초록 ▼

A method and apparatus for measuring the temperature of a gas in a mass flow controller is described. One embodiment derives gas-temperature information from a mass flow sensor of the mass flow controller without relying on a separate temperature sensor. This embodiment supplies a substantially cons

A method and apparatus for measuring the temperature of a gas in a mass flow controller is described. One embodiment derives gas-temperature information from a mass flow sensor of the mass flow controller without relying on a separate temperature sensor. This embodiment supplies a substantially constant electrical current to a thermal mass flow sensor of the mass flow controller, the thermal mass flow sensor being designed to measure a mass flow rate of the gas; measures an input voltage of the thermal mass flow sensor to obtain a present input voltage, the input voltage varying with a temperature differential between a pair of sensing elements of the thermal mass flow sensor; calculates an adjusted input voltage by accounting for a component of the present input voltage that is dependent on the mass flow rate of the gas; and calculates the temperature of the gas based on the adjusted input voltage. In some embodiments, the calculated gas temperature is used to compensate for the variation, with temperature, of an output voltage of the thermal mass flow sensor under a zero-flow condition.

대표청구항 ▼

What is claimed is: 1. A method for measuring the temperature of a gas in a mass flow controller, the method comprising: supplying a substantially constant electrical current to a thermal mass flow sensor of the mass flow controller, the thermal mass flow sensor being designed to measure a mass flo

