Semiconductor device and method of fabricating the same
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
G02F-001/1339
G02F-001/13
출원번호
UP-0371917
(2006-03-10)
등록번호
US-7605902
(2009-11-10)
우선권정보
JP-11-191102(1999-07-06)
발명자
/ 주소
Hirakata, Yoshiharu
Goto, Yuugo
Kobayashi, Yuko
Yamazaki, Shunpei
출원인 / 주소
Semiconductor Energy Laboratory Co., Ltd.
대리인 / 주소
Nixon Peabody LLP
인용정보
피인용 횟수 :
16인용 특허 :
91
초록▼
There is provided a high quality liquid crystal panel having a thickness with high accuracy, which is designed, without using a particulate spacer, within a free range in accordance with characteristics of a used liquid crystal and a driving method, and is also provided a method of fabricating the s
There is provided a high quality liquid crystal panel having a thickness with high accuracy, which is designed, without using a particulate spacer, within a free range in accordance with characteristics of a used liquid crystal and a driving method, and is also provided a method of fabricating the same. The shape of a spacer for keeping a substrate interval constant is made such that it is a columnar shape, a radius R of curvature is 2 μm or less, a height H is 0.5 μm to 10 μm, a diameter is 20 μm or less, and an angle α is 65° to 115°. By doing so, it is possible to prevent the lowering of an opening rate and the lowering of light leakage due to orientation disturbance.
대표청구항▼
What is claimed is: 1. A display device comprising: a first substrate; a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor formed over the first substrate; an interlayer insulating film formed over the thin film transistor; a first alignment film formed over t
What is claimed is: 1. A display device comprising: a first substrate; a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor formed over the first substrate; an interlayer insulating film formed over the thin film transistor; a first alignment film formed over the interlayer insulating film; a second substrate opposed to the first substrate; a plurality of spacers formed over the second substrate; a second alignment film formed on the plurality of spacers and formed over the second substrate; and a liquid crystal material interposed between the first alignment film and the second alignment film; wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, and a center portion between the first end and the second end, wherein a width of the second end L2 and a width of the center portion L1 are set in the range of 0.8<L2/L1<3. wherein a radius of curvature of an edge between a upper surface and a side surface of each of the plurality of spacers is 2μm or less. 2. The display device according to claim 1, wherein each of the plurality of spacers is disposed for every six pixels of the plurality of the pixels. 3. The display device according to claim 1, wherein the plurality of spacers is disposed at a density of 10 to 200 ones per mm2. 4. The display device according to claim 1, wherein the width of the center portion is 20 μm or less. 5. A display device comprising: a touch panel; a back light; and a liquid crystal panel between the touch panel and the back light, comprising: a first substrate; a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor formed over the first substrate; an interlayer insulating film formed over the thin film transistor; a first alignment film formed over the interlayer insulating film; a second substrate opposed to the first substrate; a plurality of spacers formed over the second substrate; a second alignment film formed on the plurality of spacers and formed over the second substrate; and a liquid crystal material interposed between the first alignment film and the second alignment film; wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, and a center portion between the first end and the second end, wherein a width of the second end is larger than a width of the center portion, and wherein a taper portion is formed at the second end. 6. The display device according to claim 5, wherein the back light comprises LED. 7. The display device according to claim 5, wherein the touch panel comprises a light emitting element and a light receiving element. 8. The display device according to claim 5, wherein the touch panel comprises a pressure sensitive type detecting element. 9. The display device according to claim 5, wherein the touch panel comprises a capacitive type detecting element. 10. The display device according to claim 5, wherein each of the plurality of spacers comprises resin material. 11. The display device according to claim 5, wherein each of the plurality of spacers is disposed for every six pixels of the plurality of the pixels. 12. The display device according to claim 5, wherein the plurality of spacers is disposed at a density of 10 to 200 ones per mm2. 13. The display device according to claim 5, wherein the width of the center portion is 20 μm or less. 14. A display device comprising: a touch panel; a back light; and a liquid crystal panel between the touch panel and the back light, comprising: a first substrate; a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor formed over the first substrate; an interlayer insulating film formed over the thin film transistor; a first alignment film formed over the interlayer insulating film; a second substrate opposed to the first substrate; a conductive film formed over the second substrate; a plurality of spacers formed on the conductive film; a second alignment film formed on the plurality of spacers and formed on the conductive film; and a liquid crystal material interposed between the first alignment film and the second alignment film; wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, wherein a contact surface between the second alignment film and at least one of the plurality of the spacers is continuously connected to a contact surface between the second alignment film and the conductive film. 15. The display device according to claim 14, wherein the back light comprises LED. 16. The display device according to claim 14, wherein the touch panel comprises a light emitting element and a light receiving element. 