[특허]System and method for producing and delivering vapor

Brooks Instrument, LLC

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System and method for producing and delivering vapor

특허상세정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	A01G-013/06
미국특허분류(USC)	392/387; 392/386
출원번호	UP-0349068 (2006-02-07)
등록번호	US-7680399 (2010-04-21)
발명자 / 주소	Buchanan, Daryl Tariq, Faisal Mei, Hai Tison, Stuart
출원인 / 주소	Brooks Instrument, LLC
대리인 / 주소	Sonnenschein Nath & Rosenthal LLP
인용정보	피인용 횟수 : 3 인용 특허 : 26

초록
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Systems and methods for producing and delivering vapor are disclosed. A vaporizer tank containing a liquid may be heated such that liquid within the tank is heated and vapor generated. The flow of this vapor to a destination may then be regulated. Embodiments of the present invention may control the temperature of this liquid such that a saturated vapor condition is substantially maintained in the vaporizer tank. The vaporizer tank is coupled to a mass flow controller which regulates the delivery of the vapor to downstream components. By substantially ma...

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What is claimed is: 1. A method for producing and flowing vapor from a liquid, comprising: heating a vaporizer tank to substantially a first operating temperature to produce vapor from the liquid, wherein at the first operating temperature, the vapor in the vaporizer tank is substantially saturated; regulating a flow of the vapor to achieve a vapor flow rate; and controlling a fill valve to maintain a level of the liquid in the vaporizer tank between an overfill level and a minimum level; wherein heating the vaporizer tank, regulating the flow of vapor, and controlling the fill valve maintain the vaporizer tank at substantially the first operating temperature so that as the flow of vapor is regulated to achieve the vapor flow rate and the fill valve is controlled to maintain the level of the liquid in the vaporizer tank between the overfill level and the minimum level, a pressure in the vaporizer tank is maintained at a substantially constant value above approximately 500 Torr to maintain the vapor in the vaporizer tank in the substantially saturated condition. 2. The method of claim 1, wherein the first operating temperature is around 93° C. 3. The method of claim 1, wherein heating the vaporizer tank comprising controlling a first set of heaters. 4. The method of claim 3, wherein regulating the flow of vapor is accomplished using a mass flow controller. 5. The method of claim 4, wherein the mass flow controller is a thermal based mass flow controller. 6. The method of claim 4, further comprising heating the mass flow controller to a second operating temperature, wherein the second operating temperature is above the first operating temperature. 7. The method of claim 6, wherein the second operating temperature is between 5° C. and 15° C. above the first operating temperature. 8. The method of claim 6, further comprising maintaining the mass flow controller at substantially the second operating temperature. 9. The method of claim 8, wherein heating the mass flow controller to the second operating temperature and maintaining the mass flow controller at the second operating temperature comprises controlling a second set of heaters. 10. The method of claim 9, wherein the first set of heaters in controlled by a first Proportional Integral Derivative (PID) control loop and the second set of heaters is controlled by a second PID control loop. 11. The method of claim 9, further comprising sensing the level of the liquid in the vaporizer tank. 12. The method of claim 11, wherein controlling the fill valve includes controlling the fill valve to admit liquid to the vaporizer tank responsive to the level of the liquid being below an operating level. 13. The method of claim 12, wherein controlling the fill valve to admit liquid to the vaporizer tank comprises: controlling the fill valve to admit liquid to the vaporizer tank until the level of the liquid reaches the operating level; and controlling the fill valve to admit liquid for a time period after the level of the liquid reaches the operating level. 14. The method of claim 13, wherein the time period is between about 1 second and 5 minutes. 15. The method of claim 13, wherein controlling the fill valve comprises gating the fill valve to achieve a fill rate. 16. The method of claim 15, wherein the fill rate is approximately twice a full scale liquid consumption rate. 17. The method of claim 11, wherein controlling the fill valve includes stopping operation when the level of the liquid in the vaporizer tank has exceeded the overfill level or fallen below the minimum level. 18. A system for producing and flowing vapor, comprising: a vaporizer tank operable to hold a liquid, the vaporizer tank having a liquid inlet; a fill valve, coupled to the liquid inlet to permit the liquid to flow into the vaporizer tank; a first set of heaters coupled to the vaporizer tank to heat the vaporizer tank to substantially a first operating temperature to produce vapor from the liquid, wherein at the first operating temperature, the vapor is substantially saturated; a mass flow controller coupled to the vaporizer tank operable to regulate a flow of vapor from the vaporizer tank according to a setpoint; and a control system operable to control the mass flow controller to provide the flow of vapor at the setpoint; to control the fill valve to maintain a level of the liquid between an overfill level and a minimum level; and to control the first set of heaters to maintain the vaporizer tank at substantially the first operating temperature, so that as the flow of vapor is provided at the setpoint and the level of the liquid is maintained between the overfill level and the minimum level, a pressure in the vaporizer tank is maintained at a substantially constant value above approximately 500 Torr to maintain the vapor in the substantially saturated condition. 19. The system of claim 18, wherein the fist operating temperature is around 93° C. 20. The system of claim 18, wherein the mass flow controller is a thermal based mass flow controller. 21. The system of claim 18, further comprising a second set of heaters coupled to the mass flow controller, wherein the control system is operable to control the second set of heaters to heat the mass flow controller to a second operating temperature which is above the first operating temperature. 