Methods of fabricating glass-based substrates and apparatus employing same
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
H01L-027/01
H01L-027/12
H01L-031/0392
H01L-031/036
출원번호
UP-0788570
(2007-04-20)
등록번호
US-7619283
(2009-11-27)
발명자
/ 주소
Gadkaree, Kishor Purushottam
출원인 / 주소
Corning Incorporated
대리인 / 주소
Watson, Bruce P.
인용정보
피인용 횟수 :
6인용 특허 :
5
초록▼
Methods and apparatus provide for a glass or glass ceramic substrate, including: a bulk layer; an enhanced positive ion concentration layer; and a reduced positive ion concentration layer, wherein the enhanced positive ion concentration layer contains substantially all modifier positive ions from th
Methods and apparatus provide for a glass or glass ceramic substrate, including: a bulk layer; an enhanced positive ion concentration layer; and a reduced positive ion concentration layer, wherein the enhanced positive ion concentration layer contains substantially all modifier positive ions from the reduced positive ion concentration layer as a result of migration, the substrate does not include any further material thereon.
대표청구항▼
The invention claimed is: 1. An apparatus, comprising: a glass or glass ceramic substrate, the glass or glass ceramic substrate including, in order, a bulk layer, an enhanced positive ion concentration layer, and a reduced positive ion concentration layer, where the enhanced positive ion concentrat
The invention claimed is: 1. An apparatus, comprising: a glass or glass ceramic substrate, the glass or glass ceramic substrate including, in order, a bulk layer, an enhanced positive ion concentration layer, and a reduced positive ion concentration layer, where the enhanced positive ion concentration layer contains substantially all modifier positive ions from the reduced positive ion concentration layer as a result of migration; and a conductive or semiconductive oxide layer adjacent to the reduced positive ion concentration layer of the glass or glass ceramic substrate, wherein the apparatus does not include any further material on the oxide layer. 2. The apparatus of claim 1, wherein the enhanced positive ion concentration layer includes at least one alkali/alkaline earth modifier ion that has migrated away from the reduced positive ion concentration layer. 3. The apparatus of claim 2, wherein the reduced positive ion concentration layer is substantially depleted of all alkali/alkaline-earth ions. 4. The apparatus of claim 3, wherein the alkali/alkaline-earth ions include at least one of: Li+1, Na+1, K+1, Cs+1, Mg+2, Ca+2, Sr+2, and/or Ba+2. 5. The apparatus of claim 1, wherein the reduced modifier positive ion concentration layer includes one or more network forming ions. 6. A glass or glass ceramic substrate, comprising: a bulk layer; an enhanced positive ion concentration layer; and a reduced positive ion concentration layer, wherein the enhanced positive ion concentration layer contains substantially all modifier positive ions from the reduced positive ion concentration layer as a result of migration, the glass or glass ceramic substrate does not include any further material thereon. 7. A glass or glass ceramic substrate, comprising: an enhanced positive ion concentration layer; and a reduced positive ion concentration layer, wherein the enhanced positive ion concentration layer contains substantially all modifier positive ions from the reduced positive ion concentration layer as a result of migration, and the glass or glass ceramic substrate does not include any further material thereon. 8. The glass or glass ceramic substrate of claim 7, wherein the enhanced positive ion concentration layer includes at least one alkali/alkaline earth modifier ion that has migrated away from the reduced positive ion concentration layer. 9. The glass or glass ceramic substrate of claim 8, wherein the reduced positive ion concentration layer is substantially depleted of all alkali/alkaline-earth ions. 10. The glass or glass ceramic of claim 9, wherein the alkali/alkaline-earth ions include at least one of: Li+1, Na+1, K+1, Cs+1, Mg+2, Ca+2, Sr+2, and/or Ba+2. 11. The glass or glass ceramic substrate of claim 7, wherein the reduced modifier positive ion concentration layer includes one or more network forming ions. 12. The glass or glass ceramic substrate of claim 6, wherein the enhanced positive ion concentration layer includes at least one alkali/alkaline earth modifier ion that has migrated away from the reduced positive ion concentration layer. 13. The glass or glass ceramicsubstrate of claim 12, wherein the reduced positive ion concentration layer is substantially depleted of all alkali/alkaline-earth ions. 14. The glass or glass ceramicsubstrate of claim 13, wherein the alkali/alkaline-earth ions include at least one of: Li+1, Na+1, K+1, Cs+1, Mg+2, Ca+2, Sr+2, and/or Ba+2. 15. The glass or glass ceramic substrate of claim 6, wherein the reduced modifier positive ion concentration layer includes one or more network forming ions. 16. The glass or glass ceramic substrate of claim 12, wherein the reduced positive ion concentration layer is substantially depleted of all alkali/alkaline-earth ions. 17. The glass or glass ceramic substrate of claim 16, wherein the alkali/alkaline-earth ions include at least one of: Li+1, Na+1, K+1, Cs+1, Mg+2, Ca+2, Sr+2, and/or Ba+2.
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이 특허에 인용된 특허 (5)
Couillard,James G.; Gadkaree,Kishor P.; Mach,Joseph F., Glass-based SOI structures.
Dejneka, Matthew John; Gomez, Sinue; Hu, Guangli; Smith, Charlene Marie; Tang, Zhongzhi; Tietje, Steven Alvin, Glass-based articles including a metal oxide concentration gradient.
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