Component for detecting especially infrared electromagnetic radiation
원문보기
IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
UP-0719772
(2005-12-12)
|
등록번호 |
US-7642515
(2010-02-11)
|
우선권정보 |
FR-04 13634(2004-12-21) |
국제출원번호 |
PCT/FR2005/051073
(2005-12-12)
|
§371/§102 date |
20070521
(20070521)
|
국제공개번호 |
WO06/067344
(2006-06-29)
|
발명자
/ 주소 |
|
출원인 / 주소 |
|
대리인 / 주소 |
Heslin Rothenberg Farley & Mesiti P.C.
|
인용정보 |
피인용 횟수 :
4 인용 특허 :
8 |
초록
▼
A component for detecting electromagnetic radiation comprises: a housing defining a chamber placed under a vacuum or underpressure, one of the faces of the housing including a window which is transparent to the radiation to be detected and the chamber including at least one detector which is used to
A component for detecting electromagnetic radiation comprises: a housing defining a chamber placed under a vacuum or underpressure, one of the faces of the housing including a window which is transparent to the radiation to be detected and the chamber including at least one detector which is used to detect the radiation in question and is arranged inside said chamber essentially against the transparent window, a getter in order to maintain the vacuum or underpressure in the chamber at an acceptable level, and a thermal stabilization device for ensuring regulation of temperature of the detector(s). The thermal stabilization device consists of a heating resistive element which is integrated into the mass of one of the walls defining the housing.
대표청구항
▼
The invention claimed is: 1. A component for detecting electromagnetic radiation, comprising: a housing defining a chamber placed under a vacuum or underpressure, the housing comprising a substrate forming a base of the housing, lateral walls adjoined to the substrate, and a lid, the lid including
The invention claimed is: 1. A component for detecting electromagnetic radiation, comprising: a housing defining a chamber placed under a vacuum or underpressure, the housing comprising a substrate forming a base of the housing, lateral walls adjoined to the substrate, and a lid, the lid including a window which is transparent to the radiation to be detected, said chamber receiving at least one detector which is used to detect the radiation and is arranged inside said chamber essentially against the transparent window, a getter to maintain the vacuum or underpressure in the chamber at an acceptable level, and a thermal stabilisation device for ensuring regulation of temperature of the at least one detector, wherein the thermal stabilisation device comprises a heating resistive element integrated into mass of the substrate forming the base of the housing. 2. A component for detecting electromagnetic radiation as claimed in claim 1, wherein the substrate comprises ceramic layers sandwiching said heating resistive element, the lateral walls comprising peripheral ceramic layers, and the ceramic layers of the substrate and of the lateral walls are assembled together and co-fired simultaneously. 3. A component for detecting electromagnetic radiation as claimed in claim 1, wherein the substrate is made of a ceramic and comprises at least two ceramic layers attached to each other by co-firing, said at least two ceramic layers comprising: an upper ceramic layer on which the at least one detector is attached by soldering or epoxy bonding; and a lower ceramic layer that includes, on a face that is in contact with the upper layer, heating resistive element obtained by screen printing, said lower layer being attached to the upper layer by co-firing. 4. A component for detecting electromagnetic radiation as claimed in claim 3, wherein the heating resistive element of the thermal stabilisation device has a pattern adapted to ensure that temperature at a level of the at least one detector is uniform. 5. A component for detecting electromagnetic radiation as claimed in claim 4, wherein the pattern is straight, coiled or spiral. 6. A component for detecting electromagnetic radiation as claimed in claim 3, wherein means for increasing thermal resistance between the heating resistive element of the thermal stabilisation device and an interconnection or read circuit is also integrated into the mass of the base. 7. A component for detecting electromagnetic radiation as claimed in claim 6, wherein said means for increasing the thermal resistance comprises cavities having a profile in a lower layer of the substrate of the base designed to reduce contact surface area between said substrate and the interconnection circuit. 8. A component for detecting electromagnetic radiation as claimed in claim 6, wherein said means for increasing the thermal resistance comprises a thermal insulation cavity defined in the base of the housing and communicating with the chamber via through-openings made in the co-fired ceramic layers that accommodate the heating resistive element of the thermal stabilisation device. 9. A component for detecting electromagnetic radiation as claimed in claim 8, wherein the thermal insulation cavity is defined by co-fired ceramic layers and said cavity is closed off at a level of a base of the cavity by a metal plate for accommodating said getter. 10. A component for detecting electromagnetic radiation as claimed in claim 8, wherein the ceramic layers accommodating the heating resistive element of the thermal stabilisation device are physically continuous with a rest of the housing via at least one element adapted firstly to physically support the at least one detector and an interfacing circuit above the thermal insulation cavity and secondly to allow routing of electrical contact of the heating resistive element to outputs of the housing by an electrical conductor screen printed at a same time as said resistive element. 11. A component for detecting electromagnetic radiation as claimed in claim 10, wherein the at least one element that ensures physical continuity of the co-fired ceramic layers with the rest of the housing comprises four arms or junctions placed substantially in the four corners of said layers. 12. A component for detecting electromagnetic radiation as claimed in claim 1, wherein the heating resistive element of the thermal stabilisation device is monitored by a controller outside the housing. 13. A component for detecting electromagnetic radiation as claimed in claim 1, wherein the at least one detector and an associated interfacing circuit are mounted on the substrate. 14. The component for detecting electromagnetic radiation as claimed in claim 1, wherein the electromagnetic radiation comprises infrared radiation.
이 특허에 인용된 특허 (8)
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Wood R. Andrew (Bloomington MN), Camera for producing video output signal, infrared focal plane array package for such camera, and method and apparatus f.
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Bergstedt, Leif; Ligander, Per, Carrier for electronic components.
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Sone Takanori,JPX, Infrared detector.
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Murphy Robert H. ; MacDonald Neal E. ; Ramsden John D., Method and apparatus for thermal gradient stabilization of microbolometer focal plane arrays.
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Yang Thomas (Hsin-Chu TWX), Method for manufacturing a hybrid circuit charge-coupled device image sensor.
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Gaalema Steve D. (Encinitas CA) Hewitt Mary J. (Santa Barbara CA) Morse Arthur L. (Hawthorne CA), Noise immune infrared readout circuitry and technique.
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Ueno Takahisa (Kanagawa JPX) Abe Hideshi (Kanagawa JPX), Package for solid state imager with heating means to repair imager lattice defect.
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Thimm Alfred (Wunsiedel DEX) Groschwitz Heinz (Marktredwitz DEX) Besold Peter (Waldershof DEX), Process for producing ceramic heating elements.
이 특허를 인용한 특허 (4)
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Hofmann, Ulrich; Quenzer, Hans-Joachim; Janes, Joachim; Jensen, Björn, Micromirror system and method of manufacturing a micromirror system.
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Nguyen, Evans H.; Mergener, Matthew J.; Burch, Wade, Thermal detection systems, methods, and devices.
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Nguyen, Evans H.; Neitzell, Roger D., Thermal imager.
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Stein, John William, Touch field compound field detector personal ID.
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