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Chucking system comprising an array of fluid chambers

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B29C-059/00
  • G03B-027/64
출원번호 UP-0690480 (2007-03-23)
등록번호 US-7635263 (2010-01-08)
발명자 / 주소
  • Cherala, Anshuman
  • Choi, Byung Jin
  • Lad, Pankaj B.
  • Shackleton, Steven C.
출원인 / 주소
  • Molecular Imprints, Inc.
대리인 / 주소
    Wood, Laura C.
인용정보 피인용 횟수 : 16  인용 특허 : 117

초록

The present invention is directed towards a chucking system to hold a substrate, said system including, inter alia, a chuck body having first and second opposed sides, said first side including an array of fluid chambers arranged in rows and columns, said fluid chambers each comprising first and sec

대표청구항

What is claimed is: 1. A chucking system to hold a first portion of a substrate and simultaneously bow a second portion of the substrate, comprising: a chuck body having first and second opposed sides, the first side including an array of fluid chambers arranged in rows and columns, the array of fl

이 특허에 인용된 특허 (117)

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이 특허를 인용한 특허 (16)

  1. Durst, David I.; Kaish, Norman; Fraser, Jay, Authentication method and system.
  2. Fraser, Jay, Authentication method and system.
  3. Babbs, Daniel A.; Choi, Byung-Jin; Cherala, Anshuman, Chucking system for nano-manufacturing.
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  7. Hirai, Yuma; Minoura, Kiyoshi; Nomura, Fumiyasu, Method and device for manufacturing sheet having fine shape transferred thereon.
  8. Hirai, Yuma; Minoura, Kiyoshi; Nomura, Fumiyasu, Method and device for manufacturing sheet having fine shape transferred thereon.
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  14. Im, Se-Hyuk; GanapathiSubramanian, Mahadevan; Fletcher, Edward Brian; Khusnatdinov, Niyaz; Schmid, Gerard M.; Meissl, Mario Johannes; Cherala, Anshuman; Xu, Frank Y.; Choi, Byung-Jin; Sreenivasan, Sidlgata V., Safe separation for nano imprinting.
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  16. Khusnatdinov, Niyaz; Xu, Frank Y.; Meissl, Mario Johannes; Miller, Michael N.; Thompson, Ecron D.; Schmid, Gerard M.; Nimmakayala, Pawan Kumar; Lu, Xiaoming; Choi, Byung-Jin, Strain and kinetics control during separation phase of imprint process.
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