What is claimed is: 1. A method for measuring the temperature of a gas in a mass flow controller, the method comprising: supplying a substantially constant electrical current to a thermal mass flow sensor of the mass flow controller, the thermal mass flow sensor being designed to measure a mass flow rate of the gas; measuring an input voltage of the thermal mass flow sensor to obtain a present input voltage, the input voltage varying with a temperature differential between a pair of sensing elements of the thermal mass flow sensor; calculating an adjusted input voltage by accounting for a component of the present input voltage that is dependent on the mass flow rate of the gas; and calculating the temperature of the gas based on the adjusted input voltage. 2. The method of claim 1, further comprising: compensating for variation, with temperature, of an output voltage of the thermal mass flow sensor under a zero-flow condition based on the calculated temperature. 3. The method of claim 1, wherein the input voltage is fed to an analog-to-digital (A/D) converter and the present input voltage is obtained as a digital number from an output of the (A/D) converter. 4. The method of claim 1, wherein calculating an adjusted input voltage by accounting for a component of the present input voltage that is dependent on the mass flow rate of the gas includes: prior to measuring the input voltage to obtain the present input voltage: measuring the input voltage under a first predetermined flow condition to obtain a first voltage; and measuring the input voltage under a second predetermined flow condition to obtain a second voltage; subtracting the second voltage from the first voltage to obtain a voltage difference; determining a fraction of maximum flow corresponding to a present operating point of the mass flow controller; and calculating the adjusted input voltage by adding to the present input voltage the product of the voltage difference and the square of the fraction of maximum flow. 5. The method of claim 4, wherein the first predetermined flow condition is a zero-flow condition and the second predetermined flow condition is a maximum-flow condition. 6. The method of claim 1, wherein calculating the temperature of the gas based on the adjusted input voltage includes: prior to measuring the input voltage to obtain the present input voltage: measuring the input voltage when a base of the mass flow controller is at a predetermined upper temperature to obtain a first voltage; and measuring the input voltage when the base of the mass flow controller is at a predetermined lower temperature to obtain a second voltage; and mapping the adjusted input voltage to a temperature between the predetermined lower and upper temperatures, inclusive, based on the first and second voltages and the predetermined upper and lower temperatures. 7. The method of claim 6, wherein the mapping is linear. 8. A temperature-measurement subsystem to measure the temperature of a gas in a mass flow controller, the temperature-measurement subsystem comprising: a thermal mass flow sensor including a pair of sensing elements, the thermal mass flow sensor being designed to measure a mass flow rate of a gas flowing through the mass flow controller, an input voltage of the thermal mass flow sensor varying with a temperature differential between the pair of sensing elements; a current source configured to supply a substantially constant electrical current to the thermal mass flow sensor; and control logic configured to: measure the input voltage of the thermal mass flow sensor to obtain a present input voltage; calculate an adjusted input voltage by accounting for a component of the present input voltage that is dependent on the mass flow rate of the gas; and calculate the temperature of the gas based on the adjusted input voltage. 9. The temperature-measurement subsystem of claim 8, wherein the control logic is configured to compensate for variation, with temperature, of an output voltage of the thermal mass flow sensor under a zero-flow condition based on the calculated temperature. 10. The temperature-measurement subsystem of claim 8, further comprising: an amplifier that amplifies the input voltage to produce an amplified input voltage; and an analog-to-digital converter to convert the amplified input voltage to a digital number. 11. The temperature-measurement subsystem of claim 8, wherein the thermal mass flow sensor includes: a tube through which a substantially constant proportion of the gas flows when a gas is flowing through the mass flow controller; first and second resistance-thermometer elements wound around the outside of the tube at first and second locations along the tube, respectively; and a bridge circuit having first, second, third, and fourth nodes, a first predetermined resistive component being connected between the first and second nodes, a second predetermined resistive component being connected between the second and third nodes, the first resistance-thermometer element being connected between the first and fourth nodes, the second resistance-thermometer element being connected between the fourth and third nodes. 12. The temperature-measurement subsystem of claim 8, wherein the third node is at a predetermined reference electrical potential and the input voltage is measured at the first node with respect to the third node. 13. The temperature-measurement subsystem of claim 8, wherein the control logic includes stored program instructions executable by a processor. 14. The temperature-measurement subsystem of claim 8, wherein, in calculating the adjusted input voltage, the control logic is configured to: measure the input voltage under a first predetermined flow condition to obtain a first voltage prior to measuring the input voltage to obtain the present input voltage; measure the input voltage under a second predetermined flow condition to obtain a second voltage prior to measuring the input voltage to obtain the present input voltage; subtract the second voltage from the first voltage to obtain a voltage difference; determine a fraction of maximum flow corresponding to a present operating point of the mass flow controller; and calculate the adjusted input voltage by adding to the present input voltage the product of the voltage difference and the square of the fraction of maximum flow. 15. The temperature-measurement subsystem of claim 14, wherein the first predetermined flow condition is a zero-flow condition and the second predetermined flow condition is a maximum-flow condition. 16. The temperature-measurement subsystem of claim 8, wherein, in calculating the temperature of the gas, the control logic is configured to: measure the input voltage when a base of the mass flow controller is at a predetermined upper temperature to obtain a first voltage prior to measuring the input voltage to obtain the present input voltage; measure the input voltage when the base of the mass flow controller is at a predetermined lower temperature to obtain a second voltage prior to measuring the input voltage to obtain the present input voltage; and map the adjusted input voltage to a temperature between the predetermined lower and upper temperatures, inclusive, based on the first and second voltages and the predetermined upper and lower temperatures. 17. The temperature-measurement subsystem of claim 16, wherein the control logic is configured to map linearly the adjusted input voltage to a temperature between the predetermined lower and upper temperatures, inclusive. 18. A mass flow controller, comprising: a thermal mass flow sensor designed to measure a mass flow rate of a gas flowing through the mass flow controller, the thermal mass flow sensor including a pair of sensing elements, an input voltage of the thermal mass flow sensor varying with a temperature differential between the pair of sensing elements; a current source configured to supply a substantially constant electrical current to the thermal mass flow sensor; a bypass including main-flow and sensor paths through which the gas can flow; a control valve to control the mass flow rate of the gas through the bypass; mass-flow control logic configured to: compare with a predetermined set point the mass flow rate of the gas as measured by the thermal mass flow sensor; and adjust the control value to maintain the mass flow rate of the gas at the predetermined set point; and temperature-measurement control logic configured to: measure the input voltage of the thermal mass flow sensor to obtain a present input voltage; calculate an adjusted input voltage by accounting for a component of the present input voltage that is dependent on the mass flow rate of the gas; and calculate the temperature of the gas based on the adjusted input voltage. 19. The mass flow controller of claim 18, wherein the temperature-measurement control logic is configured to compensate for variation, with temperature, of an output voltage of the thermal mass flow sensor under a zero-flow condition based on the calculated temperature.