IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
UP-0175481
(2008-07-18)
|
등록번호 |
US-7700421
(2010-05-20)
|
우선권정보 |
JP-5-346710(1993-12-22); JP-5-346712(1993-12-22); JP-5-346714(1993-12-22) |
발명자
/ 주소 |
- Miyanaga, Akiharu
- Ohtani, Hisashi
- Takemura, Yasuhiko
|
출원인 / 주소 |
- Semiconductor Energy Laboratory Co., Ltd.
|
대리인 / 주소 |
|
인용정보 |
피인용 횟수 :
0 인용 특허 :
114 |
초록
▼
A semiconductor device using a crystalline semiconductor film is manufactured. The crystalline semiconductor film is formed by providing an amorphous silicon film with a catalyst metal for promoting a crystallization thereof and then heated for performing a thermal crystallization, following which t
A semiconductor device using a crystalline semiconductor film is manufactured. The crystalline semiconductor film is formed by providing an amorphous silicon film with a catalyst metal for promoting a crystallization thereof and then heated for performing a thermal crystallization, following which the crystallized film is further exposed to a laser light for improving the crystallinity. The concentration of the catalyst metal in the semiconductor film and the location of the region to be added with the catalyst metal are so selected in order that a desired crystallinity and a desired crystal structure such as a vertical crystal growth or lateral crystal growth can be obtained. Further, active elements and driver elements of a circuit substrate for an active matrix type liquid crystal device are formed by such semiconductor devices having a desired crystallinity and crystal structure respectively.
대표청구항
▼
What is claimed is: 1. A method of manufacturing a semiconductor device comprising the steps of: forming an amorphous semiconductor film over a substrate in first and second regions; providing the amorphous semiconductor film in the first region and a part of the amorphous semiconductor film in the
What is claimed is: 1. A method of manufacturing a semiconductor device comprising the steps of: forming an amorphous semiconductor film over a substrate in first and second regions; providing the amorphous semiconductor film in the first region and a part of the amorphous semiconductor film in the second region with a metal containing material; crystallizing the semiconductor film in the first and second regions by heating; patterning the crystallized semiconductor film to respectively form first and second semiconductor islands in the first and second regions; forming insulating films over the first and second semiconductor islands; and forming gate electrodes over the first and second semiconductor islands with, respectively, the insulating films interposed therebetween, wherein the semiconductor device comprises a matrix circuit, and wherein the matrix circuit comprises capacitors for storing charges. 2. The method according to claim 1, wherein the metal containing material comprises a metal selected from the group consisting of Ni, Pd, Pt, Cu, Ag, Au, In, Sn, P, As and Sb. 3. The method according to claim 1, further comprising a step of adding an impurity into the first and second semiconductor islands to for impurity regions with a channel region therebetween in the first and second semiconductor islands. 4. A method of manufacturing a semiconductor device comprising the steps of: forming an amorphous semiconductor film over a substrate in first and second regions; providing the amorphous semiconductor film in the first region and a part of the amorphous semiconductor film in the second region with a metal containing material; crystallizing the semiconductor film in the first and second regions by heating, wherein the crystallization proceeds in parallel with a surface of the substrate from the portion where the metal containing material is provided in the second region; patterning the crystallized semiconductor film to respectively form first and second semiconductor islands in the first and second regions, wherein the crystals extend in parallel with the surface of the substrate through the second semiconductor island; forming insulating films over the first and second semiconductor islands; and forming gate electrodes over the first and second semiconductor islands with, respectively, the insulating films interposed therebetween, wherein the semiconductor device comprises a matrix circuit, and wherein the matrix circuit comprises capacitors for storing charges. 5. The method according to claim 4, wherein the metal containing material comprises a metal selected from the group consisting of Ni, Pd, Pt, Cu, Ag, Au, In, Sn, P, As and Sb. 6. The method according to claim 4, further comprising a step of adding an impurity into the first and second semiconductor islands to form impurity regions with a channel region therebetween in the first and second semiconductor islands. 7. A method of manufacturing a semiconductor device comprising the steps of: forming an amorphous semiconductor film over a substrate in first and second regions; applying a liquid to a surface of the amorphous semiconductor film in the first region and a liquid to a surface of a part of the amorphous semiconductor film in the second region, wherein a metal containing material is contained in the liquid; crystallizing the semiconductor film in the first and second regions by heating, wherein the crystallization proceeds in parallel with a surface of the substrate from the portion where the metal containing material is provided in the second region; patterning the crystallized semiconductor film to respectively form first and second semiconductor islands in the first and second regions, wherein the crystals extend in parallel with the surface of the substrate through the second semiconductor island; forming insulating films over the first and second semiconductor islands; and forming gate electrodes over the first and second semiconductor islands with, respectively, the insulating films interposed therebetween, wherein the semiconductor device comprises a matrix circuit, and wherein the matrix circuit comprises capacitors for storing charges. 8. The method according to claim 7, wherein the metal containing material comprises a metal selected from the group consisting of Ni, Pd, Pt, Cu, Ag, Au, In, Sn, P, As and Sb. 9. The method according to claim 7, further comprising a step of adding an impurity into the first and second semiconductor islands to form impurity regions with a channel region therebetween in the first and second semiconductor islands. 