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Method and system for sealing a substrate 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/44
  • H01L-021/48
  • H01L-021/50
출원번호 UP-0779185 (2007-07-17)
등록번호 US-7642127 (2010-02-11)
발명자 / 주소
  • Floyd, Philip
출원인 / 주소
  • Qualcomm Mems Technologies, Inc.
대리인 / 주소
    Knobbe, Martens, Olson & Bear LLP
인용정보 피인용 횟수 : 2  인용 특허 : 75

초록

A method of sealing a microelectromechanical system (MEMS) device from ambient conditions is described, wherein the MEMS device is formed on a substrate and a substantially hermetic seal is formed as part of the MEMS device manufacturing process. The method comprises forming a metal seal on the subs

대표청구항

What is claimed is: 1. A method of sealing a microelectromechanical system (“MEMS”) device from ambient conditions, comprising: providing a substrate comprising a MEMS device; forming a metal seal on the substrate, wherein forming the metal seal comprises forming an insulator layer on

이 특허에 인용된 특허 (75)

  1. Kothari,Manish; Cummings,William J., Altering temporal response of microelectromechanical elements.
  2. Hornbeck Larry J. (Van Alstyne TX), Architecture and process for integrating DMD with control circuit substrates.
  3. Hornbeck Larry J. (Van Alstyne TX), Architecture and process for integrating DMD with control circuit substrates.
  4. Hornbeck Larry J. (Van Alstyne TX), Architecture and process for integrating DMD with control circuit substrates.
  5. Peterson, Kenneth A.; Watson, Robert D., Bi-level microelectronic device package with an integral window.
  6. Kenneth A. Peterson ; Robert D. Watson, Bi-level multilayered microelectronic device package with an integral window.
  7. Hayashi, Hiroaki; Kandori, Toshio; Fukushima, Yoshiaki, Cellular glass coated with a heat insulator.
  8. Sharp Gary D. (Boulder CO) Johnson Kristina M. (Longmont CO) Freeman Mark O. (Hsinchu TWX), Chiral smectic liquid crystal optical modulators having variable retardation.
  9. Anderson James E. (Ann Arbor MI) Markovac Vlado (Lathrup Village MI) Troyk Philip R. (Morton Grove IL), Composite polymer/desiccant coatings for IC encapsulation.
  10. Greenlee Thomas W. (Shaker Heights OH), Dimensionally stable sealant and spacer strip and composite structures comprising the same.
  11. Miles,Mark W., Directly laminated touch sensitive screen.
  12. Tayebati Parviz, Electrically tunable optical filter utilizing a deformable multi-layer mirror.
  13. Nelson William E. (Dallas TX), Electrostatically controlled beam steering device and method.
  14. Shores A. Andrew (212 Carroll Canal Venice CA 90291), Enclosure for electronic devices.
  15. Pan,Shaoher X.; Yang,Xiao (Charles), Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge.
  16. Cole Barrett E. (Bloomington MN) Fritz Bernard S. (Eagan MN) Horning Robert D. (Burnsville MN), Fabry-Perot micro filter-detector.
  17. McCann, David, Flip-chip micromachine package using seal layer.
  18. Kothari, Manish; Chui, Clarence, Hermetic seal and method to create the same.
  19. Kothari,Manish; Chui,Clarence, Hermetic seal and method to create the same.
  20. Bolt L. Gordon (Playa del Rey CA), Holographic combiner edge seal design and composition.
  21. Pohlmann, Thomas; Schwamb, Michael, Hot-melt adhesive for sealing the edge of laminated glass.
  22. Harvey Martin,BEX ; Rueckeshaeuser Karl-Heinz,DEX ; Hautekeer Jean-Paul,BEX ; Wolf Andreas,BEX, Insulating glass units.
  23. Miles Mark W., Interferometric modulation.
  24. Miles Mark W., Interferometric modulation.
  25. Miles, Mark W., Interferometric modulation of radiation.
  26. Miles, Mark W., Interferometric modulation of radiation.
  27. Miles, Mark W., Interferometric modulation of radiation.
  28. Miles,Mark W., Interferometric modulation of radiation.
  29. Chui,Clarence, Interferometric modulators having charge persistence.
  30. Burton ; Henry W. G., Kit for converting single-glazed window to double-glazed window.
  31. Wagner,William R.; Childers,Winthrop D., Light modulator assembly.
  32. Novotny,Vlad; Sastri,Bharat; Reddy,Chitranjan N., MEMS devices monolithically integrated with drive and control circuitry.
  33. Miles,Mark W., MEMS devices with unreleased thin film components.
  34. Orcutt, John W.; Dewa, Andrew Steven; Lin, Tsen-Hwang, MEMS wafer level package.
  35. Sadones Henri (Paris FRX), Method and device for analyzing a very high frequency radiation beam of electromagnetic waves.
  36. Miles,Mark W., Method and device for modulating light with a time-varying signal.
  37. Floyd,Philip D., Method and system for sealing a substrate.
