IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
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출원번호 |
UP-0269857
(2008-11-12)
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등록번호 |
US-7682431
(2010-04-21)
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발명자
/ 주소 |
- Zieliene, Albina
- Vaskelis, Algirdas
- Norkus, Eugenijus
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출원인 / 주소 |
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대리인 / 주소 |
Martine Penilla & Gencarella, LLP
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인용정보 |
피인용 횟수 :
1 인용 특허 :
5 |
초록
▼
An electroless ruthenium plating solution is disclosed herein. The solution includes a ruthenium source, a polyamino polycarboxylic acid complexing agent, a reducing agent, a stabilizing agent, and a pH-modifying substance. A method of preparing an electroless ruthenium plating solution is also prov
An electroless ruthenium plating solution is disclosed herein. The solution includes a ruthenium source, a polyamino polycarboxylic acid complexing agent, a reducing agent, a stabilizing agent, and a pH-modifying substance. A method of preparing an electroless ruthenium plating solution is also provided.
대표청구항
▼
What is claimed is: 1. An electroless ruthenium plating solution, comprising: a ruthenium source; a polyamino polycarboxylic acid complexing agent; a reducing agent; hydroxylamine hydrosulphate ((NH2OH)2H2SO4), which functions as a stabilizing agent; and a pH-modifying substance. 2. The electrol
What is claimed is: 1. An electroless ruthenium plating solution, comprising: a ruthenium source; a polyamino polycarboxylic acid complexing agent; a reducing agent; hydroxylamine hydrosulphate ((NH2OH)2H2SO4), which functions as a stabilizing agent; and a pH-modifying substance. 2. The electroless ruthenium plating solution, as recited in claim 1, wherein, the ruthenium source is (RuNO)2(SO4)3. 3. The electroless ruthenium plating solution, as recited in claim 1, wherein the complexing agent is selected from the group consisting of nitrilotriacetic acid (NTA), trans-cyclohexane-1,2-diamine tetraacetic acid (CDTA), and ethylenediaminetetraacetic acid (EDTA). 4. The electroless ruthenium plating solution, as recited in claim 1, wherein, the reducing agent is NaBH4. 5. The electroless ruthenium plating solution, as recited in claim 1, wherein, the pH modifying substance is sodium hydroxide. 6. The electroless ruthenium plating solution, as recited in claim 1, wherein the complexing agent is a mixture of EDTA and ammonia. 7. The electroless ruthenium plating solution, as recited in claim 1, wherein the ruthenium source is ruthenium salt. 8. The electroless ruthenium plating solution, as recited in claim 1, wherein a concentration of the ruthenium source in the solution is between about 5 g/L and about 10 g/L. 9. The electroless ruthenium plating solution, as recited in claim 1, wherein a concentration of the reducing agent in the solution is between about 1 g/L and about 2 g/L. 10. The electroless ruthenium plating solution, as recited in claim 1, wherein a concentration of the ruthenium source is about 5.5 g/L. 11. The electroless ruthenium plating solution, as recited in claim 1, wherein a concentration of the polyamino polycarboxylic acid complexing agent is between about 10 g/L and about 20 g/L. 12. The electroless ruthenium plating solution, as recited in claim 1, wherein a concentration of the stabilizing agent is between about 0.5 and about 2 g/L. 13. The electroless ruthenium plating solution, as recited in claim 1, wherein a concentration of the pH modifying substance is about 40 g/L. 14. An electroless ruthenium plating solution, comprising: a ruthenium source; a polyamino polycarboxylic acid complexing agent consisting essentially of one of nitrilotriacetic acid (NTA) or trans-cyclohexane-1,2-diamine tetraacetic acid (CDTA); NaBH4 as a reducing agent; a stabilizing agent; and a pH-modifying substance. 15. The solution of claim 14, wherein the stabilizing agent is hydroxylamine hydrosulphate ((NH2OH)2H2SO4)). 16. The solution of claim 14, wherein the ruthenium source is ruthenium salt and wherein the pH modifying substance is a base. 17. An electroless ruthenium plating solution, comprising: (RuNO)2(SO4)3 as a ruthenium source; a polyamino polycarboxylic acid complexing agent; a reducing agent; a stabilizing agent; and a pH-modifying substance. 18. The solution of claim 17, wherein the stabilizing agent is hydroxylamine hydrosulphate (H2OH)2H2SO4) and wherein the reducing agent is NaBH4.
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