10. A method of manufacturing a semiconductor device comprising the steps of: forming an amorphous semiconductor film over a substrate in first and second regions; providing the amorphous semiconductor film in the first region and a part of the amorphous semiconductor film in the second region with a metal containing material; crystallizing the semiconductor film in the first and second regions by heating, wherein the crystallization proceeds in parallel with a surface of the substrate from the portion where the metal containing material is provided in the second region; patterning the crystallized semiconductor film to respectively form first and second semiconductor islands in the first and second regions, wherein the crystals extend in parallel with the surface of the substrate through the second semiconductor island; forming insulating films over the first and second semiconductor islands; forming gate electrodes over the first and second semiconductor islands with, respectively, the insulating films interposed therebetween; and forming at least two impurity regions with a channel region therebetween in the first and second semiconductor islands, wherein crystals extend in the channel region of the second semiconductor island along a carrier flow direction of the channel region, wherein the semiconductor device comprises a matrix circuit, and wherein the matrix circuit comprises capacitors for storing charges. 11. The method according to claim 10, wherein the metal containing material comprises a metal selected from the group consisting of Ni, Pd, Pt, Cu, Ag, Au, In, Sn, P, As and Sb. 12. A method of manufacturing a semiconductor device comprising the steps of: forming an amorphous semiconductor film over a substrate in first and second regions; applying a liquid to a surface of the amorphous semiconductor film in the first region and a liquid to a surface of a part of the amorphous semiconductor film in the second region, wherein a metal containing material is contained in the liquid; crystallizing the semiconductor film in the first and second regions by heating, wherein the crystallization proceeds in parallel with a surface of the substrate from the portion where the metal containing material is provided in the second region; patterning the crystallized semiconductor film to respectively form first and second semiconductor islands in the first and second regions, wherein the crystals extend in parallel with the surface of the substrate through the second semiconductor island; forming insulating films over the first and second semiconductor islands; forming gate electrodes over the first and second semiconductor islands with, respectively, the insulating films interposed therebetween; and forming at least two impurity regions with a channel region therebetween in the first and second semiconductor islands, wherein crystals extend in the channel region of the second semiconductor island along a carrier flow direction of the channel region, wherein the semiconductor device comprises a matrix circuit, and wherein the matrix circuit comprises capacitors for storing charges. 13. The method according to claim 12, wherein the metal containing material comprises a metal selected from the group consisting of Ni, Pd, Pt, Cu, Ag, Au, In, Sn, P, As and Sb. 14. The method according to claim 1, further comprising a step of irradiating the crystallized semiconductor film with a laser light prior to the patterning. 15. The method according to claim 4, further comprising a step of irradiating the crystallized semiconductor film with a laser light prior to the patterning. 16. The method according to claim 7, further comprising a step of irradiating the crystallized semiconductor film with a laser light prior to the patterning. 17. The method according to claim 10, further comprising a step of irradiating the crystallized semiconductor film with a laser light prior to the patterning. 18. The method according to claim 12, further comprising a step of irradiating the crystallized semiconductor film with a laser light prior to the patterning. 19. The method according to claim 1, the matrix circuit is included in a non-volatile memory. 20. The method according to claim 1, wherein the matrix circuit is included in a RAM. 21. The method according to claim 4, the matrix circuit is included in a non-volatile memory. 22. The method according to claim 4, wherein the matrix circuit is included in a RAM. 23. The method according to claim 7, the matrix circuit is included in a non-volatile memory. 24. The method according to claim 7, wherein the matrix circuit is included in a RAM. 25. The method according to claim 10, the matrix circuit is included in a non-volatile memory. 26. The method according to claim 10, wherein the matrix circuit is included in a RAM. 27. The method according to claim 12, the matrix circuit is included in a non-volatile memory. 28. The method according to claim 12, wherein the matrix circuit is included in a RAM. 29. The method according to claim 1, wherein the first semiconductor island is used in a pixel region and the second semiconductor island is used in peripheral circuit region. 30. The method according to claim 4, wherein the first semiconductor island is used in a pixel region and the second semiconductor island is used in peripheral circuit region. 31. The method according to claim 7, wherein the first semiconductor island is used in a pixel region and the second semiconductor island is used in peripheral circuit region. 32. The method according to claim 10, wherein the first semiconductor island is used in a pixel region and the second semiconductor island is used in peripheral circuit region. 33. The method according to claim 12, wherein the first semiconductor island is used in a pixel region and the second semiconductor island is used in peripheral circuit region. 34. The method according to claim 7, wherein the metal containing material is dissolved in the liquid. 35. The method according to claim 12, wherein the metal containing material is dissolved in the liquid.
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