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Method for making a transducer 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/58
출원번호 UP-0426310 (2009-04-20)
등록번호 US-7642115 (2010-02-11)
발명자 / 주소
  • Eriksen, Odd Harald Steen
  • Childress, Kimiko J.
  • Guo, Shuwen
출원인 / 주소
  • Rosemount Aerospace Inc.
대리인 / 주소
    Thompson Hine LLP
인용정보 피인용 횟수 : 12  인용 특허 : 73

초록

A method for forming a transducer including the step of providing a semiconductor-on-insulator wafer including first and second semiconductor layers separated by an electrically insulating layer. The method further includes depositing or growing a piezoelectric film or piezoresistive film on the waf

대표청구항

What is claimed is: 1. A method for forming a transducer comprising the steps of: providing a semiconductor-on-insulator wafer including first and second semiconductor layers separated by an electrically insulating layer; depositing or growing a piezoelectric or piezoresistive film on said wafer; d

이 특허에 인용된 특허 (73)

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이 특허를 인용한 특허 (12)

  1. Trautmann, Achim; Feyh, Ando, Arrangement of two substrates having an SLID bond and method for producing such an arrangement.
  2. Gamage, Sisira Kankanam, Catheter die.
  3. Gamage, Sisira Kankanam, Catheter die and method of fabricating the same.
  4. Boysel, Robert Mark; Ross, Louis, Integrated MEMS system.
  5. Najafi, Khalil; Aktakka, Ethem Erkan; Kim, Hanseup, Method of making a thin film device.
  6. Fujiwara, Masaki, Method of producing component board.
  7. Hooper, Stephen R.; Daniels, Dwight L.; MacDonald, James D.; McDonald, William G.; Xia, Chunlin C., Methods for fabricating sensor device package using a sealing structure.
  8. Okojie, Robert S, Modular apparatus and method for attaching multiple devices.
  9. Okojie, Robert S., Modular apparatus and method for attaching multiple devices.
  10. Jones, Ryan; Rozgo, Paul; Sorenson, Richard Charles, Pressure sensor.
  11. Lin, Yizhen, Sensor device and related fabrication methods.
  12. Hooper, Stephen R.; Daniels, Dwight L.; MacDonald, James D.; McDonald, William G.; Xia, Chunlin C., Sensor device with sealing structure.
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