초록 ▼

A method of fabricating an organic film is provided. A non-reactive carrier gas is used to transport an organic vapor. The organic vapor is ejected through a nozzle block onto a cooled substrate, to form a patterned organic film. A device for carrying out the method is also provided. The device incl

A method of fabricating an organic film is provided. A non-reactive carrier gas is used to transport an organic vapor. The organic vapor is ejected through a nozzle block onto a cooled substrate, to form a patterned organic film. A device for carrying out the method is also provided. The device includes a source of organic vapors, a source of carrier gas and a vacuum chamber. A heated nozzle block attached to the source of organic vapors and the source of carrier gas has at least one nozzle adapted to eject carrier gas and organic vapors onto a cooled substrate disposed within the vacuum chamber.

대표청구항 ▼

What is claimed is: 1. A method of depositing an organic film, comprising: providing a heated non-reactive carrier gas transporting an organic vapor; and ejecting the heated non-reactive carrier gas transporting an organic vapor through a nozzle block with a bulk flow velocity at least as great as

What is claimed is: 1. A method of depositing an organic film, comprising: providing a heated non-reactive carrier gas transporting an organic vapor; and ejecting the heated non-reactive carrier gas transporting an organic vapor through a nozzle block with a bulk flow velocity at least as great as the thermal velocity of the molecules, onto a cooled substrate, to form a laterally-patterned organic film; the laterally-patterned organic film comprising a plurality of raised physical features, each feature covering an area of not more than about 10000 μm2. 2. The method of claim 1, wherein the nozzle block comprises a nozzle having a cross-section, and the shape of a feature in the deposited pattern corresponds to the cross-section. 3. The method of claim 2, wherein the width of the feature corresponds to the width of the nozzle. 4. The method of claim 1, wherein the nozzle is separated from the substrate by an amount on the order of the molecular mean free path of the carrier gas. 5. The method of claim 1, wherein the nozzle is separated from the substrate by an amount not more than the molecular mean free path of the carrier gas. 6. The method of claim 1 wherein the features are suitable for use as pixels in a light-emitting device. 7. The method of claim 1, wherein the nozzle block is heated. 8. The method of claim 7, wherein the nozzle block is heated to a temperature higher than the temperature at which physisorbtion of the organic vapor occurs on the nozzle surface. 9. The method of claim 7, wherein the substrate is cooled to a temperature lower than the nozzle block. 10. The method of claim 1, wherein the organic vapor comprises a small molecule organic material. 11. The method of claim 1, wherein the bulk velocity is sufficiently great to provide a substantially unidirectional jet of material. 12. The method of claim 1, wherein the laterally-patterned organic film is fabricated without the use of a mask. 13. The method of claim 1, wherein the nozzle block comprises a two-dimensional array of nozzles. 14. The method of claim 1, wherein the nozzle block and the substrate are moved relative to each other in a lateral direction during the ejection. 15. The method of claim 1, wherein the nozzle block includes a nozzle having a variable aperture. 16. A method of depositing an organic film, comprising: providing a heated non-reactive carrier gas transporting an organic vapor; and ejecting the heated non-reactive carrier gas transporting an organic vapor through a nozzle block, with a bulk flow velocity at least as great as the thermal velocity of the molecules, onto a cooled substrate, to form an organic film having a pattern; wherein the pattern comprises a plurality of laterally-spaced, raised physical features, each physical feature being deposited by a nozzle in the nozzle block. 17. The method of claim 16, wherein the width of each of the features is approximately equal to the width of the nozzle. 18. The method of claim 16, wherein the nozzle is separated from the substrate by an amount on the order of the molecular mean free path of the carrier gas. 19. The method of claim 16, wherein the nozzle is separated from the substrate by an amount not more than the molecular mean free path of the carrier gas. 20. The method of claim 16, wherein each feature covers an area of not more than about 10000 μm2. 21. The method of claim 20 wherein the features are suitable for use as pixels in a light-emitting device. 22. The method of claim 16, wherein the nozzle block is heated. 23. The method of claim 22, wherein the nozzle block is heated to a temperature higher than the temperature at which physisorbtion of the organic vapor occurs on the nozzle surface. 24. The method of claim 22, wherein the substrate is cooled to a temperature lower than the nozzle block. 25. The method of claim 16, wherein the organic vapor comprises a small molecule organic material. 26. The method of claim 16, wherein the bulk velocity is sufficiently great to provide a substantially unidirectional jet of material. 27. The method of claim 16, wherein the laterally-patterned organic film is fabricated without the use of a mask. 28. The method of claim 16, wherein the nozzle block comprises a two-dimensional array of nozzles. 29. The method of claim 16, wherein the nozzle block and the substrate are moved relative to each other in a lateral direction during the ejection. 30. The method of claim 16, wherein the nozzle block includes a nozzle having a variable aperture. 31. The method of claim 16, wherein a region of substrate between adjacent physical features is left substantially uncoated. 32. The method of claim 16, wherein the cross-section of each of the physical features is approximately the same shape as the cross section of a nozzle. 33. The method of claim 16, wherein each physical feature is deposited by a separate nozzle in the nozzle block. 34. The method of claim 16, wherein each nozzle in the nozzle block deposits a plurality of the physical features.