최소 단어 이상 선택하여야 합니다.
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다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
NTIS 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
DataON 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
Edison 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
Kafe 바로가기국가/구분 | United States(US) Patent 등록 |
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국제특허분류(IPC7판) |
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출원번호 | UP-0315984 (2005-12-22) |
등록번호 | US-7651306 (2010-02-24) |
발명자 / 주소 |
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출원인 / 주소 |
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대리인 / 주소 |
|
인용정보 | 피인용 횟수 : 26 인용 특허 : 575 |
Embodiments of the invention provide a method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, that has an increased system throughput, and a reduced footprint. The various embodiments of the cluster tool may utilize two or more robots that are config
Embodiments of the invention provide a method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, that has an increased system throughput, and a reduced footprint. The various embodiments of the cluster tool may utilize two or more robots that are configured in a parallel processing configuration to transfer substrates between the various processing chambers retained in the processing racks so that a desired processing sequence can be performed on the substrates. Generally, the various embodiments described herein are advantageous since each row or group of substrate processing chambers are serviced by two or more robots to allow for increased throughput and increased system reliability. Also, the various embodiments described herein are generally configured to minimize and control the particles generated by the substrate transferring mechanisms, to prevent device yield and substrate scrap problems that can affect the cost of ownership of the cluster tool.
The invention claimed is: 1. A cluster tool for processing a substrate, comprising: a first processing rack comprising: a first group of two or more process chambers that are stacked vertically; and a second group of two or more process chambers that are stacked vertically, wherein the two or more
The invention claimed is: 1. A cluster tool for processing a substrate, comprising: a first processing rack comprising: a first group of two or more process chambers that are stacked vertically; and a second group of two or more process chambers that are stacked vertically, wherein the two or more substrate processing chambers in the first and second groups have a first side that is aligned along a first direction of the first processing rack; a first robot assembly adapted to transfer a substrate to the substrate processing chambers in the first processing rack, wherein the first robot assembly comprises: a first robot having a robot blade and a substrate receiving surface located thereon, wherein the first robot defines a first transferring region and is adapted to position the substrate at one or more points generally contained within a first plane, wherein the first plane is parallel to the first direction of the first processing rack and a second direction of the first robot which is orthogonal to the first direction of the first processing rack; a first motion assembly that is adapted to position the first robot in a third direction of the first robot that is generally perpendicular to the first plane; and a second motion assembly that is adapted to position the first robot in a direction generally parallel to the first direction of the first processing rack; wherein the first transferring region has a width that is parallel to the second direction and is between about 5% and about 50% larger than a dimension of the substrate in the second direction of the first robot when the substrate is positioned on the substrate receiving surface of the robot blade; a second processing rack comprising: a first group of two or more process chambers that are stacked vertically; and a second group of two or more process chambers that are stacked vertically, wherein the two or more substrate processing chambers in the first and second groups have a first side that is aligned along a first direction of the second processing rack; a second robot assembly that is adapted to transfer a substrate to the substrate processing chambers in the second processing rack, wherein the second robot assembly comprises: a second robot having a second robot blade and a substrate receiving surface located thereon, wherein the second robot defines a second transferring region and is adapted to position the substrate at one or more points generally contained within a second plane, wherein the second plane is parallel to the first direction of the second processing rack and a second direction of the second robot that is orthogonal to the first direction of the second processing rack; a first motion assembly having an actuator assembly that is adapted to position the second robot in a third direction of the second robot that is generally perpendicular to the second plane; and a second motion assembly having an actuator assembly that is adapted to position the second robot in a direction generally parallel to the first direction of the second processing rack; wherein the second transferring region has a width that is parallel to the second direction of the second processing rack and is between about 5% and about 50% larger than a dimension of the substrate in the second direction of the second robot when the substrate is positioned on the substrate receiving surface of the second robot blade; and a third robot assembly that is adapted