17. The display device according to claim 14, wherein the touch panel comprises a pressure sensitive type detecting element. 18. The display device according to claim 14, wherein the touch panel comprises a capacitive type detecting element. 19. The display device according to claim 14, wherein each of the plurality of spacers comprises resin material. 20. The display device according to claim 14, wherein each of the plurality of spacers is disposed for every six pixels of the plurality of the pixels. 21. The display device according to claim 14, wherein the plurality of spacers is disposed at a density of 10 to 200 ones per mm2. 22. A display device comprising; a touch panel; a back light; and a liquid crystal panel between the touch panel and the back light, comprising: a first substrate; a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor formed over the first substrate; an interlayer insulating film formed over the thin film transistor; a first alignment film formed over the interlayer insulating film; a second substrate opposed to the first substrate; a plurality of spacers formed over the second substrate; a second alignment film formed on the plurality of spacers and formed over the second substrate; a liquid crystal material interposed between the first alignment film and the second alignment film; wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, a center portion between the first end and the second end, and a lower portion between the center portion and the second end, wherein an angle between a tangent plane at the center portion and a surface of the second substrate is larger than an angle between a tangent plane at the lower portion and the surface of the second substrate. 23. The display device according to claim 22, wherein the back light comprises LED. 24. The display device according to claim 22, wherein the touch panel comprises a light emitting element and a light receiving element. 25. The display device according to claim 22, wherein the touch panel comprises a pressure sensitive type detecting element. 26. The display device according to claim 22, wherein the touch panel comprises a capacitive type detecting element. 27. The display device according to claim 22, wherein each of the plurality of spacers comprises resin material. 28. The display device according to claim 22, wherein each of the plurality of spacers is disposed for every six pixels of the plurality of the pixels. 29. The display device according to claim 22, wherein the plurality of spacers is disposed at a density of 10 to 200 ones per mm2. 30. The display device according to claim 22, wherein the width of the center portion is 20 μm or less. 31. A display device comprising: a touch panel; a back light; and a liquid crystal panel between the touch panel and the back light, comprising: a first substrate; a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor formed over the first substrate; an interlayer insulating film formed over the thin film transistor; a first alignment film formed over the interlayer insulating film; a second substrate opposed to the first substrate; a plurality of spacers formed over the second substrate; a second alignment film formed on the plurality of spacers and formed over the second substrate; and a liquid crystal material interposed between the first alignment film and the second alignment film; wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, and a center portion between the first end and the second end, wherein a width of the second end L2 and a width of the center portion L1 are set in a range of 1<L2/L1<2.5. 32. The display device according to claim 31, wherein the back light comprises LED. 33. The display device according to claim 31, wherein the touch panel comprises a light emitting element and a light receiving element. 34. The display device according to claim 31, wherein the touch panel comprises a pressure sensitive type detecting element. 35. The display device according to claim 31, wherein the touch panel comprises a capacitive type detecting element. 36. The display device according to claim 31, wherein each of the plurality of spacers comprises resin material. 37. The display device according to claim 31, wherein each of the plurality of spacers is disposed for every six pixels of the plurality of the pixels. 38. The display device according to claim 31, wherein the plurality of spacers is disposed at a density of 10 to 200 ones per mm2. 39. The display device according to claim 31, wherein the width of the center portion is 20 μm or less. 40. A display device comprising: a first substrate; a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor formed over the first substrate; an interlayer insulating film formed over the thin film transistor; a first alignment film formed over the interlayer insulating film; a second substrate opposed to the first substrate; a plurality of spacers formed over the second substrate; a second alignment film formed on the plurality of spacers and formed over the second substrate; and a liquid crystal material interposed between the first alignment film and the second alignment film; wherein at least one of the plurality of the columnar spacers at least partly overlaps an active layer of the thin film transistor, wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, and a center portion between the first end and the second end, wherein a width of the second end is larger than a width of the center portion, and wherein a taper portion is formed at the second end. 41. The display device according to claim 40, wherein each of the plurality of spacers comprises resin material. 