A substrate storage container includes a container body for accommodating and aligning semiconductor wafers, a door which opens and closes the front of the container body and a pair of valve units disposed at the bottom of the container body for controlling gas flow. Each valve unit includes a fixed
A substrate storage container includes a container body for accommodating and aligning semiconductor wafers, a door which opens and closes the front of the container body and a pair of valve units disposed at the bottom of the container body for controlling gas flow. Each valve unit includes a fixed sleeve for gas flow, fitted in a rib of a through-hole of the container body, a holding sleeve fitted in the through-hole of the container body with an o-ring interposed therebetween and mated and threaded with the fixed sleeve, a check valve built between the fixed sleeve and the holding sleeve, leaving a clearance, an elastically deformable element for opening and closing the check valve, an interior lid sleeve for gas flow, opposing the check valve and supporting the elastically deformable element, and a filter interposed between the holding sleeve and the interior lid sleeve.
대표청구항▼
The invention claimed is: 1. A substrate storage container including: a container body; a door for opening and closing the container body; a valve unit attached to a through-hole formed in the container body for regulating the gas flow with respect to the container body, characterized in that the v
The invention claimed is: 1. A substrate storage container including: a container body; a door for opening and closing the container body; a valve unit attached to a through-hole formed in the container body for regulating the gas flow with respect to the container body, characterized in that the valve unit comprises: a fixed sleeve for gas flow, fitted in the through-hole; a holding sleeve for gas flow, threadably mated with the fixed sleeve; an elastic check valve built in between the fixed sleeve and the holding sleeve, wherein the elastic check valve is actuated by gas pressure; and an interior lid sleeve for gas flow, opposing the elastic check valve, and one of the fixed sleeve and the interior lid sleeve is adapted to be opened and closed by the elastic check valve, so that gas will pass through when the elastic check valve is open while gas will be prevented from passing when the elastic check valve is closed; and a hollow nozzle tower communicating with the valve unit is made to stand, the peripheral wall thereof being formed with gas ejection holes, wherein a rib is formed and extended outward from the periphery of the through-hole and the fixed sleeve is formed with a flange that is in contact with the periphery of the rib while the holding sleeve is formed with a flange that is in contact with the periphery of the through-hole. 2. The substrate storage container according to claim 1, wherein the valve unit as a gas inlet valve or gas discharge valve is fitted to the through-hole. 3. The substrate storage container according to claim 1, wherein a clearance for gas flow is formed at least between the holding sleeve and the periphery of the elastic check valve. 4. The substrate storage container according to claim 1, wherein the interior lid sleeve is fitted in the holding sleeve with an air filter interposed therebetween. 5. The substrate storage container according to claim 1, wherein the elastic check valve is at least made up of a check valve that is built in the fixed sleeve, leaving a clearance, and an elastically deformable element interposed between the check valve and the interior lid sleeve, and the opening of the fixed sleeve is adapted to be opened and closed by the check valve, so that gas will pass through when the check valve is open while gas will be prevented from passing when the check valve is closed. 6. The substrate storage container according to claim 1, wherein the elastic check valve is at least made up of a check valve that is built in the fixed sleeve, leaving a clearance, and an elastically deformable element interposed between the check valve and the fixed sleeve, and the opening of the interior lid sleeve is adapted to be opened and closed by the check valve, so that gas will pass through when the check valve is open while gas will be prevented from passing when the check valve is closed. 7. The substrate storage container according to claim 1, wherein the elastic check valve is at least made up of a check valve that is built in the fixed sleeve, leaving a clearance, and an elastically deformable element for the check valve, and either the check valve or the elastically deformable element is made in contact with the interior lid sleeve, so that gas will pass through when the check valve is open while gas will be prevented from passing when the check valve is closed. 8. The substrate storage container according to claim 5, wherein a guide element is provided for either the check valve of the elastic check valve or the interior lid sleeve while a guided part is provided for the other, so that the guide element and the guided part fit to each other in a slidably manner. 9. The substrate storage container according to claim 8, wherein the guide element is formed in the interior lid sleeve so as to have an approximately convex-top section while the guided part is formed in the check valve of the elastic check valve so as to have an approximately concave-top section. 10. The substrate storage container according to claim 5, wherein a sealing element is attached to the check valve of the elastic check valve, and the sealing element is placed into deforming contact with the opening of the fixed sleeve or the interior lid sleeve to seal. 11. The substrate storage container according to claim 1, wherein the elastic check valve is at least made up of a check valve that is built in the fixed sleeve, leaving a clearance and an extensible bellows fitted in the check valve, the peripheral wall of the bellows is formed with a passage opening, and the check valve can be opened and closed by the extension and compression of the bellows. 12. The substrate storage container according to claim 1, wherein the elastic check valve is at least made up of a check valve that is built in the fixed sleeve, leaving a clearance and an elastic skirt body integrated with the check valve, a passage opening is formed in the check valve, an approximately cylindrical skirt piece is flexibly extended from the rim of the skirt body and is fitted on the periphery of the check valve, and the check valve can be opened and closed by the deformation of the skirt body.
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이 특허에 인용된 특허 (11)
Wu, Tzong-Ming; Su, Wu-Chen; Tsai, Sheng-Fu, Air vent plug arrangement having a mounting ring, a plug body, and a plug cap for securing the plug body to the mounting ring.
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