to transfer a substrate to the substrate processing chambers in the first processing rack and the second processing rack, wherein the third robot assembly comprises: a third robot having a third robot blade and a substrate receiving surface located thereon, wherein the third robot defines a third transferring region and is adapted to position the substrate at one or more points generally contained within a third plane, wherein the third plane is parallel to the first direction of the first processing rack and a second direction of the third robot that is orthogonal to the first direction of the first processing rack; a first motion assembly having an actuator assembly that is adapted to position the third robot in a third direction of the third robot that is generally perpendicular to the third plane; and a second motion assembly having an actuator assembly that is adapted to position the third robot in a direction generally parallel to the first direction of the first processing rack; wherein the third transferring region has a width that is parallel to the second direction of the third robot and is between about 5% and about 50% larger than a dimension of the substrate in the second direction of the third robot when the substrate is positioned on the substrate receiving surface of the third robot blade. 2. A cluster tool for processing a substrate, comprising: a first processing rack that comprises two or more groups of two or more substrate processing chambers that are stacked in a vertical direction, wherein the two or more substrate processing chambers in the two or more groups have a first side that is aligned along a first direction of the first processing rack to access the substrate processing chambers therethrough; a second processing rack that comprises two or more groups of two or more groups of two or more substrate processing chambers that are stacked in a vertical direction, wherein the two or more substrate processing chambers in the two or more groups have a first side that is aligned along a first direction of the second processing rack to access the substrate processing chambers therethrough; a first robot assembly positioned between the first processing rack and the second processing rack that is adapted to transfer a substrate to the substrate processing chambers in the first processing rack from the first side, wherein the first robot assembly comprises: a robot that is adapted to position the substrate at one or more points generally contained within a horizontal plane, wherein the robot defines a first transferring region; a vertical motion assembly having a vertical actuator assembly that is adapted to position the robot in a direction generally parallel to the vertical direction; and a horizontal motion assembly having a motor that is adapted to position the robot in a direction generally parallel to the first direction of the first processing rack; a second robot assembly positioned between the first processing rack and the second processing rack that is adapted to transfer a substrate to the substrate processing chambers in the second processing rack from the first side, wherein the second robot assembly comprises: a robot that is adapted to position the substrate at one or more points generally contained within a horizontal plane, wherein the robot defines a second transferring region; a vertical motion assembly having a vertical actuator assembly that is adapted to position the robot in a direction generally parallel to the vertical direction; and a horizontal motion assembly having a motor that is adapted to position the robot in a direction generally parallel to the first direction of the second processing rack; and a third robot assembly positioned between the first processing rack and the second processing rack that is adapted to transfer a substrate to the substrate processing chambers in the first processing rack from the first side or the second processing rack from the first side, wherein the third robot assembly comprises: a robot that is adapted to position the substrate at one or more points generally contained within a horizontal plane, wherein the robot defines a third transferring region; a vertical motion assembly having a vertical actuator assembly that is adapted to position the robot in a direction generally parallel to the vertical direction; and a horizontal motion assembly having a motor that is adapted to position the robot in a direction generally parallel to the first direction of the first processing rack. 3. The cluster tool of claim 2, further comprising an enclosure having one or more walls that form a processing region in which the first processing rack, second processing rack, first robot assembly, second robot assembly and third robot assembly are positioned, wherein a fan is adapted to cause air to pass through a filter and into the processing region. 4. The cluster tool of claim 3, further comprising a fourth robot assembly that is positioned in the processing region and is adapted to transfer a substrate to and from a processing chamber in the first processing rack and a position outside the enclosure. 