42. The display device according to claim 40, wherein each of the plurality of spacers is disposed for every six pixels of the plurality of the pixels. 43. The display device according to claim 40, wherein the plurality of spacers is disposed at a density of 10 to 200 ones per mm2. 44. The display device according to claim 41, wherein the width of the center portion is 20 μm or less. 45. A display device comprising: a first substrate; a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor formed over the first substrate; an interlayer insulating film formed over the thin film transistor; a first alignment film formed over the interlayer insulating film; a second substrate opposed to the first substrate; a conductive film formed over the second substrate; a plurality of spacers formed on the conductive film; a second alignment film formed on the plurality of spacers and formed on the conductive film; and a liquid crystal material interposed between the first alignment film and the second alignment film; wherein at least one of the plurality of the columnar spacers at least partly overlaps an active layer of the thin film transistor comprised in any one of the plurality of pixels, wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, wherein a contact surface between the second alignment film and at least one of the plurality of the spacers is continuously connected to a contact surface between the second alignment film and the conductive film. 46. The display device according to claim 45, wherein each of the plurality of spacers comprises resin material. 47. The display device according to claim 45, wherein each of the plurality of spacers is disposed for every six pixels of the plurality of pixels. 48. The display device according to claim 45, wherein the plurality of spacers is disposed at a density of 10 to 200 ones per mm2. 49. A display device comprising: a first substrate; a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor formed over the first substrate; an interlayer insulating film formed over the thin film transistor; a first alignment film formed over the interlayer insulating film; a second substrate opposed to the first substrate; a plurality of spacers formed over the second substrate; a second alignment film formed on the plurality of spacers and formed over the second substrate; a liquid crystal material interposed between the first alignment film and the second alignment film; wherein at least one of the plurality of the columnar spacers at least partly overlaps an active layer of the thin film transistor comprised in any one of the plurality of pixels, wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, a center portion between the first end and the second end, and a lower portion between the center portion and the second end, wherein an angle between a tangent plane at the center portion and a surface of the second substrate is larger than an angle between a tangent plane at the lower portion and the surface of the second substrate. 50. The display device according to claim 49, wherein each of the plurality of spacers comprises resin material. 51. The display device according to claim 49, wherein each of the plurality of spacers is disposed for every six pixels of the plurality of the pixels. 52. The display device according to claim 49, wherein the plurality of spacers is disposed at a density of 10 to 200 ones per mm2. 53. The display device according to claim 49, wherein the width of the center portion is 20 μm or less. 54. A display device comprising: a first substrate; a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor formed over the first substrate; an interlayer insulating film formed over the thin film transistor; a first alignment film formed over the interlayer insulating film; a second substrate opposed to the first substrate; a plurality of spacers formed over the second substrate; a second alignment film formed on the plurality of spacers and formed over the second substrate; and a liquid crystal material interposed between the first alignment film and the second alignment film; wherein at least one of the plurality of the columnar spacers at least partly overlaps an active layer of the thin film transistor comprised in any one of the plurality of pixels, wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, and a center portion between the first end and the second end, wherein a width of the second end L2 and a width of the center portion L1 are set in a range of 1<L2/L1<2.5. 55. The display device according to claim 54, wherein each of the plurality of spacers comprises resin material. 56. The display device according to claim 54, wherein each of the plurality of spacers is disposed for every six pixels of the plurality of the pixels. 57. The display device according to claim 54, wherein the plurality of spacers is disposed at a density of 10 to 200 ones per mm2. 58. The display device according to claim 54, wherein the width of the center portion is 20 μm or less. 59. A display device comprising: a first substrate; a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor comprising an active layer formed over the first substrate; an interlayer insulating film formed over the thin film transistor; an insulating film comprising organic resin formed over the interlayer insulating film; a first alignment film formed over the insulating film; a second substrate opposed to the first substrate; a plurality of spacers formed over the second substrate; a second alignment film formed over the second substrate and covering the plurality of spacers; and a liquid crystal material interposed between the first alignment film and the second alignment film, wherein at least one of the plurality of spacers at least partly overlaps with a channel formation region in the active layer, wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, wherein a width of the second end is larger than a width of the first end, and wherein an edge of the first end and the second end have curved portion. 