pattern associated with a first set of data is determined. The first set of data is stored. A determination is made as to whether the pattern associated with a second set of data corresponds to the pattern associated with the first set of data. An index associated with the first set of data is correlated to the second set of data in response to determining that the pattern associated with the second set of data corresponds to the pattern associated with the first set of data.
대표청구항▼
What is claimed: 1. A method, comprising: determining an error pattern associated with a first set of data, said first set of data relating to post-process data; storing said first set of data in a first database; determining whether the error pattern associated with a second set of data correspond
What is claimed: 1. A method, comprising: determining an error pattern associated with a first set of data, said first set of data relating to post-process data; storing said first set of data in a first database; determining whether the error pattern associated with a second set of data corresponds to the pattern associated with said first set of data; correlating an index associated with said first set of data, to said second set of data in response to determining that said pattern associated with said second set of data corresponds to the pattern associated with said first set of data; and storing said index in a relational database, wherein said index may be used to associate said second set of data with said first set of data, in said first database; and providing said first set of data as an equivalent of said second set of data based upon said index. 2. The method of claim 1, further comprising processing a subsequent work piece based upon analysis of said second set of data. 3. The method of claim 1, further comprising: receiving a request for accessing said second set of data; and providing said first set of data as an equivalent of said second set of data based upon said index in response to said request. 4. The method of claim 1, wherein determining a pattern associated with said first set of data comprises determining a failure pattern associated with at least a portion of a semiconductor wafer. 5. The method of claim 4, wherein determining whether the pattern associated with said second set of data corresponds to the pattern associated with said first set of data comprises determining whether a failure pattern associated with at least a portion of a semiconductor wafer is substantially similar to said failure pattern associated with said first set of data. 6. The method of claim 5, farther comprising generating a new index for said second set of data in response to determining that said pattern associated with said second set of data does not correspond to the pattern associated with said first set of data. 7. The method of claim 1, wherein determining said pattern associated with a first set of data comprises determining a first bit pattern map relating to a portion of a memory based upon a test. 8. The method of claim 7, wherein determining whether said pattern associated with said second set of data corresponds to the pattern associated with said first set of data comprises determining whether said pattern associated with a second bit pattern map is substantially similar to said first bit pattern map. 9. The method of claim 8, further comprising using said index to point to said first bit pattern map when a request to access said second bit map is received. 10. The method of claim 1, wherein associating said second set of data with said first set of data in said first database comprises providing one set of data that represents both said first set of data and said second set of data. 11. An apparatus, comprising: means for determining an error pattern associated with a first set of data, said first set of data relating to post-process data; means for storing said first set of data in a first database; means for determining whether the error pattern associated with a second set of data corresponds to the pattern associated with said first set of data; means for correlating an index associated with said first set of data, to said second set of data in response to determining that said pattern associated with said second set of data corresponds to the pattern associated with said first set of data; means for storing said index in a relational database, wherein said index may be used to associate said second set of data with said first set of data, in said first database; and means for providing said first set of data as an equivalent of said second set of data based upon said index. 12. A method, comprising: receiving manufacturing data relating to a first portion of a work piece, said manufacturing data relating to post-process data; determining a failure pattern associated with said data relating to said first portion of said work piece; storing said data relating to said first portion of said work piece in a first database; providing an index associated with said data relating to said first portion of said work piece; receiving manufacturing data relating to a second portion of said work piece; determining whether the failure pattern associated with said data relating to said second portion of said work piece corresponds to the failure pattern associated with said data relating to said first portion of said work piece; associating said index relating to said data relating to said second portion of said work piece to said data relating to said first portion of said work piece based upon a determination that the failure pattern associated with said second portion of said work piece corresponds to the failure pattern associated with said first portion of said work piece; storing said index in a relational database, wherein said index may be used to associate the data relating to said second portion with the data relating to said first portion, in said first database; and providing said data relating to said first portion as an equivalent of said data relating to the second portion based upon said index. 13. The method of claim 12, further comprising processing a subsequent work piece based upon an analysis of at least one of said data relating to said first portion of said work piece and data relating to said second portion of said work piece. 14. The method of claim 12, wherein receiving manufacturing data comprises receiving at least one of a metrology data and a test results data. 15. A method, comprising: receiving manufacturing data relating to a first work piece; determining a failure pattern associated with said manufacturing data relating to said first work piece; storing said manufacturing data relating to said first work piece using an index; receiving manufacturing data relating to a second work piece; determining whether the failure pattern associated with said manufacturing data relating to said second work piece corresponds to the failure pattern associated with said first work piece; associating said index for said manufacturing data relating to said first work piece, with said data relating to said second work piece based upon a determination that the failure pattern associated with said second work piece corresponds to the failure pattern associated with said first work piece, thereby equating said data relating to said first work piece and said data relating to said data relating second work piece; and storing said index in a relational database, wherein said index may be used to associate said manufacturing data relating to said second work piece to said manufacturing data relating to said first work piece, in said first database; and providing said manufacturing data relating to said first work piece as an equivalent of said manufacturing data relating to said second work piece based upon said index. 