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System and method for increasing yield from semiconductor wafer electroplating 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C25D-007/00
  • C25D-021/00
  • C25D-005/00
출원번호 UP-0078179 (2005-03-10)
등록번호 US-7641776 (2010-02-11)
발명자 / 주소
  • Nagar, Mohan
  • Shah, Shirish
출원인 / 주소
  • LSI Corporation
대리인 / 주소
    Cochran, William W.
인용정보 피인용 횟수 : 35  인용 특허 : 2

초록

A system and method increase yield from semiconductor wafer electroplating. The aspects include a semiconductor wafer, the semiconductor wafer comprising a plurality of die areas. A plating ring for holding the semiconductor wafer in position during electroplating is also included, the plating ring

대표청구항

We claim: 1. A system for increasing yield from semiconductor wafer electroplating, the system comprising: a plating ring for holding a semiconductor wafer in position during electroplating, the semiconductor wafer comprising a plurality of die areas, the plating ring substantially surrounding a ci

이 특허에 인용된 특허 (2)

  1. Zimmerman,Nolan; Wilson,Gregory J.; Eudy,Steve L., Contact assemblies for electrochemical processing of microelectronic workpieces and method of making thereof.
  2. Okada Norio,JPX, Semiconductor device and method of manufacturing the same.

이 특허를 인용한 특허 (35)

