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Apparatus and method for probing integrated circuits using laser illumination

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01B-011/00
출원번호 UP-0169423 (2005-06-29)
등록번호 US-7616312 (2009-11-23)
발명자 / 주소
  • Kasapi, Steven
  • Wilsher, Kenneth
  • Woods, Gary
  • Lo, William
  • Ispasoiu, Radu
  • Nataraj, Nagamani
  • Boiadjieva, Nina
출원인 / 주소
  • DCG Systems, Inc.
대리인 / 주소
    Nixon Peabody LLP
인용정보 피인용 횟수 : 6  인용 특허 : 49

초록

An apparatus and method for laser probing of a DUT at very high temporal resolution is disclosed. The system includes a CW laser source, a beam optics designed to point two orthogonally polarized beams at the same location on the DUT, optical detectors for detecting the reflected beams, collection e

대표청구항

What is claimed is: 1. A system for testing an integrated circuit microchip including a plurality of devices using laser probing, comprising: a laser source providing a laser beam; a beam optics wherein the beam optics comprises a Faraday rotator that rotates a polarization direction of an incident

이 특허에 인용된 특허 (49)

  1. Davidson Mark (807 Rorke Way Palo Alto CA 94303), Aplanatic microlens and method for making same.
  2. Batchelder John S. (Somers NY) Hobbs Philip C. D. (Briarcliff Manor NY) Taubenblatt Marc A. (Pleasantville NY), Apparatus and a method for high numerical aperture microscopic examination of materials.
  3. Batchelder John S. (Somers NY) Hobbs Philip C. D. (Briarcliff Manor NY) Taubenblatt Marc A. (Pleasantville NY) Cooper Douglas W. (Millwood NY), Apparatus and a method for high numerical aperture microscopic examination of materials.
  4. Talbot, Christopher G.; Lo, Chiwoei Wayne, Apparatus for detecting defects in patterned substrates.
  5. Noguchi Minori (Yokohama JPX) Otsubo Toru (Fujisawa JPX) Aiuchi Susumu (Yokohama JPX), Apparatus for measuring the depth of fine engraved patterns.
  6. Rao Valluri Ramana M., Apparatus for performing quantitative measurement of DC and AC current flow in integrated circuit interconnects by meas.
  7. Vickers, James S., Avalanche photodiode for photon counting applications and method thereof.
  8. Vickers, James S., Avalanche photodiode for photon counting applications and method thereof.
  9. William K. Lo, Beam delivery and imaging for optical probing of a device operating under electrical test.
  10. Pakdaman, Nader; Vickers, James S., Bi-convex solid immersion lens.
  11. Pakdaman, Nader; Vickers, James S., Bi-convex solid immersion lens.
  12. Temple Paul A. (Ridgecrest CA), Dark field surface inspection illumination technique.
  13. Kakuchi Osamu (Kawasaki JPX) Ban Mikichi (Yokohama JPX), Depth/height measuring device.
  14. Stolte, Ralf; Ziegler, Patrick, Determination of optical properties of a device under test in transmission and in reflection.
  15. Kasapi Steven A. ; Tsao Chun-Cheng ; Somani Seema, Differential pulsed laser beam probing of integrated circuits.
  16. Wilsher Kenneth R. ; Rajan Suresh N. ; Lo William K., Dual-laser voltage probing of IC's.
  17. Fumio Akikuni JP; Katsushi Ohta JP; Tadao Nagatsuma JP; Mitsuru Shinagawa JP; Junzo Yamada JP, Electro-optic sampling probe and a method for adjusting the same.
  18. Akikuni Fumio,JPX ; Ohta Katsushi,JPX ; Nagatsuma Tadao,JPX ; Shinagawa Mitsuru,JPX ; Yamada Junzo,JPX, Electro-optic sampling probe having unit for adjusting quantity of light incident on electro-optic sampling optical system module.
  19. Khurana Neeraj (Los Gatos CA), Emission microscope.
  20. Hakimi, Farhad; Hakimi, Hosain, Fast optical wavelength shifter.
  21. Baumann Hans-Georg (Jena DDX), Front lens group for immersion microscope objective in BD versions of high aperture.
  22. Khurana Neeraj (Los Gatos CA), Image emission microscope with improved image processing capability.
  23. Cowan, Joseph W., Interconnector and method of connecting probes to a die for functional analysis.
  24. Burke John T. (Hockessin DE), Investment casting technique for the formation of metal matrix composite bodies and products produced thereby.
  25. Bruce, Michael; Dabney, Gregory A.; Muthupalaniappan, Palaniappan; Chin, Jiann Min; Wilcox, Richard Jacob; Gilfeather, Glen; Davis, Brennan; Phang, Jacob; Chua, Choon Meng; Koh, Lian Ser; Ng, Hoo-Yin, Laser beam induced phenomena detection.