5. The cluster tool of claim 2, further comprising: a fourth robot assembly positioned between the first processing rack and the second processing rack that is adapted to transfer a substrate to the substrate processing chambers in the first processing rack from the first side or the second processing rack from the first side, wherein the fourth robot assembly comprises: a robot that is adapted to position the substrate at one or more points generally contained within a horizontal plane; a vertical motion assembly having a vertical actuator assembly that is adapted to position the robot in a direction generally parallel to the vertical direction; and a horizontal motion assembly having a motor that is adapted to position the robot in a direction generally parallel to the first direction of the second processing rack. 6. The cluster tool of claim 2, further comprising: a cassette that is adapted to retain two or more substrates; a first pass-through chamber that is adapted to receive a substrate from a front end robot and the first robot assembly; a second pass-through chamber that is adapted to receive a substrate from the front end robot and the second robot assembly; a third pass-through chamber that is adapted to receive a substrate from the front end robot and the third robot assembly; and the front end robot being adapted to transfer a substrate to and from a cassette and the first, second and third pass-through chambers. 7. The cluster tool of claim 2, wherein the horizontal motion assembly in the first robot assembly, the horizontal motion assembly in the second robot assembly, and the horizontal motion assembly in the third robot assembly each further comprise: an enclosure having one or more walls and a base that enclose an interior region; and one or more fan assemblies that are in fluid communication with the interior region of the enclosure. 8. The cluster tool of claim 2, wherein the robot in the first robot assembly, the second robot assembly, and the third robot assembly consists essentially of: a robot blade that is adapted to receive and transport the substrate; and a motor that is in rotational communication with the robot blade. 9. The cluster tool of claim 2, wherein the robot in the first robot assembly, the second robot assembly, and the third robot assembly consists essentially of: a robot blade having a first end and a substrate receiving surface, wherein the substrate receiving surface is adapted to receive and transport the substrate; a linkage member that has a pivot point about which the first end of the robot blade is adapted to rotate; and a motor that is in rotational communication with the linkage member and the robot blade. 10. The cluster tool of claim 2, wherein the vertical motion assembly in the first robot assembly, the vertical motion assembly in the second robot assembly, and the vertical motion assembly in the third robot assembly each further comprise: an enclosure having one or more walls and filter that enclose an interior region; and a fan assembly that is in fluid communication with the interior region of the enclosure, and is adapted to remove a fluid from the interior region and through the filter. 11. The cluster tool of claim 2, wherein the first robot assembly, second robot assembly and third robot assembly each further comprise: an enclosure having one or more walls and filter that enclose an interior region; and one or more fan assemblies that are in fluid communication with the interior region of the enclosure and is adapted to flow air through the filter towards the first, second or third robot. 12. The cluster tool of claim 2, wherein the first robot assembly, second robot assembly and third robot assembly each further comprise: a second robot that is adapted to position a substrate in a second horizontal plane, wherein the horizontal plane and the second horizontal plane are spaced a distance apart. 13. The cluster tool of claim 2, wherein the vertical motion assembly in the first, second and third robot assembly each further comprise: the vertical actuator assembly which comprises: a vertical actuator that is adapted to vertically position the first robot; and a vertical slide that is adapted to guide the first robot as it is translated by the vertical actuator; an enclosure having an internal region that surrounds at least one of the components selected from a group consisting of the vertical actuator and the vertical slide; and a fan that is in fluid communication with the internal region that is adapted to generate a negative pressure inside the enclosure. 14. A cluster tool for processing a substrate, comprising: a processing rack that comprises two or more groups of two or more vertically stacked substrate processing chambers, wherein the two or more vertically stacked substrate processing chambers in the two or more groups have a first side aligned along a first direction to access the substrate processing chambers therethrough and a second side aligned along a second direction to access the substrate processing chambers therethrough; a first robot assembly that is adapted to transfer a substrate to the substrate processing chambers in the processing rack from the first side, wherein the first robot assembly comprises: a first robot that is adapted to position the substrate at one or more points generally contained within a horizontal plane; a vertical motion assembly having a motor that is adapted to position the first robot in a vertical direction; and a horizontal motion assembly having a motor that is adapted to position the first robot in a direction generally parallel to the first direction; and a second robot assembly that is adapted to transfer a substrate to the substrate processing chambers in the first processing rack from the second side, wherein the second robot assembly comprises: a second robot that is adapted to position the substrate at one or more points generally contained within a horizontal plane; a vertical motion assembly having a motor that is adapted to position the second robot in a direction generally parallel to the vertical direction; and a horizontal motion assembly having a motor that is adapted to position the second robot in a direction generally parallel to the second direction. 