  38. Brinkman Michael J. (Redwood City CA) Deacon David A.G. (Los Altos CA) Bischel William K. (Menlo Park CA), Method for manipulating optical energy using poled structure.
  39. Hayashi, Kenji; Tanaka, Shigeki; Kobayashi, Hidekazu; Nakadate, Makoto, Method for manufacturing electrooptical device and apparatus for manufacturing the same, electrooptical device and electronic appliances.
  40. Hayashi,Kenji; Tanaka,Shigeki; Kobayashi,Hidekazu; Nakadate,Makoto, Method for manufacturing electrooptical device and apparatus for manufacturing the same, electrooptical device and electronic appliances.
  41. Watanabe Takayuki,JPX, Method for preserving polished inorganic glass and method for preserving article obtained by using the same.
  42. Glover Michael (Ottawa CAX) Reichert Gerhard (Ottawa CAX), Method of manufacturing multiple-pane sealed glazing units.
  43. Leung, Omar S., Method of sealing a hermetic lid to a semiconductor die at an angle.
  44. Cummings,William J., Methods and devices for inhibiting tilting of a mirror in an interferometric modulator.
  45. Klonis Homer B. ; Yeh Arlene Y. ; Reed Mark, Micromechanical device including time-release passivant.
  46. Thomas P. Glenn ; Steven Webster ; Roy Dale Hollaway, Micromirror device package.
  47. Kothari,Manish; Chui,Clarence; Palmateer,Lauren, Modifying the electro-mechanical behavior of devices.
  48. Shores A. Andrew (212 Carroll Canal Venice CA 90291), Moisture and particle getter for enclosures.
  49. Shores A. Andrew (Venice CA), Moisture getting composition for hermetic microelectronic devices.
  50. Kei Tanaka JP, Mounting structure and mounting method for surface acoustic wave element.
  51. Bulger Mark L. (McCandless Township ; Allegheny County PA) Thompson ; Jr. Albert E. (Allegheny Township ; Westmoreland County PA), Multi-sheet glazing unit and method of making same.
  52. Peterson, Kenneth A.; Watson, Robert D., Multilayered microelectronic device package with an integral window.
  53. Schildkraut Jay S. (Rochester NY) Rider Christopher B. (Mitcham NY GBX) Scozzafava Michael (Rochester NY), Optical article for multicolor imaging.
  54. Lin,Wen Jian; Tsai,Hsiung Kuang, Optical interference display panel.
  55. Lukosz Walter (Burstwiesenstr. 55 Greifensee 8606 CHX), Optical modulation apparatus and measurement method.
  56. Burns David W. (Minneapolis MN) Guckel Henry (Madison WI) Zook James D. (Minneapolis MN), Opto-electro-mechanical device or filter, process for making, and sensors made therefrom.
  57. Poradish Frank (Plano TX) McKinley John T. (Plano TX), Package for a semiconductor device.
  58. Deffeyes Robert J. (Arlington TX), Package having dessicant composition.
  59. Low, Yee Leng; Ramsey, David Andrew, Packaging micromechanical devices.
  60. Murasawa Sadao (Kusatsu JPX) Murakami Hajime (Kusatsu JPX) Fukui Yasuro (Kusatsu JPX) Watanabe Mitsuru (Kusatsu JPX) Fujishima Akira (710-5 ; Nakamaruko Nakahara-ku ; Kawasaki-shi JPX) Hashimoto Kazu, Photocatalyst composite and process for producing the same.
  61. Miles,Mark W., Photonic MEMS and structures.
  62. Miles, Mark W., Photonic mems and structures.
  63. James Lynn Baratuci ; Ronald Ellsworth Buchanan ; Louis Anthony Ferri ; Lanny Dean Ritz, Preformed flexible laminate.
  64. Phares Robert, Resistive touchscreen having multiple selectable regions for pressure discrimination.
  65. Kenneth A. Peterson ; Robert D. Watson, Sealed symmetric multilayered microelectronic device package with integral windows.
  66. Peterson, Kenneth A.; Watson, Robert D., Single level microelectronic device package with an integral window.
  67. Koskinen Yrjo (Helsinki FIX) Lehto Ari (Helsinki FIX) Tammela Simo (Espoo FIX) Blomberg Martti (Vantaa FIX) Orpana Markku (Espoo FIX) Torkkeli Altti (Espoo FIX), Single-channel gas concentration measurement method and apparatus using a short-resonator Fabry-Perot interferometer.
  68. Sampsell Jeffrey B. (Plano TX), Spatial light modulator.
  69. Hornbeck Larry J. (Van Alstyne TX), Spatial light modulator and method.
  70. Sumi, Hiroyuki, Surface protective film and laminate formed therefrom.
  71. Chui,Clarence; Mathew,Mithran C.; Mignard,Marc, System and method for addressing a MEMS display.
  72. Zurn, Shayne, Vacuum sealed RF/microwave microresonator.
  73. Miles Mark W., Visible spectrum modulator arrays.
  74. Miles Mark W., Visible spectrum modulator arrays.
  75. Miles,Mark W., Visible spectrum modulator arrays.

이 특허를 인용한 특허 (2)

  1. Nichol, Anthony John; Coleman, Zane Arthur, Illumination device comprising a film-based lightguide.
  2. Bita, Ion; Hong, John H.; Alam, Khurshid S., Light-based sealing and device packaging.
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