  1. Cheng, Weiguo; Broadus, Katherine M; Smoron, Dorota; Wilson, Shawnee M, Anionic preflocculation of fillers used in papermaking.
  2. He, Zhian, Anisotropic high resistance ionic current source (AHRICS).
  3. Kagajwala, Burhanuddin; Buckalew, Bryan L.; Chua, Lee Peng; Berke, Aaron; Rash, Robert; Mayer, Steven T., Apparatus and method for electrodeposition of metals with the use of an ionically resistive ionically permeable element having spatially tailored resistivity.
  4. Buckalew, Bryan L.; Mayer, Steven T.; Porter, David; Ponnuswamy, Thomas A., Apparatus for advanced packaging applications.
  5. Buckalew, Bryan L.; Mayer, Steven T.; Porter, David; Ponnuswamy, Thomas A., Apparatus for advanced packaging applications.
  6. He, Zhian; Zhou, Jian; Feng, Jingbin; Reid, Jonathan D.; Ghongadi, Shantinath, Control of electrolyte flow dynamics for uniform electroplating.
  7. Mayer, Steven T.; Porter, David W., Control of electrolyte hydrodynamics for efficient mass transfer during electroplating.
  8. Mayer, Steven T.; Porter, David W., Control of electrolyte hydrodynamics for efficient mass transfer during electroplating.
  9. Mayer, Steven T.; Porter, David W.; Goh, Edwin; Buckalew, Bryan L.; Rash, Robert, Control of electrolyte hydrodynamics for efficient mass transfer during electroplating.
  10. Abraham, Richard; Mayer, Steven T.; Buckalew, Bryan L.; Rash, Robert, Cross flow manifold for electroplating apparatus.
  11. Abraham, Richard; Mayer, Steven T.; Buckalew, Bryan L.; Rash, Robert, Cross flow manifold for electroplating apparatus.
  12. Graham, Gabriel Hay; Hiester, Jacob Lee; Chua, Lee Peng; Buckalew, Bryan L., Dynamic modulation of cross flow manifold during electroplating.
  13. Graham, Gabriel Hay; Buckalew, Bryan L.; Mayer, Steven T.; Rash, Robert; Fortner, James Isaac; Chua, Lee Peng, Edge flow element for electroplating apparatus.
  14. Mayer, Steven T.; Porter, David; Rash, Robert, Electroplating flow shaping plate having offset spiral hole pattern.
  15. Mayer, Steven T.; Buckalew, Bryan L.; Fu, Haiying; Ponnuswamy, Thomas; Diaz Camilo, Hilton; Rash, Robert; Porter, David W., Enhancement of electrolyte hydrodynamics for efficient mass transfer during electroplating.
  16. Mayer, Steven T.; Buckalew, Bryan L.; Fu, Haiying; Ponnuswamy, Thomas; Diaz Camilo, Hilton; Rash, Robert; Porter, David W., Enhancement of electrolyte hydrodynamics for efficient mass transfer during electroplating.
  17. Mayer, Steven; Feng, Jingbin; He, Zhian; Reid, Jonathan; Varadarajan, Seshasayee, Method and apparatus for electroplating.
  18. Mayer, Steven; Feng, Jingbin; He, Zhian; Reid, Jonathan; Varadarajan, Seshasayee, Method and apparatus for electroplating.
  19. Mayer, Steven; Feng, Jingbin; He, Zhian; Reid, Jonathan; Varadarajan, Seshasayee, Method and apparatus for electroplating.
  20. Reid, Jonathan; Buckalew, Bryan; He, Zhian; Park, Seyang; Varadarajan, Seshasayee; Pennington, Bryan; Ponnuswamy, Thomas; Breling, Patrick; Ibarreta, Glenn; Mayer, Steven, Method and apparatus for electroplating.
  21. Mayer, Steven T; Reid, Jonathan D., Method of electroplating using a high resistance ionic current source.
  22. Zhao, Yulin; Li, Jun; Rao, Qing Long; Ashton, Stephen; Cheng, Weiguo; Todorovic, Aleksandar; Smith, Alan, Method of improving dewatering efficiency, increasing sheet wet web strength, increasing sheet wet strength and enhancing filler retention in papermaking.
  23. Zhao, Yulin; Li, Jun; Rao, Qing Long; Ashton, Stephen; Cheng, Weiguo; Todorovic, Aleksandar; Smith, Alan, Method of improving dewatering efficiency, increasing sheet wet web strength, increasing sheet wet strength and enhancing filler retention in papermaking.
  24. Zhao, Yulin; Li, Jun; Rao, Qing Long; Cheng, Weiguo, Method of improving dewatering efficiency, increasing sheet wet web strength, increasing sheet wet strength and enhancing filler retention in papermaking.
  25. Castro, David J.; Lowe, Robert M.; Liu, Mei, Method of increasing paper bulk strength by using a diallylamine acrylamide copolymer in a size press formulation containing starch.
  26. Benz, Bradley; Richardson, Paul F.; Thomas, James L.; Liu, Mei; Lowe, Robert M., Method of increasing paper strength.
  27. Zhao, Yulin; Li, Jun; Rao, Qing Long; Cheng, Weiguo, Method to increase dewatering, sheet wet web strength and wet strength in papermaking.
  28. Mayer, Steven; Ghongadi, Shantinath; Ganesan, Kousik; He, Zhian; Feng, Jingbin, Plating method and apparatus with multiple internally irrigated chambers.
  29. Chengara, Anoop; Montag, Jordan, Use of emulsion polymers to flocculate solids in organic liquids.
  30. Castro, David A.; Karnati, Rangarani; Wilson, Shawnee M.; Cheng, Weiguo; Liu, Mei; Zhang, Zhiyi, Use of nanocrystaline cellulose and polymer grafted nanocrystaline cellulose for increasing retention in papermaking process.
  31. Castro, David A.; Karnati, Rangarani; Wilson, Shawnee M.; Cheng, Weiguo; Liu, Mei; Zhang, Zhiyi, Use of nanocrystaline cellulose and polymer grafted nanocrystaline cellulose for increasing retention in papermaking process.
  32. Castro, David J.; Karnati, Rangarani; Wilson, Shawnee M.; Cheng, Weiguo; Liu, Mei; Zhang, Zhiyi, Use of nanocrystaline cellulose and polymer grafted nanocrystaline cellulose for increasing retention in papermaking process.
  33. Castro, David J.; Karnati, Rangarani; Wilson, Shawnee M.; Cheng, Weiguo; Liu, Mei; Zhang, Zhiyi, Use of nanocrystaline cellulose and polymer grafted nanocrystaline cellulose for increasing retention, wet strength, and dry strength in papermaking process.
  34. Cheng, Weiguo; Liu, Mei; Furman, Gary S.; Lowe, Robert M., Wet end chemicals for dry end strength in paper.
  35. Cheng, Weiguo; Liu, Mei; Furman, Jr., Gary S.; Lowe, Robert M., Wet end chemicals for dry end strength in paper.
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