15. The cluster tool of claim 14, further comprising: a third robot assembly that is adapted to transfer a substrate to the substrate processing chambers in the processing rack from the first side, wherein the third robot comprises: a third robot that is adapted to position the substrate at one or more points generally contained within a horizontal plane; a vertical motion assembly having a motor that is adapted to position the third robot in a direction generally parallel to the vertical direction; and a horizontal motion assembly having a motor that is adapted to position the third robot in a direction generally parallel to the first direction. 16. A cluster tool for processing a substrate, comprising: a first processing rack that comprises two or more groups of two or more vertically stacked substrate processing chambers, wherein the two or more vertically stacked substrate processing chambers in the two or more groups have a first side aligned along a first direction to access the substrate processing chambers therethrough and a second side aligned along a second direction to access the substrate processing chambers therethrough; a first robot assembly that is adapted to transfer a substrate to the substrate processing chambers in the first processing rack from the first side, wherein the first robot assembly comprises: a first robot that is adapted to position the substrate at one or more points generally contained within a horizontal plane; a vertical motion assembly having a motor that is adapted to position the first robot in a vertical direction; and a horizontal motion assembly having a motor that is adapted to position the first robot in a direction generally parallel to the first direction; and a second robot assembly that is adapted to transfer a substrate to the substrate processing chambers in the first processing rack from the second side, wherein the second robot assembly comprises: a second robot that is adapted to position the substrate at one or more points generally contained within a horizontal plane; a vertical motion assembly having a motor that is adapted to position the second robot in a direction generally parallel to the vertical direction; and a horizontal motion assembly having a motor that is adapted to position the second robot in a direction generally parallel to the second direction; a second processing rack that comprises two or more groups of two or more vertically stacked substrate processing chambers, wherein the two or more groups of two or more vertically stacked substrate processing chambers have a first side aligned along the first direction to access the substrate processing chambers therethrough; and the first robot assembly that is adapted to transfer a substrate to the substrate processing chambers in the second processing rack from the first side. 17. The cluster tool of claim 14, further comprising: a cassette that is adapted to retain two or more substrates; a first pass-through chamber that is adapted to receive a substrate from a front end robot and the first robot assembly; and a second pass-through chamber that is adapted to receive a substrate from the front end robot and the second robot assembly; wherein the front end robot is adapted to transfer a substrate to and from a cassette and the first and second pass-through chambers. 18. The cluster tool of claim 14, wherein the horizontal motion assembly in the first robot assembly and the horizontal motion assembly in the second robot assembly each further comprise: an enclosure having one or more walls and a base that enclose an interior region; and one or more fan assemblies that are in fluid communication with the interior region of the enclosure. 19. The cluster tool of claim 14, wherein the robot in the first robot assembly and the second robot assembly consists essentially of: a robot blade that is adapted to receive and transport the substrate; and a motor that is in rotational communication with the robot blade. 20. The cluster tool of claim 14, wherein the robot in the first robot assembly and the second robot assembly consists essentially of: a robot blade having a first end and a substrate receiving surface, wherein the substrate receiving surface is adapted to receive and transport the substrate; a linkage member that has a pivot point about which the first end of the robot blade is adapted to rotate; and a motor that is in rotational communication with the linkage member and the robot blade. 21. The cluster tool of claim 14, wherein the vertical motion assembly in the first robot assembly and the vertical motion assembly in the second robot assembly each further comprise: an enclosure having one or more walls and filter that enclose an interior region; and a fan assembly that is in fluid communication with the interior region of the enclosure, and is adapted to remove a fluid from the interior region and through the filter. 22. The cluster tool of claim 14, wherein the first robot assembly and second robot assembly each further comprise: an enclosure having one or more walls and filter that enclose an interior region; and one or more fan assemblies that are in fluid communication with the interior region of the enclosure and is adapted to flow of air through the filter towards the first, second or third robot. 23. The cluster tool of claim 14, wherein the first robot assembly and second robot assembly each further comprise: a second robot that is adapted to position a substrate in a second horizontal plane, wherein the horizontal plane and the second horizontal plane are spaced a distance apart.
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