16. The method of claim 15, further comprising storing said first set of data in a first database and storing said index in a relational database associated with said first database. 17. The method of claim 16, further comprising processing a third work piece based upon an analysis of at least one of said data relating to said first work piece and data relating to said second work piece. 18. The method of claim 17, wherein receiving manufacturing data comprises receiving at least one of a metrology data, a wafer electrical test (WET) data, and a memory test data. 19. The method of claim 15, wherein determining said failure pattern associated with said manufacturing data relating to at least one of said first work piece and said second work piece comprises determining at least one memory bit map. 20. The method of claim 15, wherein associating said index for said manufacturing data relating to said first work piece, with said data relating to said second work piece comprises searching though a list of a plurality of indexes to match one of said plurality of indexes to said data relating to said second work piece. 21. The method of claim 15, wherein associating said manufacturing data relating to said second work piece to said manufacturing data relating to said first work piece comprises providing one set of data that represents both said manufacturing data relating to said first work piece and said manufacturing data relating to said second work piece. 22. A system, comprising: a processing tool to process a work piece; a measurement tool to acquire manufacturing data relating to said work piece, said manufacturing data comprising at least one of a metrology data and a test data indicative of a failure pattern; a first database; a relational database; and a controller to determine a failure pattern associated with a first portion of said work piece and a failure pattern associated with a second portion of said work piece, said controller to determine whether a failure pattern associated with said second portion of said work piece corresponds to said failure pattern associated with said first portion of said work piece, and associate an index for data relating to said failure pattern associated with first portion of said work piece, with data relating to said failure pattern associated with said second portion based upon a determination that the failure pattern associated with said second portion of said work piece corresponds to said failure pattern associated with said first portion of said work piece; and wherein said index is stored in said relational database, and wherein said controller to use said index to associate data relating to said failure pattern corresponding to said first and second portions of said work piece, in said first database and wherein the controller to provide said failure pattern corresponding to said first portion as an equivalent of the failure patter corresponding to the second portion. 23. The system of claim 22, wherein said processing tool to process a subsequent work piece. 24. The system of claim 22, further comprising: a fault detection unit to detect a fault based upon said manufacturing data; a pattern analyzer unit to determine a failure pattern associated with manufacturing data; and a pattern classification unit to classify said failure pattern to determine whether said failure pattern associated with said second portion of said work piece corresponds to said failure pattern associated with said first portion of said work piece. 25. The system of claim 22, wherein said controller also to perform at least one of a feedback adjustment and a feed-forward adjustment to a subsequent process based upon said manufacturing data. 26. The system of claim 22, wherein said work piece is a semiconductor wafer. 27. The system of claim 22, wherein said first and second portion of said work piece comprises memory arrays and wherein said failure pattern associated with at least one of said first portion and said second portion comprises a memory bit map. 28. The system of claim 22, wherein said control to associate data relating to said failure pattern corresponding to said first portion, with said failure pattern corresponding to said second portion, in said first database by providing one set of data that represents both said data relating to failure pattern corresponding to said first portion, and said failure pattern corresponding to said second portion. 29. A computer readable program storage device encoded with instructions that, when executed by a computer, performs a method, comprising: determining an error pattern associated with a first set of data, said first set of data relating to post-process data; storing said first set of data in a first database; determining whether the error pattern associated with a second set of data corresponds to the pattern associated with said first set of data; correlating an index associated with said first set of data, to said second set of data in response to determining that said pattern associated with said second set of data corresponds to the pattern associated with said first set of data; and storing said index in a relational database, wherein said index may be used to associate said second set of data with said first set of data, in said first database; and providing said first set of data as an equivalent of said second set of data based upon said index. 30. The computer readable program storage device encoded with instructions that, when executed by a computer, performs the method of claim 29, further comprising processing a subsequent work piece based upon analysis of said second set of data. 31. The computer readable program storage device encoded with instructions that, when executed by a computer, performs the method of claim 29, wherein said method further comprises: receiving a request for accessing said second set of data; and providing said first set of data as an equivalent of said second set of data based upon said index in response to said request. 32. The computer readable program storage device encoded with instructions that, when executed by a computer, performs the method of claim 29, wherein determining a pattern associated with said first set of data comprises determining a failure pattern associated with at least a portion of a semiconductor wafer. 33. The computer readable program storage device encoded with instructions that, when executed by a computer, performs the method of claim 29, wherein, associating said second set of data with said first set of data in said first database comprises providing one set of data that represents both said first set of data and said second set of data. 34. A method, comprising: determining an error pattern associated with a first set of data, said first set of data relating to processing a first workpiece; storing said first set of data in a first database; determining whether the error pattern associated with a second set of data corresponds to the pattern associated with said first set of data, said second set of data relating to processing a second workpiece; correlating an index associated with said first set of data, to said second set of data in response to determining that said pattern associated with said second set of data corresponds to the pattern associated with said first set of data; storing said index in a relational database, wherein said index may be used to associate said second set of data with said first set of data, in said first database; and providing said first set of data as an equivalent of said second set of data based upon said index in response to said request in response to receiving a request for accessing the second set of data.
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