22. The system of claim 21, wherein the second operating temperature is between 5° C. and 15° C. above the first operating temperature. 23. The system of claim 21, wherein the control system is operable to control the second set of heaters to maintain the mass flow controller at substantially the second operating temperature. 24. The system of claim 23, wherein the control system is operable to control the first set of heaters using a first Proportional Integral Derivative (PID) control loop and to control the second set of heaters using a second PID control loop. 25. The system of claim 23, further comprising a level sensor, wherein the control system is operable to receive a signal from the level sensor indicative of the level of the liquid in the vaporizer tank. 26. The system of claim 25, wherein the control system is operable to control the fill valve to admit liquid to the vaporizer tank responsive to the level of the liquid being below an operable level. 27. The system of claim 26, wherein the control system is operable to control the fill valve to admit liquid to the vaporizer tank until the level of the liquid reaches the operating level, and to control the fill valve to admit liquid for a time period after the level of the liquid reaches the operating level. 28. The system of claim 27, wherein the time period is between about 1 second and 5 minutes. 29. The system of claim 27, wherein the control system is operable to oscillate the fill valve to achieve a fill rate. 30. The system of claim 29, wherein the fill rate is approximately twice a full scale liquid consumption rate. 31. The system of claim 26, wherein the control system is operable to stop operation of the system when the level of the liquid in the vaporizer tank has exceeded the overfill level or fallen below the minimum level. 32. The system of claim 18, wherein the liquid is de-ionized water, and wherein the control system is operable to maintain the pressure within the vaporizer tank at the substantially constant value between approximately 530-560 Torr. 33. The system of claim 18, wherein the liquid is de-ionized water, and wherein the pressure in the vaporizer tank is maintained at the substantially constant value and varies by no more than approximately 50 Torr. 34. The system of claim 18, further comprising a level sensor, wherein the control system is operable to receive a signal from the level sensor indicative of the level of the liquid in the vaporizer tank, to control the fill valve to admit liquid to the vaporizer tank if the level of the liquid is below an operating level and until the level of the liquid reaches the operating level, to control the fill valve to admit liquid for a time period after the level of the liquid reaches the operating level, and to activate the first set of heaters for a period of time that begins prior to controlling the fill valve to admit liquid to the vaporizer tank and ends after the time period after which the level of the liquid reaches the operating level. 35. The method of claim 1, wherein the liquid is de-ionized water, and wherein heating the vaporizer tank, regulating the flow of vapor, and controlling the fill valve maintain the vaporizer tank at substantially the first operating temperature so that as the flow of vapor is regulated to achieve the vapor flow rate and the fill valve is controlled to maintain the level of the liquid in the vaporizer tank between the overfill level and the minimum level, the pressure in the vaporizer tank is maintained at the substantially constant value between approximately 530-560 Torr to maintain the vapor in the vaporizer tank in the substantially saturated condition. 36. The method of claim 1, wherein the liquid is de-ionized water, and wherein the pressure in the vaporizer tank is maintained at the substantially constant value and varies by no more than approximately 50 Torr. 37. The method of claim 3, further comprising sensing the level of the liquid in the vaporizer thank, wherein: controlling the fill valve includes controlling the fill valve to admit liquid to the vaporizer tank responsive to the level of the liquid being below an operating level and until the level of the liquid reaches the operating level; and controlling the fill valve to admit liquid for a time period after the level of the liquid reaches the operating level; wherein controlling the first set of heaters includes activating the first set of heaters for a period of time that begins prior to controlling the fill valve to admit liquid to the vaporizer tank and ends after the time period after which the level of the liquid reaches the operating level. 38. A method for producing and flowing vapor from a liquid, comprising: heating a vaporizer tank to substantially a first operating temperature to produce vapor from the liquid, wherein at the first operating temperature, a substantially saturated vapor condition is produced in the vaporizer tank; regulating a flow of the vapor from the vaporizer tank to achieve a vapor flow rate; and controlling a fill valve coupled to the liquid inlet of the vaporizer tank to control the flow of liquid into the vaporizer tank to maintain a level of the liquid in the vaporizer tank between an overfill level and a minimum level; wherein heating the vaporizer tank, regulating the flow of vapor, and controlling the fill valve maintain the vaporizer tank at substantially the first operating temperature so that as the flow of vapor from the vaporizer tank is regulated to achieve the vapor flow rate and the fill valve is controlled to maintain the level of the liquid in the vaporizer tank between the overfill level and the minimum level, a pressure in the vaporizer tank is maintained at a substantially constant value above approximately 500 Torr to maintain the vaporizer tank in the substantially saturated condition.

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이 특허를 인용한 특허 피인용횟수: 3

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System and method for producing and delivering vapor

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System and method for producing and delivering vapor

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이 특허에 인용된 특허 (26)

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