IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
UP-0255313
(2008-10-21)
|
등록번호 |
US-7694498
(2010-05-20)
|
우선권정보 |
TW-97113890 A(2008-04-17) |
발명자
/ 주소 |
- Pan, Yung-Shun
- Chen, Yu-Ming
|
출원인 / 주소 |
- Gudeng Precision Industrial Co., Ltd
|
대리인 / 주소 |
|
인용정보 |
피인용 횟수 :
2 인용 특허 :
9 |
초록
▼
The present invention provides a gas filling apparatus and gas filling port thereof. The gas filling apparatus is connected with the air feed apparatus which is introduced the gas into the first inlet port of the semiconductor device or reticle storage apparatus. The gas filling apparatus includes a
The present invention provides a gas filling apparatus and gas filling port thereof. The gas filling apparatus is connected with the air feed apparatus which is introduced the gas into the first inlet port of the semiconductor device or reticle storage apparatus. The gas filling apparatus includes a supporting base which is provided to hold the storage apparatus thereon, and at least one second inlet port which is disposed on the first inlet port of the storage apparatus so as to the gas is flowed into the storage apparatus through the second inlet port. The second inlet port includes a first base, a second base, a first elastic element, a fixing element, and a switch device. Both of the first base and second base have through holes, and opposite to each other. The first elastic element is used to maintain the airtight and is disposed on the second base and opposite to the first inlet port of the storage apparatus used to maintain the airtight. The fixing element is used to fix the elastic element on the second base. The switch device is disposed on the gap in the middle of the first base and the second base, and is provided to control the input or output for the gas of the second inlet port.
대표청구항
▼
What is claimed is: 1. A gas filling apparatus, connected with an air feed source for introducing a gas into a storage apparatus that is used for storing a semiconductor element or a reticle, said storage apparatus having at least one first inlet port, and said gas filling apparatus comprises: at l
What is claimed is: 1. A gas filling apparatus, connected with an air feed source for introducing a gas into a storage apparatus that is used for storing a semiconductor element or a reticle, said storage apparatus having at least one first inlet port, and said gas filling apparatus comprises: at least one supporting base is provided for holding said storage apparatus; and at least a second inlet port is disposed on said supporting base corresponding said first inlet port of said storage apparatus, said storage apparatus comprises: a first base having a first through hole therein; a second base is disposed on said first base and having a second through hole therein and corresponding said first through hole of said first base; a first elastic element is disposed on said second base corresponding a contact portion of said first inlet port of said storage apparatus; a fixing element is disposed on said second base and is used to fix said first elastic element on said second base; a switch device is disposed on both of said first through hole of said first base and said second through hole of said second base, said switch device comprises: a hollow tube having a first end that is fixed on said second base, and an enlarged portion of second end is engaged with said first base to close said first through hole of said first base, at least one gap is disposed on said enlarged portion adjacent to said hollow tube; and a retractable element is disposed around the outside of said hollow tube to supply said gas that flows into said hollow tube, wherein when said storage apparatus is disposed on said supporting base, said first inlet port of said storage apparatus is contacted with said second inlet port so that said second base is moved downward to drive said switch device moved downward to separate said enlarged portion from said first base to expose said gap of said hollow tube by the weight of said storage apparatus, thereby, said gas flows into said switch device and filled into said storage apparatus; when said storage apparatus is separated from said supporting base, said second base is raised up by said retractable element to drive said enlarged portion of said hollow tube to restore to the closed position of said first through hole of said first base. 2. The gas filling apparatus according to claim 1, wherein said contact portion between said first elastic element and said first inlet port is a plane surface or a cambered surface. 3. The gas filling apparatus according to claim 1, wherein said fixing element fixed said second base by way of wedge or spiral. 4. The gas filling apparatus according to claim 1, wherein said hollow tube of said switch device fixed said second base by way of wedge or spiral. 5. The gas filling apparatus according to claim 1, wherein said enlarged portion of said switch device has a second elastic element to maintain airtightness between said switch device and said first base. 6. The gas filling apparatus according to claim 1, wherein said first base has at least one fastening position which is fixed with said supporting base by at least one fastening element. 7. The gas filling apparatus according to claim 1, wherein said first base is connected with said supply device. 8. The gas filling apparatus according to claim 7, wherein the connection between said first base and said supply device by way of wedge or spiral. 9. An inlet port, disposed on a supporting base of a gas filling apparatus, said gas filling apparatus used for introducing a gas into a storage apparatus and is used for storing a semiconductor element or a reticle, said storage apparatus having at least one first inlet port, and said inlet port comprises: a first base having a first through hole therein; a second base is disposed on said first base and having a second through hole corresponding said first through hole of said first base; a first elastic element is disposed on said second base and corresponding a contact portion of said first inlet port of said storage apparatus; a fixing element is disposed on said second base and used to fix said first elastic element on said second base; a switch device is disposed on said first through hole of said first base and said second through hole of said second base for controlling input or output of said gas that is introduced into said second inlet port, said switch device comprising: a hollow tube having a first end that is fixed to said second base and a second end with an enlarged portion that is engaged said first base to said first through hole of said first base, and a portion adjacent to said enlarged portion having at least one gap that is used for introducing said gas into said hollow tube; a retractable element is disposed around outside of said hollow tube and engaged in the middle of said second base and said first base; wherein when said storage apparatus is disposed on said supporting base, said first inlet port of said storage apparatus is contacted said second inlet port, so that said second base is moved downward to drive said switch device moved downward to separate said enlarged portion from said first base to expose said gap of said hollow tube by the weight of said storage apparatus, thereby, said gas flows into said switch device and filled into said storage apparatus; when said storage apparatus is separated from said supporting base, said second base rises up by said retractable element to restore said enlarged portion of said hollow tube to the closed position of said first through hole of said first base. 10. The inlet port according to claim 9, wherein said contact portion between said first elastic element and said first inlet port is a plane surface or a cambered surface. 11. The inlet port according to claim 9, wherein said fixing element fixed said second base by way of wedge or spiral. 12. The inlet port according to claim 9, wherein said hollow tube of said switch device fixed said second base by way of wedge or spiral. 13. The inlet port according to claim 9, wherein said enlarged portion of said switch device has a second elastic element to maintain the airtight between said switch device and said first base. 14. The inlet port according to claim 9, wherein said first base has at least one fastening position which is fixed with said supporting base by at least one fastening element. 15. The inlet port according to claim 9, wherein said first base is connected with said supply device. 16. The inlet port according to claim 15, wherein the connection between said first base and said supply device by way of wedge or spiral.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.