  26. Shiragasawa Tsuyoshi (Neyagawa JPX) Noyori Masaharu (Neyagawa JPX), Laser probing for solid-state device.
  27. Madarasz, Frank L.; Engelhaupt, Darell; Inguva, Ramarao; Krivoshik, David P.; Milelli, R. Joseph; Wyly, James K., Measurement, data acquisition, and signal processing.
  28. Case, William R.; Johnson, Wildey E., Method and apparatus for measuring thickness of epitaxial layer by infrared reflectance.
  29. Bosacchi Bruno (Montgomery NJ) Oehrle Robert C. (Edgewater Park NJ), Method and apparatus for nondestructively determining the characteristics of a multilayer thin film structure.
  30. Winer Paul ; Paniccia Mario J., Method and apparatus for synchronizing a mode locked laser with a device under test.
  31. Paniccia Mario J. ; Rao Valluri R., Method and apparatus using an infrared laser based optical probe for measuring electric fields directly from active regi.
  32. Paniccia Mario J. ; Rao Valluri R. M. ; Yee Wai Mun,MYX, Method and apparatus using an infrared laser based optical probe for measuring voltages directly from active regions in an integrated circuit.
  33. Heinrich Harley K. (Mulpitas CA) Bloom David M. (Menlo Park CA), Method and means for optical detection of charge density modulation in a semiconductor.
  34. Paniccia Mario J., Method for cooling the backside of a semiconductor device using an infrared transparent heat slug.
  35. Knowles James L. (Pleasanton CA) Pantzar ; deceased Jan E. G. (late of Mountain View CA) Lindfors ; administrator by P. J. C. (San Francisco CA), Method for non-contact xyz position sensing.
  36. Paniccia Mario J., Method for testing an integrated circuit device.
  37. Soelkner Gerald (Ottobrunn DEX), Method for the optical measurement of electrical potentials.
  38. Talbot Christopher G. ; Lo Chiwoei Wayne, Method of detecting defects in patterned substrates.
  39. Kino Gordon S. (Santa Clara County CA) Mansfield Scott M. (San Mateo County CA), Near field and solid immersion optical microscope.
  40. Sakai Ikuo (Shizuoka JPX), Non-contact type probe and non-contact type voltage measuring apparatus, wherein the probe\s irradiation surface is coat.
  41. Kash Jeffrey Alan ; Tsang James Chen-Hsiang, Noninvasive optical method for measuring internal switching and other dynamic parameters of CMOS circuits.
  42. Plies Erich (Munich DEX), Objective lens for producing a radiation focus in the inside of a specimen.
  43. Hagner Willi (Solms Leihgestern DEX) Thaer Andreas (Leihgestern DEX) Bigar Francis (Zurich DEX), Optical arrangement for the reflecting microscopic examination of an object.
  44. Noriyuki Toriyama JP; Toshiyuki Yagi JP; Tadao Nagatsuma JP, Probe for electro-optic sampling oscilloscope.
  45. Cader, Tahir; Stoddard, Nathan; Tilton, Donald; Pakdaman, Nader; Kasapi, Steven, Spray cooling and transparent cooling plate thermal management system.
  46. Sobolewski, Roman; Gol'tsman, Grigory N.; Semenov, Alexey D.; Okunev, Oleg V.; Wilsher, Kenneth R.; Kasapi, Steven A., Superconducting single photon detector.
  47. Xiao Guoqing ; Paniccia Mario John, System and method for optically determining the temperature of a test object.
  48. Cotton, Daniel Murdoch; Pakdaman, Nader; Vickers, James Squire; Wong, Thomas, Time resolved non-invasive diagnostics system.
  49. Hurley Daniel T. (San Ramon CA) Chiang Ching-Lang (San Jose CA) Khurana Neeraj (Monte Sereno CA), Transportable image emission microscope.

이 특허를 인용한 특허 (6)

  1. Groneberg, Horst E.; Xiao, Guoqing; Kuchibhotla, Krishna, Adjustable split-beam optical probing (ASOP).
  2. Serrels, Keith; Sabbineni, Prasad; Vickers, James S., Apparatus and method for polarization diversity imaging and alignment.
  3. Nakamura, Tomonori; Hirai, Nobuyuki, Apparatus for inspecting integrated circuit.
  4. Ross, Larry; Bruce, Michael, At-speed integrated circuit testing using through silicon in-circuit logic analysis.
  5. Vickers, James S., Systems and method for laser voltage imaging.
  6. Beutler, Joshua; Clement, John Joseph; Miller, Mary A.; Stevens, Jeffrey; Cole, Jr., Edward I., Visible light laser voltage probing on thinned substrates.
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