초록 ▼

A method for determining the root causes of fail patterns in integrated circuit chips is provide wherein a known integrated circuit chip layout is used to identify a plurality of potential defects and a plurality of potential fail patterns in the integrated circuit chip. Correlations between the pot

A method for determining the root causes of fail patterns in integrated circuit chips is provide wherein a known integrated circuit chip layout is used to identify a plurality of potential defects and a plurality of potential fail patterns in the integrated circuit chip. Correlations between the potential defects and the potential fail patterns that result from those defects are identified. Based on this identification, the potential fail patterns are grouped by common potential defect. An actual integrated circuit chip that is manufactured in accordance with the test layout is tested for failure patterns. These failure patterns are then compared to the groupings of potential fail patterns. When a match is found, that is when a given group of fail patterns is found in the actual integrated circuit chip, then the potential defect associated with the potential fail patterns to which the actual fail patterns are matched is identified. This defect is the root cause of the failure pattern in the actual chip.

대표청구항 ▼

What is claimed is: 1. A method for determining root causes of fail patterns in integrated circuit chips, the method comprising: identifying, by using a computer, a plurality of potential defects that can occur in a given integrated circuit chip layout from a schematic used in the manufacture of th

What is claimed is: 1. A method for determining root causes of fail patterns in integrated circuit chips, the method comprising: identifying, by using a computer, a plurality of potential defects that can occur in a given integrated circuit chip layout from a schematic used in the manufacture of the integrated circuit chip; identifying, by using the computer, a plurality of potential fail patterns in the given integrated circuit chip layout, the potential fail patterns comprising functional manifestations of defects in the integrated circuit chip; identifying, by using the computer, correlations between the identified potential defects and identified potential fail patterns that are root causes of the identified potential fail patterns; using the identified correlations to identify groupings of potential fail patterns and potential defects, each grouping comprising one potential defect and one or more potential fail patterns; and using the groupings of potential fail patterns and potential defects to identify actual defects in a production integrated circuit chip by: placing the production integrated circuit chip in a tester configured to analyze operation of the production integrated circuit chip; using the tester to identify actual fail patterns in the production integrated circuit chip; correlating the actual fail patterns to the potential fail patterns; and using the identified groupings of potential fail patterns and potential defects to identify actual defects in the production integrated circuit chip, wherein the step of using the grouping of potential fail patterns and potential defects to identify actual defects further comprises: grouping the actual fail patterns according to spatial correlations across the integrated circuit chip; matching the groupings of actual fail patterns to the groupings of potential fail patterns and potential defects; and identifying potential defects associated with the groupings of potential fail patterns and potential defects to which the groupings of actual fail patterns are matched. 2. The method of claim 1, wherein the step of identifying the plurality of potential fail patterns further comprises determining fail patterns that can be caused by the identified plurality of potential defects. 3. The method of claim 1, wherein the step of identifying correlations between potential defects and potential fail patterns further comprises associating each potential fail pattern with all potential defects that are potential root causes of that potential fail pattern. 4. The method of claim 1, wherein the step of using the correlations to identify groupings of potential fail patterns further comprises identifying potential fail patterns that can result from the same defect. 5. The method of claim 1, wherein the step of identifying actual fail patterns further comprises searching bit fail maps associated with the integrated circuit chip. 6. The method of claim 1, wherein the spatial correlations comprise areas of the integrated circuit chip. 7. The method of claim 1, wherein the spatial correlations comprise an entire integrated circuit chip. 8. The method of claim 1, further comprising: determining a total number of each potential defect that can occur in the integrated circuit chip arrangement; and using the total numbers to calculate a probability of occurrence of each potential failure pattern. 9. The method of claim 1, wherein the potential defects comprise breaks or short circuits within the circuitry of the integrated circuit chip layout. 10. The method of claim 1, wherein the step of identifying a plurality of potential defects further comprises using layout connectivity information from the integrated circuit chip layout schematic to identify the potential defects. 11. A method for determining root causes of fail patterns in integrated circuit chips, the method comprising: identifying, by using a computer, a plurality of potential defects that can occur in a given integrated circuit chip layout from a schematic used in the manufacture of the integrated circuit chip; identifying, by using a computer, a plurality of potential fail patterns in the given integrated circuit chip layout, the potential fail patterns comprising functional manifestations of defects in the integrated circuit chip; identifying, by using a computer, correlations between the identified potential defects and identified potential fail patterns that are root causes of the identified potential fail patterns; grouping together potential fail patterns that can result from the same potential defect, each grouping comprising one potential defect and one or more potential fail patterns; and using the groupings of potential fail patterns and potential defects to identify actual defects in a production integrated circuit chip by: placing the production integrated circuit chip in a tester configured to analyze operation of the production integrated circuit chip; using the tester to identify actual fail patterns in the production integrated circuit chip; grouping the actual fail patterns according to spatial correlations across the production integrated circuit chip; matching the groupings of actual fail patterns to the groupings of potential fail patterns and potential defects; and identifying potential defects associated with the groupings of potential fail patterns and potential defects to which the groupings of actual fail patterns are matched. 12. The method of claim 11, wherein the spatial correlations comprise areas of the production integrated circuit chip. 13. The method of claim 11, wherein the spatial correlations comprise the entire production integrated circuit chip.