60. The display device according to claim 59, a color filter is formed over the first substrate. 61. The display device according to claim 59, wherein each of the plurality of spacers comprises resin material. 62. A display device comprising: a first substrate; a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor formed over the first substrate; an interlayer insulating film formed over the thin film transistor; an insulating film comprising organic resin formed over the interlayer insulating film; a first alignment film formed over the insulating film; a second substrate opposed to the first substrate; a conductive film formed over the second substrate; a plurality of spacers formed over the conductive film; a second alignment film formed over the plurality of spacers and the conductive film; and a liquid crystal material interposed between the first alignment film and the second alignment film, wherein at least one of the plurality of spacers is directly contacted to both of the conductive film and the second alignment film, wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, wherein a width of the second end is larger than a width of the first end, and wherein an edge of the first end and the second end have curved portion. 63. The display device according to claim 62, a color filter is formed over the first substrate. 64. The display device according to claim 62, wherein the conductive film comprises ITO. 65. The display device according to claim 62, wherein each of the plurality of spacers comprises resin material. 66. A display device comprising: a first substrate; a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor comprising an active layer formed over the first substrate; an interlayer insulating film over the thin film transistor; an insulating film comprising organic resin over the interlayer insulating film; a first alignment film formed over the insulating film; a second substrate opposed to the first substrate; a conductive film formed over the second substrate; a plurality of spacers formed over the conductive film; a second alignment film formed over the plurality of spacers and the conductive film; and a liquid crystal material interposed between the first alignment film and the second alignment film, wherein at least one of the plurality of spacers is directly contacted with both of the conductive film and the second alignment film; wherein at least one of the plurality of spacers at least partly overlaps with a channel formation region in the active layer; wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate; wherein a width of the second end is larger than a width of the first end, and wherein edge of the first end and the second end has curved portion. 67. The display device according to claim 66, a color filter is formed over the first substrate. 68. The display device according to claim 66, wherein the conductive film comprises ITO. 69. The display device according to claim 66, wherein each of the plurality of spacer comprises resin material. 70. A display device comprising: a first substrate; a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor comprising an active layer over the first substrate; an interlayer insulating film formed over the thin film transistor; an insulating film comprising organic resin formed over the interlayer insulating film; a second substrate opposed to the first substrate; a conductive film formed between the insulating film and the second substrate; an alignment film; and a plurality of spacers, each of which is formed between the alignment film and the conductive film, and wherein each of the plurality of spacers is surrounded by the alignment film and the conductive film, and in direct contacts with both of the alignment film and the conductive film; wherein at least one of the plurality of spacers at least partly overlaps with a channel formation region in the active layer, wherein each of the plurality of spacers has a first end and a second end wherein a width of the second end is larger than a width of the first end, and wherein an edge of the first end and the second end have curved portion. 71. The display device according to claim 70, a color filter is formed over the first substrate. 72. The display device according to claim 70, wherein the conductive film comprises ITO. 73. The display device according to claim 70, wherein each of the plurality of spacer comprises resin material. 74. A display device comprising: a first substrate; a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor comprising an active layer formed over the first substrate; an interlayer insulating film formed over the thin film transistor; an insulating film comprising organic resin over the interlayer insulating film; a second substrate opposed to the first substrate; a conductive film formed between the insulating film and the second substrate; an alignment film; and a plurality of spacers, each of which is formed between the alignment film and the conductive film, wherein each of the plurality of spacers has a first end and a second end wherein the alignment film covers the first end and a side surface of each of the plurality of spacers, wherein the second end is in direct contact with the conductive film; wherein at least one of the plurality of spacers at least partly overlaps with a channel formation region in the active layer, wherein a width of the second end is larger than a width of the first end, and wherein an edge of the first end and the second end have curved intersected portion. 