최소 단어 이상 선택하여야 합니다.
최대 10 단어까지만 선택 가능합니다.
다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
NTIS 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
DataON 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
Edison 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
Kafe 바로가기국가/구분 | United States(US) Patent 등록 |
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국제특허분류(IPC7판) |
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출원번호 | UP-0335069 (2006-01-18) |
등록번호 | US-7656172 (2010-03-31) |
발명자 / 주소 |
|
출원인 / 주소 |
|
대리인 / 주소 |
|
인용정보 | 피인용 횟수 : 4 인용 특허 : 1107 |
A semiconductor testing system that includes an plural imaging devices for capturing plural video sequences from a single optical path and concurrently displaying the video sequences for effectively positioning a probe for testing a semiconductor wafer.
We claim: 1. A probing system for a device under test comprising: (a) an objective lens, light illuminating said device under test traversing a single optical path extending through said objective lens; (b) a first imaging device sensing a first video sequence of said device under test at a first m
We claim: 1. A probing system for a device under test comprising: (a) an objective lens, light illuminating said device under test traversing a single optical path extending through said objective lens; (b) a first imaging device sensing a first video sequence of said device under test at a first magnification from said single optical path; (c) a second imaging device sensing a second video sequence of said device under test at a second magnification from said single optical path; (d) a third imaging device sensing a third video sequence of said device under test at a third magnification from said single optical path; (e) providing a video signal to a display that simultaneously presents said first video sequence, said second video sequence, and said third video sequence to a monitor. 2. The probing system of claim 1 wherein said first video sequence is presented in a first window, said second video sequence is presented in a second window, and said third video sequence is presented in a third window. 3. A probing system for a device under test comprising: (a) an objective lens, light illuminating said device under test traversing a single optical path extending through said objective lens; (b) a first imaging device sensing a first video sequence of said device under test at a first selectable magnification from said single optical path; (c) a second imaging device sensing a second video sequence of said device under test at a second selectable magnification from said single optical path; (d) simultaneously providing said first video sequence, and said second video sequence, to a display. 4. The probing system of claim 3 wherein said magnification of said first video sequence includes a range of at least 5% of the total range of magnification that is not selectable by a user. 5. A probing system for a device under test comprising: (a) an objective lens, light illuminating said device under test traversing a single optical path extending through said objective lens; (b) an imaging device sensing a video sequence of said device under test at a first magnification from said single optical path; and (c) a display displaying the video sequence in a first window; said display concurrently displaying a region of said first video sequence in a second window. 6. The probing system of claim 1 wherein said video displayed in said second window is from another imaging device at a second magnification from said single optical path. 7. A method for displaying video for a probing system comprising: (a) receiving a video sequence of a device under test, said video sequence comprising a plurality of frames sequentially presented at a frame rate, a frame comprising an image of a portion of said device under test; (b) presenting said video sequence in a first window on a display; (c) concurrently presenting a first portion of said video sequence in a second window on a portion of said display, said first portion of said video sequence comprising first portions of a plurality of said sequentially presented images, said first portions being selectable; and (d) concurrently presenting a second portion of said video sequence in a third window on a portion of said display, said second portion of said video sequence comprising second portions of a plurality of said sequentially presented images, said second portions being selectable. 8. The method of claim 7 further comprising presenting a third portion of said video sequence in a fourth window, a fourth portion of said video sequence in a fifth window, a fifth portion of said video sequence in a sixth window, a fifth portion of said video sequence in a sixth window, and a sixth portion of said video sequence in a seventh window. 9. The method of claim 8 wherein said second, third, fourth, fifth, sixth, and seventh windows are arranged in a 2×3 format. 10. The method of claim 8 wherein said second, third, fourth, fifth, sixth, and seventh windows are arranged in a 3×2 format. 11. The method of claim 8 wherein said second, third, fourth, fifth, sixth, and seventh windows are arranged in a 1×3 format. 12. The method of claim 8 wherein said second, third, fourth, fifth, sixth, and seventh windows are arranged in a 3×1 format.
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