75. The display device according to claim 74, a color filter is formed over the first substrate. 76. The display device according to claim 74, wherein the conductive film comprises ITO. 77. The display device according to claim 74, wherein each of the plurality of spacers comprises resin material. 78. A display device comprising: a first substrate; a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor formed over the first substrate; an interlayer insulating film formed over the thin film transistor; an insulating film comprising organic resin formed over the interlayer insulating film; a first alignment film formed over the insulating film; a second substrate opposed to the first substrate; a light-shielding film formed over the second substrate; a plurality of spacers formed over the second substrate; a second alignment film formed over the plurality of spacers and the second substrate; and a liquid crystal material interposed between the first alignment film and the second alignment film, wherein at least one of the plurality of spacers at least partly overlaps with the the light-shielding film, wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, wherein a width of the second end is larger than a width of the first end, and wherein an edge of the first end and the second end have curved portion. 79. The display device according to claim 78, a color filter is formed over the first substrate. 80. A display device comprising: a first substrate; a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor formed over the first substrate; an interlayer insulating film formed over the thin film transistor; an insulating film comprising organic resin formed over the interlayer insulating film; a first alignment film formed over the insulating film; a second substrate opposed to the first substrate; a light-shielding film formed over the second substrate; a conductive film formed over the second substrate; a plurality of spacers formed over the conductive film; a second alignment film over the plurality of spacers and the conductive film; and a liquid crystal material interposed between the first alignment film and the second alignment film, wherein at least one of the plurality of spacers is directly contacted to both of the conductive film and the second alignment film; wherein at least one of the plurality of spacers at least partly overlaps with the light-shielding film, wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, wherein a width of the second end is larger than a width of the first end, and wherein an edge of the first end and the second end have curved portion. 81. The display device according to claim 80, a color filter is formed over the first substrate. 82. The display device according to claim 80, wherein the conductive film comprises ITO. 83. The display device according to claim 80, wherein each of the plurality of spacers comprises resin material. 84. A display device comprising: a first substrate; a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor formed over the first substrate; an interlayer insulating film formed over the thin film transistor; an insulating film comprising organic resin over the interlayer insulating film; a second substrate opposed to the first substrate; a light-shielding film formed over the second substrate; a conductive film formed between the insulating film and the second substrate; an alignment film; and a plurality of spacers, each of which is formed between the alignment film and the conductive film, and wherein each of the plurality of spacers is surrounded by the alignment film and the conductive film, and in direct contacts with both of the alignment film and the conductive film, wherein at least one of the plurality of spacers at least partly overlaps with the light-shielding film, wherein each of the plurality of spacers has a first end and a second end, wherein a width of the second end is larger than a width of the first end, and wherein an edge of the first end and the second end have curved intersected portion. 85. The display device according to claim 84, a color filter is formed over the first substrate. 86. The display device according to claim 84, wherein the conductive film comprises ITO. 87. The display device according to claim 84, wherein each of the plurality of spacer comprises resin material. 88. A display device comprising: a first substrate; a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor formed over the first substrate; an interlayer insulating film formed over the thin film transistor; an insulating film comprising organic resin formed over the interlayer insulating film; a second substrate opposed to the first substrate; a light-shielding formed over the second substrate; a conductive film formed between the insulating film and the second substrate; an alignment film; and a plurality of spacers, each of which is formed between the alignment film and the conductive film, and wherein each of the plurality of spacers has a first end and a second end, wherein the alignment film covers the first end and a side surface of each of the plurality of spacers; wherein the second end is in direct contact with the conductive film; wherein at least one of the plurality of spacers at least partly overlaps with the light-shielding film, wherein a width of the second end is larger than a width of the first end, and wherein an edge of the first end and the second end have curved portion. 89. The display device according to claim 88, a color filter is formed over the first substrate. 90. The display device according to claim 88, wherein the conductive film comprises ITO. 91. The display device according to claim 88, wherein each of the plurality of spacers comprises resin material.
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